Compliant robot blade for defect reduction

Patent metadata

Field	Value
Publication number	US-10312127-B2
Application number	US-201414487904-A
Country	US
Kind code	B2
Filing date	Sep 16, 2014
Priority date	Sep 16, 2013
Publication date	Jun 4, 2019
Grant date	Jun 4, 2019

Abstract

Embodiments of substrate transfer robot blades to engage and support a substrate during transfer are provided herein. In some embodiments, a substrate transfer robot may include a blade body having a blade support surface; and a plurality of compliant pads, each comprising a contact surface and an opposite bottom surface supported by the body and arranged to support a substrate when disposed on the substrate transfer robot blade.

First claim

The invention claimed is:

1. A substrate transfer robot blade, comprising:
a blade body having a blade support surface and a passage formed in the blade support surface, wherein the passage has a bottom wall above a bottom surface of the blade body;
at least three compliant pads each larger in size than the passage in the blade support surface, each pad comprising a curved substrate contact surface and a pad bottom surface and arranged to support a substrate when disposed on the substrate transfer robot blade, wherein at least one of the at least three compliant pads has a projection from a pad bottom surface and at least a portion of the projection is disposed within the passage; and
a resilient element disposed at least partially within the passage and configured to engage a wall of the passage and a surface of the projection of the at least one of the at least three compliant pads to enable displacement of the at least one of the at least three compliant pads in a direction generally parallel to a passage axis.

2. The substrate transfer robot blade of claim 1 , wherein at least one of the at least three compliant pads is formed of a polymer material.

3. The substrate transfer robot blade of claim 1 , wherein at least one of the at least three compliant pads further comprises:
a base configured for support on the blade support surface; and
a resilient cantilevered arm fixed at a first end to a portion of the base and having a second end resiliently deformed from a plane of the base in a direction away from the base, wherein the second end comprises a contact surface.

4. The substrate transfer robot blade of claim 1 , wherein the resilient element is a compression spring.

5. The substrate transfer robot blade of claim 4 , wherein the resilient element is a helically wound spring.

6. The substrate transfer robot blade of claim 5 , wherein an axis of the helically wound spring is aligned with an axis of the passage.

7. The substrate transfer robot blade of claim 6 , wherein the portion of the one of the plurality of compliant pads comprises a projection extending from a pad bottom surface, wherein the projection at least partially extends through a center of the helically wound spring.

8. The substrate transfer robot blade of claim 6 , further comprising a displacement attenuator positioned adjacent to the passage.

9. The substrate transfer robot blade of claim 8 , wherein the displacement attenuator comprises one or more magnets.

10. The substrate transfer robot blade of claim 5 , wherein the helically wound spring is canted.

11. The substrate transfer robot blade of claim 1 ,
wherein the blade body includes a plurality of passages beginning at the blade support surface and terminating between the blade support surface and the bottom surface;
wherein the at least three compliant pads comprise a plurality of compliant pads each comprising a curved substrate contact surface and a pad bottom surface proximate to the blade support surface and arranged to support a substrate when disposed on the substrate transfer robot blade; and
wherein the resilient element is configured to engage a portion of at least one of the plurality of compliant pads.

12. The substrate transfer robot blade of claim 11 , wherein the plurality of compliant pads comprise an electrically conductive material.

13. The substrate transfer robot blade of claim 11 , wherein the plurality of compliant pads are formed from ceramic.

Assignees

• Applied Materials Inc

Inventors

• Sansoni Steven V
• Brodine Jeffrey
• Mori Glen

Classifications

• H10P72/3302

  Mechanical parts of transfer devices · CPC title

• H10P72/7602 Primary

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H01L21/67742

  Electricity · mapped topic

• H01L21/68707 Primary

  Electricity · mapped topic