Ultra-high purity storage and dispensing of liquid reagents

Patent metadata

Field	Value
Publication number	US-10358263-B2
Application number	US-201314419458-A
Country	US
Kind code	B2
Filing date	Aug 7, 2013
Priority date	Aug 9, 2012
Publication date	Jul 23, 2019
Grant date	Jul 23, 2019

Abstract

A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.

First claim

What is claimed is:

1. A supply vessel for dispensing of ultra-high purity chemical reagents, comprising: a metal container comprising a removable cover defining an enclosable interior volume including interior surface structure coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating, wherein the ultra-high purity effective polyperfluoroalkoxyethylene coating has a thickness in a range of from 2.5 to 12 mils and is not blended with another copolymer, and wherein the interior surface structure includes a container side wall, floor, and cover surfaces bounding the interior volume and surfaces of a discharge conduit and a float sensor within the interior volume.

2. The supply vessel of claim 1 , wherein the container is additionally coated with the ultra-high purity effective polyperfluoroalkoxyethylene coating on exterior surfaces thereof.

3. The supply vessel of claim 1 , wherein the removable cover comprises spaced apart inlet and outlet passages therein.

4. The supply vessel of claim 3 , wherein the outlet passage communicates with a discharge conduit joined to the cover and extending into a lower portion of the interior volume of the supply vessel.

5. The supply vessel of claim 1 , wherein the metal container is fabricated of a metal selected from the group consisting of steel, titanium, and aluminum.

6. The supply vessel of claim 1 , wherein the metal container is fabricated of stainless steel.

7. The supply vessel of claim 1 , comprised in an ultra-high purity deionized water dispensing apparatus.

8. The supply vessel of claim 1 , comprised in a semiconductor manufacturing tool.

9. The supply vessel of claim 1 , wherein the ultra-high purity effective polyperfluoroalkoxyethylene coating is applied by powder coating.

Assignees

• Advanced Tech Materials Inc
• Entegris Inc

Inventors

• Naito Donn K
• Krell Andy
• Mcferon Mitchell W
• Jackson Steven
• Robison Joel

Classifications

• H10P72/0404 Primary

  for general liquid treatment, e.g. etching followed by cleaning · CPC title

• B65D85/70

  for materials not otherwise provided for · CPC title

• B65D43/02

  Removable lids or covers (with means for piercing, cutting, or tearing a frangible inner closure B65D51/22) · CPC title

• B65D25/38

  Devices for discharging contents ({containers formed by folding or erecting paper blanks B65D5/72} ; incorporated in removable or non-permanently secured closure members B65D47/00; for discharging thin flat articles B65D83/08) · CPC title

• B65D25/14 Primary

  Linings or internal coatings (of containers made by folding or erecting blanks made of paper B65D5/56 {; linings for domestic water storage heaters F24H1/183}) · CPC title