Lamp heating for process chamber

Patent metadata

Field	Value
Publication number	US-10356848-B2
Application number	US-201615012495-A
Country	US
Kind code	B2
Filing date	Feb 1, 2016
Priority date	Jan 30, 2015
Publication date	Jul 16, 2019
Grant date	Jul 16, 2019

Abstract

A process chamber is provided including a top, a bottom, and a sidewall coupled together to define a volume. A substrate support is disposed in the volume. The process chamber further includes one or more lampheads facing the substrate support, each lamphead comprising an arrangement of lamps disposed along a plane. The arrangement of lamps is defined by a center and a plurality of concentric ring-shaped zones. Each ring-shaped zone is defined by an inner edge and an outer edge and each ring-shaped zone includes three or more alignments of one or more lamps. Each alignment of one or more lamps has a first end extending linearly to a second end that are separated by at least 10 degrees around the center. The first end and the second end are both located within one ring-shaped zone. Each alignment located within a same ring-shaped zone is equidistant to the center.

First claim

The invention claimed is:

1. A process chamber, comprising:
a top, a bottom, and a sidewall coupled together to define a volume;
a substrate support disposed in the volume;
one or more lampheads facing the substrate support, each lamphead of the one or more lampheads comprising an arrangement of lamps disposed along a plane, wherein the arrangement of lamps is defined by a center and a plurality of concentric ring-shaped zones about the center, each ring-shaped zone defined by an inner edge and an outer edge, and each ring-shaped zone comprising three or more alignments of lamps within the arrangement of lamps; wherein:
each lamp of the three or more alignments of lamps comprises a first end extending linearly to a second end;
the first end and the second end are separated by at least 10 degrees around the center;
the first end and the second end are both located within one ring-shaped zone of the plurality of concentric ring-shaped zones;
the three or more alignments of lamps are located within a same ring-shaped zone of the plurality of concentric ring-shaped zones; and the three of more alignments of lamps are positioned equidistant from the center; and

a plurality of additional heating sources, wherein a heating source of the plurality of additional heating sources is disposed between each adjacent pair of alignments of lamps of the three or more alignments of lamps.

2. The process chamber of claim 1 , wherein the each lamp of the three or more alignments of lamps includes a linear lamp extending from the first end to the second end, each linear lamp-having two or more filaments between the first end and the second end.

3. The process chamber of claim 2 , wherein each filament in the each lamp of the three or more alignments of lamps is located within a first ring-shaped zone located at a different angular location relative to the center than one or more other filaments of the each lamp of the three or more alignments of lamps located within the first ring-shaped zone.

4. The process chamber of claim 3 , wherein the each lamp of the three or more alignments of lamps includes three or more power terminals and each filament in each lamp of the three or more alignments of lamps is electrically connected to at least one different power terminal than the one or more other filaments of the each lamp of the three or more alignments of lamps.

5. The process chamber of claim 2 , wherein the each lamp of the three or more alignments of lamps extends at least 15 degrees around the center from the first end to the second end.

6. The process chamber of claim 2 , wherein the each lamp of the three or more alignments of lamps extends at least 30 degrees around the center from the first end to the second end.

7. The process chamber of claim 2 , wherein the plurality of concentric ring-shaped zones comprises from three to seven ring-shaped zones.

8. The process chamber of claim 2 , wherein a first end of a first lamp in a first ring-shaped zone is positioned at a same angular location relative to the center as a first end of a second lamp of the three or more alignments of lamps in a second ring-shaped zone.

9. A process chamber, comprising:
a top, a bottom, and a sidewall coupled together to define a volume;
a substrate support disposed in the volume; and
a lamphead facing the substrate support, the lamphead comprising an arrangement of lamps disposed along a plane, wherein the arrangement of lamps is defined by a center and three or more sectors, each sector of the three or more sectors defined by a first leg extending from the center to a first outer point, a second leg extending from the center to a second outer point, and a connecting portion between the first outer point and the second outer point, the each sector of the three or more sectors comprising a plurality of linear lamps, wherein:
each linear lamp of the plurality of linear lamps comprises a first end and a second end that are separated by at least 10 degrees around the center; wherein:
the first end and the second end of the each linear lamp of the plurality of linear lamps are both located within one sector of the three or more sectors; and
the each linear lamp of the plurality of linear lamps of the each sector of the three or more sectors is located at a different distance from the center; and

a plurality of heat sources positioned along the first leg and the second leg of the each sector of the three or more sectors, wherein a surface to emit radiation of each heat source of the plurality of heat sources extends less than 5 degrees around the center.

10. The process chamber of claim 9 , wherein the each linear lamp of the plurality of linear lamps further comprises two or more filaments between the first end and second end.

11. The process chamber of claim 10 , wherein each filament in a first linear lamp is located at a different angular location relative to the center than one or more other filaments in the first linear lamp.

12. The process chamber of claim 9 , wherein the each linear lamp of the plurality of linear lamps extends at least 15 degrees around the center from the first end to the second end.

13. The process chamber of claim 9 , wherein the each linear lamp of the plurality of linear lamps extends at least 30 degrees around the center from the first end to the second end.

14. The process chamber of claim 9 , wherein the three or more sectors comprises from three to seven sectors.

15. The process chamber of claim 9 , further comprising a plurality of coherent radiation sources positioned along the first leg and the second leg of the each sector of the three or more sectors.

16. A process chamber, comprising:
a top, a bottom, and a sidewall coupled together to define a volume;
a substrate support disposed in the volume, the substrate support having a plurality of substrate locations distributed around a central location of the substrate support, each substrate location having a substrate supporting surface; and
a lamphead facing the substrate support, the lamphead comprising an arrangement of lamps disposed along a plane that is parallel to the substrate supporting surfaces of the substrate locations, wherein the arrangement of lamps is defined by a center, from three to seven ring-shaped zones, and from three to seven sectors overlapping the from three to seven ring-shaped zones; wherein:
each ring-shaped zone of the from three to seven ring-shaped zones is concentric with the center and the each ring-shaped zone is defined by an inner edge and an outer edge;
each sector of the from three to seven sectors is defined by a first leg extending from the center to a first outer point, a second leg extending from the center to a second outer point, and a connecting portion between the first outer point and the second outer point;
each linear lamp of the arrangement of lamps comprises a first end and a second end that are both located within one ring-shaped zone of the three to seven ring-shaped zones and one sector of the from three to seven sectors, wherein the each linear lamp of the arrangement of lamps extends at least 30 degrees around the center of the plane; and

a plurality of heat sources positioned along the first leg and the second leg of the each sector of the from three to seven sectors, wherein a surface to emit radiation of each heat source of the plurality of heat sources extends less than 5 degrees around the center.

Assignees

• Applied Materials Inc

Inventors

• Samir Mehmet Tugrul
• Chu Schubert S

Classifications

• F26B3/30

  from infrared-emitting elements {(by radiation emanating from passages containing heated fluids other than combustion gases F26B23/10)} · CPC title

• H05B3/0047 Primary

  for semiconductor manufacture · CPC title

• H10P72/0436

  mainly by radiation · CPC title