End effector

Patent metadata

Field	Value
Publication number	US-10343292-B2
Application number	US-201815875708-A
Country	US
Kind code	B2
Filing date	Jan 19, 2018
Priority date	Jan 27, 2017
Publication date	Jul 9, 2019
Grant date	Jul 9, 2019

Abstract

An end effector for holding substrates has a multi-layered main body and a fluid channel which is provided in the main body. The main body has a receiving end and a fastening end, and include at least two layers, wherein at least one of the layers is not inherently stable, and is formed from a synthetic material film.

First claim

The invention claimed is:

1. An end effector for holding substrates, having a multi-layered main body and a fluid vacuum or excess pressure channel which is provided in the main body,
wherein the main body comprises three layers which are congruent to and fixed to one another and have the contour of the end effector,
wherein each of the three layers is not inherently stable, but has sufficient stability to hold the substrates when the three layers are fixed together, and
wherein none of the layers of the end effector is inherently stable.

2. The end effector as claimed in claim 1 , wherein at least one of a groove and a slot is incorporated in at least one of the layers and partially defines the fluid channel.

3. The end effector as claimed in claim 2 , wherein the at least one of a groove and a slot is covered and sealed by at least another one of the layers.

4. The end effector as claimed in claim 3 , wherein the middle layer of the three layers is provided with the slot which is covered by the outer two layers, thus forming the fluid channel.

5. The end effector as claimed in claim 2 , wherein the layer in which the at least one of a groove and a slot is incorporated, is formed from a metal sheet.

6. The end effector as claimed in claim 1 , wherein at least one of three layers is a prefabricated component.

7. The end effector as claimed in claim 1 , wherein the layers are formed from a synthetic material film.

8. The end effector as claimed in claim 1 , wherein the main body comprises a receiving end and a fastening end, wherein a holding region for holding the substrate is provided on the receiving end.

9. The end effector as claimed in claim 8 , wherein a cut-out extends from the receiving end into the main body, wherein holding arms are formed by the cut-out.

10. The end effector as claimed in claim 9 , wherein the cut-out comprises at least one radius on its end facing the fastening end and is U-shaped.

11. The end effector as claimed claim 9 , wherein the fluid channel extends from the fastening end into the holding arms and at that location issues into openings.

12. The end effector as claimed in claim 11 , wherein a sealing lip is provided in or on the opening.

13. The end effector as claimed in claim 11 , wherein a vacuum suction cup or a fixing apparatus based on the Bernoulli effect is provided in or on the openings.

14. The end effector as claimed in claim 8 , wherein a flange plate, is provided on the fastening end in order to fasten the end effector to robotic arm.

15. The end effector as claimed in claim 1 , wherein the main body consists of three layers.

16. An end effector for holding substrates, having a multi-layered main body and a fluid vacuum or excess pressure channel which is provided in the main body,
wherein the main body comprises at least two layers which are congruent and fixed to one another,
wherein at least one of the at least two layers is a prefabricated component,
wherein each of the two layers is not inherently stable, but has sufficient stability to hold the substrates when the two layers are fixed together,
wherein the main body comprises a receiving end and a fastening end, and
wherein a holding region for holding the substrate is provided on the receiving end and a flange region is provided at the fastening end.

17. The end effector as claimed in claim 16 , wherein the layers are formed from a synthetic material film.

18. An end effector for holding substrates, having a multi-layered main body and a fluid vacuum or excess pressure channel which is provided in the main body,
wherein the main body comprises at least two layers which are fixed to one another,
wherein the two layers are not inherently stable, but have sufficient stability to hold the substrates when the two layers are fixed together, and
wherein the fluid channel issues into openings, wherein a vacuum suction cup is provided in the openings and comprises a separate sealing lip, and
wherein the main body comprises an upper layer, a middle layer and a lower layer, and
the vacuum suction cup has a carrier that is passed through the middle layer and the upper layer is held in position by the lower layer.

19. The end effector as claimed in claim 18 , wherein the layers are formed from a synthetic material film.

20. An end effector for holding substrates, having a multi-layered main body and a fluid vacuum or excess pressure channel which is provided in the main body,
wherein the main body comprises three layers which are congruent to and fixed to one another and have the contour of the end effector, and
wherein each of the three layers is not inherently stable but has sufficient stability to hold the substrates when the three layers are fixed together, and
wherein the middle layer of the three layers is provided with a slot which is covered and sealed by the outer two layers, thus forming the fluid channel.

Assignees

• Suss Microtec Lithography Gmbh

Inventors

• Bogner Bernhard

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• G03F7/7075

  Handling workpieces outside exposure position, e.g. SMIF box · CPC title

• B32B2457/14

  Semiconductor wafers · CPC title

• B32B27/285

  comprising polyethers · CPC title