Performance extraction set

Patent metadata

Field	Value
Publication number	US-10325752-B1
Application number	US-201815937181-A
Country	US
Kind code	B1
Filing date	Mar 27, 2018
Priority date	Mar 27, 2018
Publication date	Jun 18, 2019
Grant date	Jun 18, 2019

Abstract

An extraction set including an extraction plate, a blocker and the holding mechanism for the blocker is disclosed. The extraction set includes an extraction plate that may be constructed of titanium coated with a ceramic material. The extraction plate is attached to the ion source using pins. The extraction plate also includes raised outline in its inner surface which is used to secure the blocker to the inner surface of the extraction plate. The ends of the blocker are secured by two holders disposed on opposite sides of the extraction aperture. The mechanism used for attaching the extraction plate to the ion source also improves the temperature uniformity of the extraction plate.

First claim

What is claimed is:

1. An extraction plate for use with a workpiece processing system, comprising:
a plate, having a front surface and a rear surface adapted to be attached to an ion source chamber, the plate having an extraction aperture having a width and a height;
a blocker disposed proximate the extraction plate, having two ends, wherein the two ends are held in place at a respective attachment point disposed on either side of the extraction aperture in a width direction on the rear surface; and
a blocker holder affixed to the rear surface of the plate and covering the two ends of the blocker.

2. The extraction plate of claim 1 , wherein each attachment point comprises two guide rails extending away from the rear surface and extending in the width direction, the two guide rails each having a hole passing therethrough, and wherein each hole in the two guide rails is aligned with a corresponding hole in a respective side of the blocker holder, wherein a pin passes through the hole in the blocker holder and the respective hole in the two guide rails to hold the blocker holder in place.

3. The extraction plate of claim 1 , wherein each of the two ends of the blocker terminates in two prongs having an opening therebetween, and wherein a projection is disposed proximate the attachment point, such that the projection fills the opening in a respective end of the blocker and serves to align the blocker to the plate.

4. The extraction plate of claim 1 , wherein each of the two ends of the blocker have an enclosed aperture, and wherein a projection is disposed proximate the attachment point, such that the projection fills the enclosed aperture in a respective end of the blocker and serves to align the blocker to the plate.

5. The extraction plate of claim 1 , further comprising a compressive device disposed between the blocker holder and the blocker to push the blocker toward the plate.

6. An extraction set for attachment to an ion source chamber, comprising:
an extraction plate with an extraction aperture, having a front surface facing away from the ion source chamber, comprising two sidewalls extending away from the front surface, the two sidewalls each having a hole;
a mounting frame having raised sidewalls, the raised sidewalls each having a hole; and
a plurality of pins, each pin passing through the hole in a respective sidewall and a respective hole in the mounting frame to affix the extraction plate to the mounting frame.

7. The extraction set of claim 6 , further comprising an O-ring disposed between the mounting frame and the extraction plate to create thermal isolation between the mounting frame and the extraction plate.

8. The extraction set of claim 7 , wherein the O-ring pushes the extraction plate away from the mounting frame which holds the plurality of pins in place.

9. The extraction set of claim 6 , wherein the raised sidewalls of the extraction plate each comprise an alignment tab, and the raised sidewalls of the mounting frame each comprise an alignment feature, wherein the alignment tab is used to align the extraction plate to the mounting frame.

10. The extraction set of claim 6 , further comprising:
a blocker disposed proximate the extraction plate, having two ends, wherein the two ends are held in place by attachment points disposed on either side of the extraction aperture in a width direction on a rear surface; and
a blocker holder affixed to the rear surface of the extraction plate and covering the two ends of the blocker.

11. The extraction set of claim 10 , wherein each attachment point comprises two guide rails extending away from the rear surface and extending in the width direction, the two guide rails each having a hole passing therethrough, and wherein each hole in the two guide rails aligns with a corresponding hole in a respective side of the blocker holder, wherein a pin passes through the hole in the blocker holder and the respective hole in the two guide rails to hold the blocker holder in place.

12. The extraction set of claim 10 , further comprising a compressive device disposed between the blocker holder and the blocker to push the blocker toward the extraction plate.

13. A workpiece processing system, comprising:
an ion source chamber, comprising a plurality of chamber walls and an extraction plate with an extraction aperture;
wherein the extraction plate has a front surface facing away from the ion source chamber and a rear surface disposed in the ion source chamber, and wherein the front surface is devoid of any attachment components.

14. The workpiece processing system of claim 13 , wherein the extraction plate comprises two sidewalls extending away from the front surface, the two sidewalls each having a hole.

15. The workpiece processing system of claim 14 , further comprising a mating component having raised sidewalls, the raised sidewalls each having a hole, and a plurality of pins, each pin passing through the hole in one of the two sidewalls and a respective hole in the raised sidewalls.

16. The workpiece processing system of claim 15 , wherein an ion source housing surrounds at least a portion of the ion source chamber, and wherein a mounting frame is attached to the ion source housing and the mounting frame is the mating component.

17. The workpiece processing system of claim 15 , wherein an ion source housing surrounds at least a portion of the ion source chamber, wherein the ion source housing is the mating component.

18. The workpiece processing system of claim 15 , further comprising an O-ring disposed between the mating component and the extraction plate to create thermal isolation between the mating component and the extraction plate.

19. The workpiece processing system of claim 18 , wherein the O-ring pushes the extraction plate away from the mating component which holds the plurality of pins in place.

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Calkins Adam Moritz
• Allen Jr Ernest E

Classifications

• H10P32/1204

  from a plasma phase · CPC title

• H01J2237/083

  Beam forming · CPC title

• H01J2237/024

  Moving components not otherwise provided for · CPC title

• H01J37/08 Primary

  Ion sources; Ion guns · CPC title

• H01J2237/065

  Source emittance characteristics · CPC title