Heat dissipation component for semiconductor element
US-2017268834-A1 · Sep 21, 2017 · US
US10302375B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10302375-B2 |
| Application number | US-201515305262-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 23, 2015 |
| Priority date | Apr 25, 2014 |
| Publication date | May 28, 2019 |
| Grant date | May 28, 2019 |
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An aluminum-diamond composite that exhibits both high thermal conductivity and a coefficient of thermal expansion close to that of semiconductor devices, and that can suppress the occurrence of swelling, etc., of a surface metal layer portion even in actual use under a high load. An aluminum-diamond composite includes 65-80 vol % of a diamond powder having a roundness of at least 0.94, for which a first peak in a volumetric distribution of grain size lies at 5-25 μm, and a second peak lies at 55-195 μm, and a ratio between the area of the volumetric distribution of grain sizes of 1-35 μm and the area of the volumetric distribution of grain sizes of 45-205 μm is from 1:9 to 4:6; the balance being composed of a metal containing aluminum.
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The invention claimed is: 1. An aluminum-diamond composite comprising: 65-80 vol % of a diamond powder having a roundness of at least 0.94 and a roughened surface, for which a first peak in a volumetric distribution of grain size lies at 5-25 μm, and a second peak lies at 55-195 μm, and a ratio between the area of a volumetric distribution of grain sizes of 1-35 μm and the area of a volumetric distribution of grain sizes of 45-205 μm is from 1:9 to 4:6; the balance being composed of a metal containing aluminum. 2. The aluminum-diamond composite in accordance with claim 1 , wherein the diamond powder is one that has been heat-treated, in an air atmosphere, at a temperature of at least 600° C. and at most 900° C., for at least 30 minutes and at most 180 minutes. 3. A heat-dissipating component comprising the aluminum-diamond composite in accordance with claim 1 , formed in the shape of a flat plate, wherein both surfaces of the aluminum-diamond composite are covered with a surface layer comprising at least 80 vol % of a metal containing aluminum and having a film thickness of 0.03-0.2 mm. 4. The heat-dissipating component in accordance with claim 3 , wherein both surfaces have, in sequence from the aluminum-diamond composite-side, an Ni layer having a film thickness of 0.5-6.5 μm, an amorphous Ni alloy layer having a film thickness of 0.5-6.5 μm, and a metal layer consisting of an Au layer having a film thickness of at least 0.05 μm, such that the sum of the film thicknesses of the Ni layer and the Ni alloy layer is 1.0-10 μm. 5. The heat-dissipating component in accordance with claim 3 , wherein the thickness of the aluminum-diamond composite is 0.4-6 mm.
Diamond · CPC title
characterised by their materials · CPC title
Alloys containing diamond {or cubic or wurtzitic boron nitride, fullerenes or carbon nanotubes} · CPC title
Next to each other · CPC title
Ni-base component · CPC title
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