Diagnostic device, semiconductor manufacturing equipment system, semiconductor equipment manufacturing system, and diagnostic method
US-2024321608-A1 · Sep 26, 2024 · US
US10330651B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10330651-B2 |
| Application number | US-201514870208-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 30, 2015 |
| Priority date | Oct 10, 2014 |
| Publication date | Jun 25, 2019 |
| Grant date | Jun 25, 2019 |
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A thermal conductivity detector that causes a fluid to come into contact with the surface of a heated temperature sensing element, that causes the temperature of the temperature sensing element to change according to the thermal conductivity of the fluid, and that detects the fluid based on a change in the electrical resistance of the temperature sensing element at that time or on a change in the value of a current to be applied to the temperature sensing element is provided. The thermal conductivity detector includes a cell space where the temperature sensing element is accommodated and to which a fluid is introduced and from which the fluid is discharged, a buffer space that is connected to a fluid outlet of the cell space, and a discharge channel that is connected to a fluid outlet of the buffer space.
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What is claimed is: 1. A thermal conductivity detector comprising: a cell member provided with a cell space including a fluid inlet and a fluid outlet, wherein the fluid inlet is provided at one end of the cell space and the fluid outlet is provided at another end of the cell space; a temperature sensing element, accommodated inside the cell space, whose electrical resistance is changed according to thermal conductivity of a fluid flowing through the cell space; a detection circuit for detecting a change in the electrical resistance of the temperature sensing element; a buffer space connected to and downstream of the fluid outlet of the cell space and having a cross-sectional area that is greater than a cross-sectional area of the fluid outlet, wherein fluid that has flowed through the cell space flows in the buffer space; and a discharge channel connected to a fluid outlet of the buffer space and having a cross-sectional area that is smaller than the cross-sectional area of the buffer space, wherein the cell space is formed from a sample-side cell space and a reference-side cell space that are separated from each other, each of the sample-side cell space and the reference-side cell space including a fluid inlet and a fluid outlet, wherein the temperature sensing element is formed from a temperature sensing element that is accommodated in the sample-side cell space and a temperature sensing element that is accommodated in the reference-side cell space, and wherein the connection tube is formed from two connection tubes of a sample-side connection tube connecting the sample-side cell space and the buffer space and a reference-side connection tube connecting the reference-side cell space and the buffer space. 2. A thermal conductivity detector comprising: a cell member provided with a cell space including a fluid inlet and a fluid outlet, wherein the fluid inlet is provided at one end of the cell space and the fluid outlet is provided at another end of the cell space; a temperature sensing element, accommodated inside the cell space, whose electrical resistance is changed according to thermal conductivity of a fluid flowing through the cell space; a detection circuit for detecting a change in the electrical resistance of the temperature sensing element; a buffer space connected to and downstream of the fluid outlet of the cell space and having a cross-sectional area that is greater than a cross-sectional area of the fluid outlet, wherein fluid that has flowed through the cell space flows in the buffer space; and a discharge channel connected to a fluid outlet of the buffer space and having a cross-sectional area that is smaller than the cross-sectional area of the buffer space, wherein the cell space is formed from a sample-side cell space and a reference-side cell space that are separated from each other, each of the sample-side cell space and the reference-side cell space including a fluid inlet and a fluid outlet, wherein the temperature sensing element is formed from a temperature sensing element that is accommodated in the sample-side cell space and a temperature sensing element that is accommodated in the reference-side cell space, and wherein the connection tube is formed from a sample-side connection tube connected to the fluid outlet of the sample-side cell space and a reference-side connection tube connected to the fluid outlet of the reference-side cell space, the connection tubes being connected to the buffer space as one connection tube. 3. A gas chromatograph for supplying carrier gas to a column through a sample introduction section, and detecting, by a thermal conductivity detector, a gas component that has been separated by and that has flowed out from the column, wherein the thermal conductivity detector comprises: a cell member provided with a cell space including a fluid inlet and a fluid outlet, wherein the fluid inlet is provided at one end of the cell space and the fluid outlet is provided at another end of the cell space; a temperature sensing element, accommodated inside the cell space, whose electrical resistance is changed according to thermal conductivity of a fluid flowing through the cell space; a detection circuit for detecting a change in the electrical resistance of the temperature sensing element; a buffer space connected to and downstream of the fluid outlet of the cell space and having a cross-sectional area that is greater than a cross-sectional area of the fluid outlet, wherein fluid that has flowed through the cell space flows in the buffer space; and a discharge channel connected to a fluid outlet of the buffer space and having a cross-sectional area that is smaller than the cross-sectional area of the buffer space, wherein the cell space is formed from a sample-side cell space and a reference-side cell space that are separated from each other, each of the sample-side cell space and the reference-side cell space including a fluid inlet and a fluid outlet, wherein the temperature sensing element is formed from a temperature sensing element that is accommodated in the sample-side cell space and a temperature sensing element that is accommodated in the reference-side cell space, and wherein the connection tube is formed from two connection tubes of a sample-side connection tube connecting the sample-side cell space and the buffer space and a reference-side connection tube connecting the reference-side cell space and the buffer space. 4. A gas chromatograph for supplying carrier gas to a column through a sample introduction section, and detecting, by a thermal conductivity detector, a gas component that has been separated by and that has flowed out from the column, wherein the thermal conductivity detector comprises: a cell member provided with a cell space including a fluid inlet and a fluid outlet, wherein the fluid inlet is provided at one end of the cell space and the fluid outlet is provided at another end of the cell space; a temperature sensing element, accommodated inside the cell space, whose electrical resistance is changed according to thermal conductivity of a fluid flowing through the cell space; a detection circuit for detecting a change in the electrical resistance of the temperature sensing element; a buffer space connected to and downstream of the fluid outlet of the cell space and having a cross-sectional area that is greater than a cross-sectional area of the fluid outlet, wherein fluid that has flowed through the cell space flows in the buffer space; and a discharge channel connected to a fluid outlet of the buffer space and having a cross-sectional area that is smaller than the cross-sectional area of the buffer space, wherein the cell space is formed from a sample-side cell space and a reference-side cell space that are separated from each other, each of the sample-side cell space and the reference-side cell space including a fluid inlet and a fluid outlet, wherein the temperature sensing element is formed from a temperature sensing element that is accommodated in the sample-side cell space and a temperature sensing element that is accommodated in the reference-side cell space, and wherein the connection tube is formed from a sample-side connection tube connected to the fluid outlet of the sample-side cell space and a reference-side connection tube connected to the fluid outlet of the reference-side cell space, the connection tubes being connected to the buffer space as one connection tube.
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