Polymer, organic layer composition, and method of forming patterns

Patent metadata

Field	Value
Publication number	US-10353292-B2
Application number	US-201615355088-A
Country	US
Kind code	B2
Filing date	Nov 18, 2016
Priority date	Dec 16, 2015
Publication date	Jul 16, 2019
Grant date	Jul 16, 2019

Abstract

A polymer, an organic layer composition, and a method of forming patterns, the polymer including a structural unit represented by Chemical Formula 1:

First claim

What is claimed is:

1. A polymer comprising a structural unit represented by Chemical Formula 1:

wherein, in Chemical Formula 1,
Ar 1 and Ar 2 are each independently a substituted or unsubstituted benzene ring or an aromatic ring including two to four fused substituted or unsubstituted benzene rings,
A 1 and A 2 are each independently a substituted or unsubstituted aromatic ring, provided that:
at least one of A 1 and A 2 is substituted with a hydrogen-bondable functional group, the hydrogen-bondable functional group being a hydroxy group, an amine group, or a combination thereof, and
a sum of a number of the hydrogen-bondable functional group of A 1 and a number of the hydrogen-bondable functional group of A 2 is greater than or equal to 3,

L is a divalent organic group, and
* is a linking point.

2. The polymer as claimed in claim 1 , wherein A 1 and A 2 each independently include a substituted or unsubstituted one of the following moieties:

3. The polymer as claimed in claim 1 , wherein L is represented by one of Chemical Formulae Z1 to Z4:

wherein, in Chemical Formulae Z1 to Z4,
a and b are each independently 0 or 1,
c is an integer of 1 to 5,
* is a linking point, and
Y 1 to Y 4 each independently include a substituted or unsubstituted one of the following moieties:

wherein, in the above moieties,
M, M′, and M″ are each independently a substituted or unsubstituted C1 to C10 alkylene group, O, S, SO 2 , CR a R b , NR d , or carbonyl, in which R a , R h , and R d are each independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a substituted or unsubstituted C6 to C30 aryl group, a halogen atom, a halogen-containing group, or a combination thereof,
r is an integer of 0 to 10, and
s is an integer of 3 to 10.

4. The polymer as claimed in claim 1 , wherein the sum of the number of the hydrogen-bondable functional group of A 1 and the number of the hydrogen-bondable functional group of A 2 is 3, 4, 5, or 6.

5. The polymer as claimed in claim 1 , wherein the structural unit represented by Chemical Formula 1 is represented by one of Chemical Formulae 1-1 and 1-2:

wherein, in Chemical Formulae 1-1 and 1-2,
R 1 to R 6 are each independently the hydroxy group, the amine group, or the combination thereof,
n 1 to n 6 are each independently an integer of 0 to 3, a sum of n 1 and n 2 and a sum of n 3 to n 6 each independently being greater than or equal to 3,
Z 1 and Z 2 are each independently a hydroxy group, a methoxy group, an ethoxy group, a halogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C1 to C30 alkoxy group, or a combination thereof,
k 1 and k 2 are independently an integer of 0 to 4,
L is a divalent organic group, and
* is a linking point.

6. The polymer as claimed in claim 1 , wherein the polymer further includes a structural unit represented by Chemical Formula 2:
*-X-L-*  [Chemical Formula 2]

wherein, in Chemical Formula 2,
X is an aromatic ring group substituted with at least one hydrogen-bondable functional group or a heteroaromatic ring group substituted with at least one hydrogen-bondable functional group,
L is a divalent organic group, and
* is a linking point.

7. The polymer as claimed in claim 6 , wherein the hydrogen-bondable functional group of X is a hydroxy group, an amine group, or a combination thereof.

8. The polymer as claimed in claim 1 , wherein the polymer has a weight average molecular weight of about 500 to about 200,000.

9. An organic layer composition, comprising:
a solvent; and
a polymer including a structural unit represented by Chemical Formula 1,

wherein, in Chemical Formula 1,
Ar 1 and Ar 2 are each independently a substituted or unsubstituted benzene ring or an aromatic ring including two to four fused substituted or unsubstituted benzene rings,
A 1 and A 2 are each independently a substituted or unsubstituted aromatic ring, provided that:
at least one of A 1 and A 2 is substituted with a hydrogen-bondable functional group, the hydrogen-bondable functional group being a hydroxy group, an amine group, or a combination thereof, and
a sum of a number of the hydrogen-bondable functional group of A 1 and a number of the hydrogen-bondable functional group of A 2 is greater than or equal to 3,

L is a divalent organic group, and
* is a linking point.

10. The organic layer composition as claimed in claim 9 , wherein A 1 and A 2 each independently include a substituted or unsubstituted one of the following moieties:

11. The organic layer composition as claimed in claim 9 , wherein L is represented by one of Chemical Formulae Z1 to Z4:

wherein, in Chemical Formulae Z1 to Z4,
a and b are each independently 0 or 1,
c is an integer of 1 to 5,
* is a linking point, and
Y 1 to Y 4 each independently include a substituted or unsubstituted one of the following moieties:

wherein, in the above moieties,
M, M′, and M″ are each independently a substituted or unsubstituted C1 to C10 alkylene group, O, S, SO 2 , CR a R b , NR d , or carbonyl, in which R a , R b , and R d are each independently hydrogen, a substituted or unsubstituted C1 to C10 alkyl group, a substituted or unsubstituted C6 to C30 aryl group, a halogen atom, a halogen-containing group, or a combination thereof,
r is an integer of 0 to 10, and
s is an integer of 3 to 10.

12. The organic layer composition as claimed in claim 9 , the sum of the number of the hydrogen-bondable functional group of A 1 and the number of the hydrogen-bondable functional group of A 2 is 3, 4, 5, or 6.

13. The organic layer composition as claimed in claim 9 , wherein the structural unit represented by Chemical Formula 1 is represented by one of Chemical Formulae 1-1 and 1-2:

wherein, in Chemical Formulae 1-1 and 1-2,
R 1 to R 6 are independently the hydroxy group, the amine group, or the combination thereof,
n 1 to n 6 are

Assignees

• Samsung Sdi Co Ltd

Inventors

• Nam Younhee
• Kim Sunghwan
• Kim Minsoo
• Park Youjung
• Jeong Seulgi

Classifications

• H10P50/242

  of Group IV materials · CPC title

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title

• H10P50/695

  characterised by the process involved to create the mask, e.g. lift-off masks or sidewalls or to modify the mask · CPC title

• H10P50/692

  characterised by their composition, e.g. multilayer masks or materials · CPC title

• C08G8/04

  of aldehydes · CPC title