Optical sensor package including a cavity formed in an image sensor die

Patent metadata

Field	Value
Publication number	US-10347786-B2
Application number	US-201815880090-A
Country	US
Kind code	B2
Filing date	Jan 25, 2018
Priority date	Jun 30, 2016
Publication date	Jul 9, 2019
Grant date	Jul 9, 2019

Abstract

One or more embodiments are directed to system in package (SiP) for optical devices, including proximity sensor packaging. One embodiment is directed to optical sensor that includes a substrate, an image sensor die and a light-emitting device. A first surface of the image sensor die is coupled to the substrate, and a recess is formed extending into the image sensor die from the first surface toward a second surface of the image sensor die. A light transmissive layer is formed in the image sensor die between the recess and the first surface. The optical sensor further includes a light-emitting device that is coupled to the substrate and positioned within the recess formed in the image sensor die.

First claim

The invention claimed is:

1. An optical sensor package, comprising:
a substrate having a surface;
an image sensor die coupled to the substrate, the image sensor die comprising a semiconductor material and including:
a first surface directly attached to the surface of the substrate,
a second surface,
an image sensor at the second surface, and
a through opening that extends through the first surface and the second surface; and

a light-emitting device directly attached to the surface of the substrate and positioned within the through opening.

2. The optical sensor package of claim 1 wherein the light-emitting device comprises at least one of a vertical cavity surface emitting laser (VCSEL) and a light-emitting diode (LED).

3. The optical sensor package of claim 1 , further comprising a cap positioned around side surfaces of the image sensor die, the cap having sidewalls and an inner wall, the inner wall optically separating the light-emitting device from an image sensor region of the image sensor die.

4. The optical sensor package of claim 3 wherein the cap covers at least a portion of the second surface of the image sensor die.

5. The optical sensor package of claim 3 wherein the image sensor die includes a reference sensor formed in the second surface and operable to receive light emitted from the light-emitting device and reflected from an inner surface of the cap.

6. The optical sensor package of claim 1 , further comprising a molding material that covers the image sensor die.

7. The optical sensor package of claim 6 wherein the molding material includes an opaque molding portion that covers the image sensor die, and a transparent molding portion that covers the through opening.

8. An optical sensor package, comprising:
a substrate having, a surface;
an image sensor die coupled to the substrate, the image sensor die comprising a semiconductor material and including:
a first surface directly attached to the surface of the substrate,
a second surface,
an image sensor at the second surface, and
a recess that extends into the image sensor die from the first surface toward the second surface, the recess forms a cavity with the surface of the substrate;

a light-emitting device directly attached to the surface of the substrate and positioned within the cavity; and
a cover that optically separates the light-emitting device from the image sensor.

9. The optical sensor package of claim 8 wherein the image sensor die includes a through opening between the first surface and the recess, the through opening has a width that is smaller than a width of the recess.

10. The optical sensor package of claim 9 wherein the cover is molding that includes an opaque molding that covers the image sensor die, and a transparent molding that covers the through opening.

11. The optical sensor package of claim 9 wherein the image sensor die includes a light transmissive layer formed at the second surface and facing the recess.

12. The optical sensor package of claim 11 wherein the light transmissive layer of the image sensor die includes a light diffraction layer.

13. The optical sensor package of claim 11 wherein the semiconductor material is silicon, and the light transmissive layer is formed from the silicon of the image sensor die.

14. The optical sensor package of claim 11 wherein the light transmissive layer of the image sensor die is an active layer operable to receive a control signal and, in response, to vary one or more optical characteristics of the light transmissive layer.

15. The optical sensor package of claim 14 wherein the one or more optical characteristics includes at least one of diffraction, refractive index and polarization characteristics.

16. The optical sensor package of claim 11 wherein the cover is a cap coupled to the substrate, wherein the cap has an inner wall that optically separates the light-emitting device from the image sensor.

17. A method, comprising:
electrically and mechanically coupling a light-emitting device directly to a surface of a substrate;
placing an image sensor die having a through opening over the light-emitting device such that the light-emitting device is positioned in the through opening, the image sensor die including a semiconductor material and having opposite first and second surfaces and an image sensor at the second surface; and
electrically and mechanically coupling the first surface of the image sensor die directly to the surface of the substrate with the light-emitting device located in the through opening of the image sensor die.

18. The method of claim 17 , further comprising:
positioning a cap over the image sensor die, the cap including sidewalls and an inner wall, the cap having a first transparent region over the light-emitting device and a second transparent region over an image sensor portion of the image sensor die.

19. The method of claim 17 , further comprising:
covering the image sensor die with a molding material.

20. The method of claim 19 wherein covering the image sensor die with the molding material includes:
covering a first portion of the image sensor die with an opaque molding material; and
covering a second portion of the image sensor die with a transparent molding material, the second portion including the through opening.

Assignees

• St Microelectronics Pte Ltd

Inventors

• Renard Loic Pierre Louis
• Ang Cheng-Lay

Classifications

• Y02E10/50

  Photovoltaic [PV] energy · CPC title

• G01S7/4813

  Housing arrangements · CPC title

• H01G9/20

  Light-sensitive devices · CPC title

• H01S5/183

  having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] · CPC title

• G01S17/08

  for measuring distance only (indirect measurement G01S17/46; active triangulation systems G01S17/48) · CPC title