Optical detector device with patterned graphene layer and related methods

Patent metadata

Field	Value
Publication number	US-10312389-B2
Application number	US-201715782948-A
Country	US
Kind code	B2
Filing date	Oct 13, 2017
Priority date	Oct 13, 2016
Publication date	Jun 4, 2019
Grant date	Jun 4, 2019

Abstract

An optical detector device may include a substrate, a reflector layer carried by the substrate, and a first dielectric layer over the reflector layer. The optical detector device may include a graphene layer over the first dielectric layer and having a perforated pattern.

First claim

That which is claimed is:

1. An optical detector device comprising:
a substrate;
a reflector layer carried by said substrate;
a first dielectric layer over said reflector layer;
a graphene layer over said first dielectric layer and having a perforated pattern therein;
the perforated pattern comprising an array of openings, the array of openings comprising a plurality of rows and a plurality of columns; and
a second dielectric layer over said graphene layer and covering said array of openings.

2. The optical detector device of claim 1 wherein the array of openings comprises a square array of openings.

3. The optical detector device of claim 2 wherein each of the openings is circle-shaped.

4. The optical detector device of claim 1 wherein the perforated pattern is symmetrical.

5. The optical detector device of claim 1 wherein said first dielectric layer comprises a polymer material.

6. The optical detector device of claim 1 wherein said graphene layer comprises a monolayer of graphene.

7. The optical detector device of claim 1 further comprising:
a first electrically conductive contact coupled to said second dielectric layer; and
a second electrically conductive contact coupled to said graphene layer.

8. The optical detector device of claim 1 wherein said reflector layer comprises gold material.

9. The optical detector device of claim 1 wherein said reflector layer has a thickness greater than a threshold thickness for optical opacity.

10. An optical detector device comprising:
a substrate;
a gold reflector layer carried by said substrate;
a first dielectric layer over said gold reflector layer;
a graphene layer over said first dielectric layer and having a perforated pattern defining a square array of openings;
the perforated pattern comprising an array of openings, the array of openings comprising a plurality of rows and a plurality of columns;
a second dielectric layer over said graphene layer and covering said array of openings;
a first electrically conductive contact coupled to said second dielectric layer; and
a second electrically conductive contact coupled to said graphene layer.

11. The optical detector device of claim 10 wherein each of the openings is circle-shaped.

12. The optical detector device of claim 10 wherein the perforated pattern is symmetrical.

13. The optical detector device of claim 10 wherein said first dielectric layer comprises a polymer material.

14. The optical detector device of claim 10 wherein said graphene layer comprises a monolayer of graphene.

15. The optical detector device of claim 10 wherein said gold reflector layer has a thickness greater than a threshold thickness for optical opacity.

16. An optical detector device comprising:
a substrate;
a reflector layer carried by said substrate;
a first dielectric layer over said reflector layer;
a graphene layer over said first dielectric layer and having a perforated pattern therein;
the perforated pattern comprising an array of openings; and
a second dielectric layer over said graphene layer and covering said array of openings.

17. The optical detector device of claim 16 wherein the array of openings comprises a square array of openings.

18. The optical detector device of claim 17 wherein each of the openings is circle-shaped.

19. The optical detector device of claim 16 wherein the perforated pattern is symmetrical.

20. The optical detector device of claim 1 wherein said second dielectric layer comprises an ion-gel dielectric layer.

Assignees

• Univ Central Florida Res Found Inc

Inventors

• Chanda Debashis
• Safaei Alireza
• Leuenberger Michael

Classifications

• G01N2021/7773

  Reflection · CPC title

• H01L31/0232

  Electricity · mapped topic

• H01L31/0328

  Electricity · mapped topic

• H01L31/101

  Electricity · mapped topic

• G01N21/553

  and using surface plasmons (fluorescence excitation G01N21/648; enhanced Raman G01N21/658) · CPC title