Thin film production method and transparent conductive film

Patent metadata

Field	Value
Publication number	US-10328453-B2
Application number	US-201615097956-A
Country	US
Kind code	B2
Filing date	Apr 13, 2016
Priority date	Oct 30, 2013
Publication date	Jun 25, 2019
Grant date	Jun 25, 2019

Abstract

In order to provide a novel method of obtaining a thin film to replace the related art, provided is a method of manufacturing a thin film, including: generating mist of a dispersion liquid containing fine particles; supplying the generated mist of the dispersion liquid onto a substrate; and drying the dispersion liquid supplied onto the substrate.

First claim

What is claimed is:

1. A method of manufacturing a thin film by using a film forming apparatus, comprising:
generating mist of a dispersion liquid containing fine particles in a first chamber of the film forming apparatus;
sending the generated mist of the dispersion liquid to a third chamber via a second chamber of the film forming apparatus by supplying the generated mist of the dispersion liquid into an inlet in a top of the second chamber in a first direction and discharging the generated mist of the dispersion liquid from an outlet in the top of the second chamber in a second direction opposite to the first direction;
supplying the generated mist of the dispersion liquid onto a substrate in the third chamber; and
drying the dispersion liquid supplied onto the substrate.

2. A method of manufacturing a thin film according to claim 1 , wherein the fine particles contained in the generated mist of the dispersion liquid each have a particle size of 100 nm or less.

3. A method of manufacturing a thin film according to claim 1 , wherein the substrate comprises a resin and has flexibility.

4. A method of manufacturing a thin film according to claim 1 , wherein the drying the dispersion liquid is performed at a temperature that is lower than a softening point of the substrate.

5. A method of manufacturing a thin film according to claim 1 , wherein the drying the dispersion liquid is performed at a temperature in a range of from 10° C. to 40° C.

6. A method of manufacturing a thin film according to claim 1 , further comprising:
forming, on the substrate, a hydrophilic/water-repellent pattern comprising a hydrophilic portion and a water-repellent portion,
wherein the supplying the generated mist is performed to the substrate having the hydrophilic/water-repellent pattern formed thereon in the forming a hydrophilic/water-repellent pattern.

7. A method of manufacturing a thin film according to claim 1 , further comprising, after the drying the dispersion liquid, radiating an ultraviolet ray to the substrate,
wherein the supplying the generated mist is performed again to the substrate to which the ultraviolet ray is radiated in the radiating an ultraviolet ray.

8. A method of manufacturing a thin film according to claim 7 , wherein, in the supplying the generated mist onto the substrate, the fine particles contained in the mist that is supplied before the radiating an ultraviolet ray and the fine particles contained in the mist that is supplied after the radiating an ultraviolet ray are different.

9. A method of manufacturing a thin film according to claim 7 , wherein the ultraviolet ray radiated in the radiating an ultraviolet ray at least has a wavelength of 200 nm or less.

10. A method of manufacturing a thin film according to claim 1 , wherein, in the supplying the generated mist onto the substrate, the substrate is tilted from a horizontal plane.

11. A method of manufacturing a thin film according to claim 1 , wherein, in the supplying the generated mist onto the substrate, the substrate is tilted from a plane orthogonal to a direction of the supply.

12. A method of manufacturing a thin film according to claim 1 , wherein the fine particles comprise metal oxide fine particles comprising any one of indium, zinc, tin, and titanium.

Assignees

• Nikon Corp

Inventors

• Nishi Yasutaka
• Nakazumi Makoto

Classifications

• C23C24/00

  Coating starting from inorganic powder (spraying of the coating material in molten state C23C4/00; solid state diffusion C23C8/00 - C23C12/00) · CPC title

• G06F2203/04103

  Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices · CPC title

• B05D3/065

  After-treatment · CPC title

• B05D1/60

  Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00) · CPC title

• G06F3/041

  Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means · CPC title