Opening angle measurement of an oscillating MEMS mirror

Patent metadata

Field	Value
Publication number	US-10324283-B2
Application number	US-201715723529-A
Country	US
Kind code	B2
Filing date	Oct 3, 2017
Priority date	Jun 24, 2016
Publication date	Jun 18, 2019
Grant date	Jun 18, 2019

Abstract

A device disclosed herein includes a feedback measuring circuit to measure a signal flowing through a movable MEMS mirror. Processing circuitry determines a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance. The processing circuitry also determines, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance. The processor further determines the capacitance at the given time as a function of the total change in capacitance, and determines an opening angle of the movable MEMS mirror as a function of the capacitance at the given time.

First claim

The invention claimed is:

1. A method of determining an opening angle of a movable MEMS mirror, the method comprising:
determining a total change in capacitance of the movable MEMS mirror from a time at which the capacitance of the movable MEMS mirror is at a maximum to a given time; and
calculating the opening angle of the movable MEMS mirror at the given time based upon the total change in capacitance.

2. The method of claim 1 , further comprising controlling the opening angle of the movable MEMS mirror by adjusting a drive signal for the movable MEMS mirror as a function of the calculated opening angle.

3. The method of claim 1 , further comprising determining the capacitance of the movable MEMS mirror based upon a mirror sense signal; wherein the total change in capacitance of the movable MEMS mirror is determined as a function of a difference between a value of the mirror sense signal at the given time and a value of the mirror sense signal at the time at which the capacitance of the movable MEMS mirror is at the maximum capacitance, and a difference between the given time and the time at which the capacitance of the movable MEMS mirror is at the maximum capacitance.

4. The method of claim 1 , wherein calculating the capacitance of the movable MEMS mirror from the total change in capacitance includes calculating the capacitance of the movable MEMS mirror at the given time based upon the total change in capacitance, and calculating the opening angle of the movable MEMS mirror at the given time based upon the capacitance of the movable MEMS mirror at the given time.

5. The method of claim 1 , wherein determining the total change in capacitance of the movable MEMS mirror is performed by integrating a mirror sense signal from the time at which the capacitance of the movable MEMS mirror is at the maximum to the given time.

6. A picoprojector, comprising:
a housing;
a laser generator within the housing;
a movable MEMS mirror within the housing and upon which a laser generated by the laser generator impinges;
mirror drive circuitry configured to generate a drive signal for the movable MEMS mirror;
a feedback circuit configured to measure a mirror sense signal flowing through the movable MEMS mirror; and
processing circuitry configured, based upon the mirror sense signal, to:
determine an opening angle of the movable MEMS mirror at a given time, as a function of a total change in capacitance of the movable MEMS mirror from a time at which the capacitance of the movable MEMS mirror is at a maximum to the given time, and as a function of the capacitance at the given time; and
generate a control signal to cause the mirror drive circuitry to adjust the drive signal as a function of the determined opening angle of the movable MEMS mirror.

7. The picoprojector of claim 6 , wherein the mirror drive circuitry changes the drive signal by changing a voltage thereof.

8. The picoprojector of claim 6 , wherein the feedback circuit comprises an amplifier configured to amplify the mirror sense signal.

9. The picoprojector of claim 8 , wherein the processing circuitry comprises:
a hardware integrator configured to integrate the amplified mirror sense signal from the time at which the capacitance of the movable MEMS mirror is at the maximum to the given time.

10. The picoprojector of claim 9 , wherein the processing circuitry further comprises an analog to digital converter configured to digitize the integrated amplified mirror sense signal.

11. The picoprojector of claim 10 , wherein the processing circuitry further comprises a microprocessor configured to determine the total change in capacitance of the movable MEMS mirror by integrating the amplified mirror sense signal from the time at which the capacitance of the movable MEMS mirror is at the maximum to the given time.

12. The picoprojector of claim 6 , wherein the processing circuitry determines the total change in capacitance of the movable MEMS mirror, without integration, as a function of the mirror sense signal at the given time, the mirror sense signal at the time at which the capacitance of the movable MEMS mirror is at the maximum capacitance, the given time, and the time at which the capacitance of the movable MEMS mirror is at the maximum capacitance.

13. The picoprojector of claim 6 , wherein the processing circuitry determines the total change in capacitance of the movable MEMS mirror compared as a function of a difference between a value of the mirror sense signal at the given time and a value of the mirror sense signal at the time at which the capacitance of the movable MEMS mirror is at the maximum capacitance, multiplied by a difference between the given time and the time at which the capacitance of the movable MEMS mirror is at the maximum capacitance.

14. A picoprojector, comprising:
a housing;
a laser generator within the housing;
a movable MEMS mirror within the housing and upon which a laser generated by the laser generator impinges;
mirror drive circuitry for the movable MEMS mirror;
an amplifier configured to amplify a mirror sense signal flowing through the movable MEMS mirror;
an analog to digital converter configured to receive the amplified version of the mirror sense signal and to generate a digitized version of the mirror sense signal; and
a microprocessor configured to:
determine an opening angle of the movable MEMS mirror as a function of the digitized mirror sense signal at a given time, the digitized mirror sense signal at a time at which capacitance of the movable MEMS mirror is at the maximum capacitance, the given time, and the time at which the capacitance of the movable MEMS mirror is at the maximum capacitance; and
generate a control signal for the mirror drive circuitry as a function of the opening angle of the movable MEMS mirror.

15. The picoprojector of claim 14 , wherein the control signal generated by the microprocessor causes the mirror drive circuitry to change a generated mirror drive signal for the movable MEMS mirror so that the capacitance of the movable MEMS mirror at the given time equals a capacitance value associated with the opening angle; and
wherein the generated mirror drive signal is such to cause the movable MEMS mirror to oscillate at its resonance frequency.

Assignees

• St Microelectronics Ltd

Inventors

• Duvdevany Offir

Classifications

• G01D5/243

  influencing the phase or frequency of AC · CPC title

• G02B26/0841

  the reflecting element being moved or deformed by electrostatic means · CPC title

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• G01D5/24 Primary

  by varying capacitance · CPC title

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title