Method for purging a substrate container
US-9305817-B2 · Apr 5, 2016 · US
Purge device and purge method
US10325794B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10325794-B2 |
| Application number | US-201515117215-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 9, 2015 |
| Priority date | Apr 28, 2014 |
| Publication date | Jun 18, 2019 |
| Grant date | Jun 18, 2019 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A purge device includes a supply flow rate adjuster, which adjusts a supply flow rate of a purge gas supplied to a storage container through a supply pipe, and an intake flow rate adjuster, which adjusts an intake flow rate of the purge gas taken in from an inside of the storage container through a discharge pipe to prevent the pressure of the inside of the storage container from becoming negative relative to an outside of the storage container. The supply flow rate adjuster adjusts the supply flow rate in at least two stages including a first flow rate and a second flow rate that is higher than the first flow rate. When the supply flow rate is the first flow rate, the intake flow rate adjuster sets the intake flow rate to zero.
First claim
Opening claim text (preview).
The invention claimed is: 1. A purge method of performing a purge process where an inside of a storage container, in which an article is accommodated, is purged with a purge gas, the purge method comprising the steps of: adjusting a supply flow rate of the purge gas supplied to the storage container; and adjusting an intake flow rate of the purge gas taken in from the inside of the storage container to prevent a pressure of the inside of the storage container from becoming negative relative to an outside of the storage container; wherein in the step of adjusting the supply flow rate, the supply flow rate is adjusted in at least two stages including a first flow rate and a second flow rate that is higher than the first flow rate; and in the step of adjusting the intake flow rate, the intake flow rate is adjusted to zero in response to the supply flow rate being the first flow rate. 2. A purge device that performs a purge process in which an inside of a storage container, where an article is accommodated, is purged with a purge gas, the purge device comprising: a supply pipe that supplies the purge gas into the storage container by being connected to the storage container; a supply flow rate adjuster that adjusts a supply flow rate of the purge gas supplied to the storage container through the supply pipe; a discharge pipe that discharges the purge gas in the inside of the storage container by being connected to the storage container; and an intake flow rate adjuster that adjusts an intake flow rate of the purge gas taken in from the inside of the storage container through the discharge pipe; wherein the supply flow rate adjuster is able to adjust the supply flow rate in at least two stages including a first flow rate and a second flow rate that is higher than the first flow rate; and the intake flow rate adjuster sets the intake flow rate to zero in response to the supply flow rate being the first flow rate. 3. The purge device according to claim 2 , wherein the intake flow rate adjuster includes: a valve that is provided in the discharge pipe; and an intake flow rate controller that controls opening and closing the valve; wherein the intake flow rate controller performs control to close the valve in response to the supply flow rate being the first flow rate and open the valve in response to the supply flow rate being the second flow rate. 4. The purge device according to claim 2 , further comprising a discharge device that includes an exhaust fan and discharges the purge gas leaked from a section other than an outlet, which the discharge pipe is connected to in the storage container, to the outside of the storage container.
Assignees
Inventors
Classifications
Storage means · CPC title
characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title
- H10P72/1914Primary
characterised by locking systems · CPC title
- H10P72/1924Primary
characterised by atmosphere control · CPC title
- H01L21/67389Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US10325794B2 cover?
- A purge device includes a supply flow rate adjuster, which adjusts a supply flow rate of a purge gas supplied to a storage container through a supply pipe, and an intake flow rate adjuster, which adjusts an intake flow rate of the purge gas taken in from an inside of the storage container through a discharge pipe to prevent the pressure of the inside of the storage container from becoming negat…
- Who is the assignee on this patent?
- Murata Machinery Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/1914. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jun 18 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).