Apparatus and methods for integrating magnetoresistive devices

Patent metadata

Field	Value
Publication number	US-10297747-B2
Application number	US-201815958444-A
Country	US
Kind code	B2
Filing date	Apr 20, 2018
Priority date	Apr 21, 2017
Publication date	May 21, 2019
Grant date	May 21, 2019

Abstract

The present disclosure is drawn to, among other things, a method of fabricating an integrated circuit device having a magnetoresistive device. In some aspects, the method includes forming the magnetoresistive device on a first contact of a substrate, wherein the magnetoresistive device includes a fixed magnetic region and a free magnetic region separated by an intermediate region; depositing a first dielectric material over the magnetoresistive device; depositing a second dielectric material over the first dielectric material; polishing a surface of the second dielectric material; forming a first cavity through the polished surface of the second dielectric material to expose a surface of the magnetoresistive device; and depositing an electrically conductive material in the first cavity to form a via.

First claim

What is claimed is:

1. A method of fabricating an integrated circuit device having a magnetoresistive device, comprising:
forming the magnetoresistive device on a first contact of a substrate, wherein the magnetoresistive device includes a fixed magnetic region and a free magnetic region separated by an intermediate region;
depositing a first dielectric material over the magnetoresistive device, wherein the first dielectric material is a low-k or an ultra low-k dielectric material;
depositing a second dielectric material over the first dielectric material, wherein the second dielectric material is a conventional dielectric material;
polishing a surface of the second dielectric material;
forming a first cavity through the polished surface of the second dielectric material to expose a surface of the magnetoresistive device; and
depositing an electrically conductive material in the first cavity to form a via.

2. The method of claim 1 , wherein a dielectric constant of the second dielectric material is higher than a dielectric constant of the first dielectric material.

3. The method of claim 1 , wherein the polishing is halted before the first dielectric material is exposed.

4. The method of claim 1 , wherein the polishing is halted when the first dielectric material is exposed.

5. The method of claim 1 , further comprising:
polishing a portion of the first dielectric material above the magnetoresistive device after polishing the surface of the second dielectric material.

6. The method of claim 1 , further comprising:
depositing a third dielectric material after forming the via;
polishing a surface of the third dielectric material;
forming a second cavity through the polished surface of the third dielectric material to expose a surface of the via; and
depositing a second electrically conductive material in the second cavity.

7. The method of claim 6 , wherein a dielectric constant of the third dielectric material is lower than the dielectric constant of the second dielectric material.

8. The method of claim 6 , wherein the third dielectric material is a low-k or an ultra low-k dielectric material.

9. The method of claim 6 , wherein a dielectric constant of the second dielectric material is higher than a dielectric constant of each of the first dielectric material and the third dielectric material.

10. A method of fabricating an integrated circuit device having a magnetoresistive device, comprising:
forming a magnetoresistive device, wherein the magnetoresistive device includes a plurality of magnetic regions separated by an intermediate region;
depositing a first dielectric material over the magnetoresistive device, wherein the first dielectric material is a low-k or an ultra low-k dielectric material;
polishing a surface of the first dielectric material;
depositing a second dielectric material over the polished surface of the first dielectric material, wherein the second dielectric material is a conventional dielectric material;
forming a first cavity through a surface of the second dielectric material; and
depositing an electrically conductive material in the first cavity.

11. The method of claim 10 , wherein a dielectric constant of the second dielectric material is higher than a dielectric constant of the first dielectric material.

12. The method of claim 10 , wherein the polishing is halted before the magnetoresistive device is exposed.

13. The method of claim 10 , wherein forming the first cavity comprises etching through the second dielectric material and the first dielectric material by adjusting etchant chemistry.

14. The method of claim 10 , further comprising:
depositing a third dielectric material after forming the via;
polishing a surface of the third dielectric material;
forming a second cavity through the polished surface of the third dielectric material to expose a surface of the via; and
depositing an electrically conductive material in the second cavity.

15. The method of claim 14 , wherein a dielectric constant of the third dielectric material is lower than the dielectric constant of the second dielectric material.

16. The method of claim 14 , wherein the third dielectric material is a low-k or an ultra low-k dielectric material.

17. The method of claim 14 , wherein the second dielectric material is a conventional dielectric material.

18. The method of claim 14 , wherein a dielectric constant of the second dielectric material is higher than a dielectric constant of each of the first dielectric material and the third dielectric material.

Assignees

• Everspin Technologies Inc
• Everpsin Tech Inc

Inventors

• Deshpande Sarin A
• Aggarwal Sanjeev
• Hossain Moazzem

Classifications

• H10W20/01

  Manufacture or treatment · CPC title

• H10W20/092 Primary

  by smoothing the dielectric parts · CPC title

• G11C11/161

  details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell · CPC title

• H01L43/02

  Electricity · mapped topic

• H01L43/08

  Electricity · mapped topic