Methods for troubleshooting substrate defects using machine learning
US-2025370426-A1 · Dec 4, 2025 · US
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Mori Glen patents
Mori Glen is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Mori Glen |
| Total patents | 12 |
| First publication | Mar 19, 2015 |
| Latest publication | Dec 4, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Methods for troubleshooting substrate defects using machine learning
US-2025370845-A1 · Dec 4, 2025 · US
Load lock with diagnostic and remediation capabilities
US-2025329559-A1 · Oct 23, 2025 · US
Manifold for material removal system
US-2025214176-A1 · Jul 3, 2025 · US
Compliant robot blade for substrate support and transfer
US-11348823-B2 · May 31, 2022 · US
Substrate support apparatus having reduced substrate particle generation
US-10431489-B2 · Oct 1, 2019 · US
Compliant robot blade for defect reduction
US-2019267275-A1 · Aug 29, 2019 · US
Compliant robot blade for defect reduction
US-10312127-B2 · Jun 4, 2019 · US
Substrate transfer robot end effector
US-9425076-B2 · Aug 23, 2016 · US
Substrate transfer robot end effector
US-2016005638-A1 · Jan 7, 2016 · US
Recent patents
Latest publications not already listed above.
Substrate support apparatus having reduced substrate particle generation
US-2015170954-A1 · Jun 18, 2015 · US
Compliant robot blade for defect reduction
US-2015078874-A1 · Mar 19, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/7602 | 8 |
| H10P72/3302 | 6 |
| H01L21/68707 | 5 |
| H01L21/67742 | 3 |
| G05B19/41875 | 2 |