Opening angle measurement of an oscillating MEMS mirror

Patent metadata

Field	Value
Publication number	US-9810902-B1
Application number	US-201615192718-A
Country	US
Kind code	B1
Filing date	Jun 24, 2016
Priority date	Jun 24, 2016
Publication date	Nov 7, 2017
Grant date	Nov 7, 2017

Abstract

A device disclosed herein includes a feedback measuring circuit to measure a signal flowing through a movable MEMS mirror. Processing circuitry determines a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance. The processing circuitry also determines, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance. The processor further determines the capacitance at the given time as a function of the total change in capacitance, and determines an opening angle of the movable MEMS mirror as a function of the capacitance at the given time.

First claim

The invention claimed is:

1. A device, comprising:
a feedback measuring circuit configured to measure a signal flowing through a movable MEMS mirror;
processing circuitry configured to:
determine a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance;
determine, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance;
determine the capacitance at the given time as a function of the total change in capacitance;
determine an opening angle of the movable MEMS mirror as a function of the capacitance at the given time.

2. The device of claim 1 , wherein the device further comprises the movable MEMS mirror, and a driver configured to drive the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates at its resonance frequency.

3. The device of claim 1 , wherein the feedback measuring circuit comprises an amplifier configured to receive the signal and to output an amplified version of the signal.

4. The device of claim 3 , wherein the processing circuitry further comprises an analog to digital converter configured to receive the amplified version of the signal and to generate a digitized version of the signal.

5. The device of claim 3 , wherein the processing circuitry further comprises:
a hardware integrator configured to determine the total change in capacitance of the movable MEMS mirror compared to the maximum capacitance by integrating the amplified version of the signal over the window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to the given time; and
an analog to digital converter configured to receive the integrated and amplified version of the signal and to generate a digitized signal based thereupon.

6. The device of claim 5 , wherein the processing circuitry further comprises a microprocessor configured to determine the capacitance at the given time and determine the opening angle of the movable MEMS mirror.

7. The device of claim 5 , wherein the processing circuitry is configured to normalize the amplified version of the signal; and wherein the hardware integrator integrated the normalized amplified version of the signal.

8. The device of claim 1 , wherein the processing circuitry determines the total change in capacitance of the movable MEMS mirror compared to the maximum capacitance without integration and as a function of the signal at the given time, the signal at the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum capacitance, the given time, and the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum capacitance.

9. The device of claim 8 , wherein the processing circuitry determines the total change in capacitance of the movable MEMS mirror compared to the maximum capacitance without integration and as a function of a difference between a value of the signal at the given time and a value of the signal at the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum capacitance, multiplied by a difference between the given time and the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum capacitance.

10. The device of claim 1 , wherein the processing circuitry is further configured to control the opening angle of the movable MEMS mirror as a function of the capacitance at the given time.

11. The device of claim 10 , wherein the processing circuitry controls the opening angle of the movable MEMS mirror by causing the driver to change the periodic signal so that the capacitance at the given time equals a value associated with a desired opening angle.

12. The device of claim 11 , wherein the driver changes the periodic signal by changing a voltage of the periodic signal.

13. The device of claim 11 , further comprising a projector housing carrying the movable MEMS mirror, driver, feedback measuring circuit, and processing circuitry.

14. A method of controlling an opening angle of a movable MEMS mirror, comprising:
driving the movable MEMS mirror with a periodic signal such that the MEMS mirror oscillates;
measuring a signal flowing through the movable MEMS mirror as it oscillates;
determining a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance;
determining, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance;
determining the capacitance at the given time as a function of the total change in capacitance;
determining an opening angle of the movable MEMS mirror as a function of the capacitance at the given time;
changing the opening angle of the movable MEMS mirror based upon the opening angle not being equal to a desired opening angle.

15. The method of claim 14 , further comprising amplifying the signal; and wherein the total change in capacitance of the movable MEMS mirror compared to the maximum capacitance is determined by integrating the amplified version of the signal over the window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to the given time.

16. The method of claim 15 , wherein the amplified version of the signal is normalized prior to the integration.

17. The method of claim 14 , wherein the total change in capacitance of the movable MEMS mirror compared to the maximum capacitance without integration is determined as a function of the signal at the given time, the signal at the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum capacitance, the given time, and the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum capacitance.

18. The method of claim 17 , wherein the total change in capacitance of the movable MEMS mirror compared to the maximum capacitance is determined without integration and as a function of a difference between a value of the signal at the given time and a value of the signal at the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum capacitance, multiplied by a difference between the given time and the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum capacitance.

19. A method, comprising:
measuring a signal flowing through a movable MEMS mirror as it oscillates;
determining a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance;
determining, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance; and
determining the capacitance at the given time as

Assignees

• St Microelectronics Ltd

Inventors

• Duvdevany Offir

Classifications

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• G01D5/243

  influencing the phase or frequency of AC · CPC title

• G02B26/0841

  the reflecting element being moved or deformed by electrostatic means · CPC title

• G01D5/24 Primary

  by varying capacitance · CPC title

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title