Ultraviolet light activated oxidation process for the reduction of organic carbon in semiconductor process water

Patent metadata

Field	Value
Publication number	US-10343939-B2
Application number	US-201414169928-A
Country	US
Kind code	B2
Filing date	Jan 31, 2014
Priority date	Jun 6, 2006
Publication date	Jul 9, 2019
Grant date	Jul 9, 2019

Abstract

In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The light emitting device provides light capable of decomposing persulfate anions.

First claim

The invention claimed is:

1. A system for treatment of water for use in semiconductor manufacturing, comprising:
a source of untreated water;
a continuous stirred tank chemical reactor in direct fluid communication with the source of untreated water;
a persulfate addition system fluidly connected to the continuous stirred tank chemical reactor, the persulfate addition system comprising:
a persulfate feed tank; and
a persulfate feed pump fluidly connected to the persulfate feed tank and configured to deliver persulfate to the continuous stirred tank chemical reactor;

an ultraviolet lamp positioned within the continuous stirred tank chemical reactor;
a plug flow reactor having an inlet in direct fluid communication with an outlet of the continuous stirred tank reactor, an ultraviolet lamp being positioned within the plug flow reactor; and
a total organic carbon analyzer configured to receive an input signal of a total organic carbon measurement and configured to provide an output signal to control the persulfate feed pump in response to the input signal.

2. The system of claim 1 , wherein the ultraviolet lamp positioned within the continuous stirred tank chemical reactor is configured to emit light at a frequency from about 190 nm to about 220 nm.

3. The system of claim 1 , wherein the total organic carbon analyzer is disposed upstream of the continuous stirred tank chemical reactor.

4. The system of claim 1 , wherein the total organic carbon analyzer is disposed downstream of the continuous stirred tank chemical reactor.

5. The system of claim 4 , wherein the total organic carbon analyzer is further configured to provide an output signal to increase persulfate delivered to the continuous stirred tank chemical reactor in response to an input signal indicating that the total organic carbon measurement exceeds 5 ppb.

6. The system of claim 4 , wherein the total organic carbon analyzer is further configured to provide an output signal to increase persulfate delivered to the continuous stirred tank chemical reactor in response to an input signal indicating that the total organic carbon measurement exceeds 1 ppb.

7. The system of claim 1 , wherein untreated water from the source of untreated water has a total organic carbon (TOC) value of less than 3 ppm.

8. The system of claim 1 , wherein the total organic carbon analyzer is further configured to provide an output signal to control a fluid retention time in the continuous stirred tank chemical reactor in response to the input signal.

9. The system of claim 1 , wherein the total organic carbon analyzer is further configured to provide an output signal to adjust a wavelength of light emitted by the ultraviolet lamp positioned within the continuous stirred tank chemical reactor in response to the input signal.

10. The system of claim 1 , wherein the total organic carbon analyzer is disposed downstream of the plug flow reactor.

11. The system of claim 1 , wherein the ultraviolet lamp positioned within the plug flow reactor is configured to emit light at a frequency from about 190 nm to about 220 nm.

12. The system of claim 1 , wherein the outlet of the continuous stirred tank chemical reactor is fluidly connected to a point of use for ultrapure water produced by the system.

13. The system of claim 1 , wherein the outlet of the plug flow reactor is fluidly connected to a point of use for ultrapure water produced by the system.

Assignees

• Evoqua Water Tech Llc

Inventors

• Sitkiewitz Steve D
• Carmignani Gary M
• Frederick Lee W

Classifications

• C02F1/441

  by reverse osmosis · CPC title

• C02F2209/003

  Downstream control, i.e. outlet monitoring, e.g. to check the treating agents, such as halogens or ozone, leaving the process · CPC title

• C02F1/4695

  electrodeionisation · CPC title

• C02F1/722 Primary

  Oxidation by peroxides · CPC title

• C02F2103/346

  from semiconductor processing, e.g. waste water from polishing of wafers · CPC title