System and method for generating mask pattern and exposure system

Patent metadata

Field	Value
Publication number	US-10324371-B2
Application number	US-201615501497-A
Country	US
Kind code	B2
Filing date	May 6, 2016
Priority date	Mar 18, 2016
Publication date	Jun 18, 2019
Grant date	Jun 18, 2019

Abstract

The present disclosure provides a system for generating a mask pattern, a method for generating a mask pattern, and an exposure system. According to an embodiment of the present disclosure, the system for generating a mask pattern comprises: a mask pattern provision device configured to provide a mask pattern signal via a wired or wireless network; a mask pattern transmission device configured to process the mask pattern signal provided by the mask pattern provision device to generate mask pattern information, and to transmit the generated mask pattern information over a Radio Frequency Identification (RFID) signal; and a mask pattern generation device configured to generate a mask pattern corresponding to the mask pattern information based on the mask pattern information and display the generated mask pattern. The embodiments of the present disclosure allow interaction between the mask pattern provision device and the mask pattern generation device by utilizing IoT technique, such that the mask pattern generation device can display various different mask patterns on an e-ink screen, thereby providing a fast, convenient and low cost exposure scheme.

First claim

What is claimed is:

1. A system for generating a mask pattern, comprising:
a mask pattern provision device configured to provide a mask pattern signal via a wired or wireless network;
a mask pattern transmission device configured to process the mask pattern signal provided by the mask pattern provision device to generate mask pattern information, and to transmit the generated mask pattern information over a Radio Frequency Identification (RFID) signal; and
a mask pattern generation device configured to generate a mask pattern corresponding to the mask pattern information based on the mask pattern information and display the generated mask pattern;
wherein the mask pattern transmission device comprises:
an RFID controller configured to transmit the RFID signal to the mask pattern generation device, so as to supply power and transmit the mask pattern information to the mask pattern generation device,
wherein the RFID signal comprises the mask pattern information and an electrical energy signal for supplying power to the mask pattern generation device.

2. The system of claim 1 , wherein the mask pattern provision device is a local Personal Computer (PC) or a mobile device.

3. The system of claim 1 , wherein the wired network is at least one of Internet, a Local Area Network (LAN), a Wide Area Network (WAN) and a telecommunication network.

4. The system of claim 1 , wherein the wireless network is at least one of 3G network, 4G network, Long Term Evolution (LTE) network, Wi-Fi network, Bluetooth network and Near Field Communication (NFC) network.

5. The system of claim 1 , wherein the mask pattern transmission device further comprises:
a cloud and/or gateway configured to process the mask pattern signal provided by the mask pattern provision device.

6. The system of claim 1 , wherein the mask pattern generation device comprises:
a Radio Frequency (RF) module configured to read the RFID signal transmitted from the RFID controller;
an energy storage module configured to store the electrical energy signal in the RFID signal;
an information processing module configured to parse the mask pattern information in the RFID signal into a mask pattern data;
a storage module configured to store and update a mask pattern corresponding to the mask pattern data; and
a display module configured to display the mask pattern updated by the storage module.

7. The system of claim 6 , wherein the mask pattern data is a binary, octal or hexadecimal value.

8. The system of claim 6 , wherein the energy storage module stores electrical energy required for updating the mask pattern displayed by the display module.

9. The system of claim 6 , wherein the energy storage module is further configured to supply power to the information processing module, the storage module and the display module with the electrical energy signal.

10. The system of claim 6 , wherein the display module is an e-ink screen.

11. A method for generating a mask pattern, comprising:
providing, by a mask pattern provision device, a mask pattern signal via a wired or wireless network;
processing, by a mask pattern transmission device, the mask pattern signal provided by the mask pattern provision device to generate mask pattern information;
transmitting, by the mask pattern transmission device, the generated mask pattern information over a Radio Frequency Identification (RFID) signal to the mask pattern generation device; and
generating, by a mask pattern generation device, a mask pattern corresponding to the mask pattern information based on the mask pattern information and displaying the generated mask pattern;
wherein the RFID signal comprises the mask pattern information and an electrical energy signal for supplying power to the mask pattern generation device.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Li Tailiang
• Sun Junmin
• Ding Hongli
• Guan Hongtao

Classifications

• G03F7/2051

  Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source (G03F7/70 takes precedence) · CPC title

• G03F1/76 Primary

  Patterning of masks by imaging · CPC title

• G03F7/70541

  Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers · CPC title

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F7/70525

  Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure · CPC title