Integrated photonics including germanium

Patent metadata

Field	Value
Publication number	US-10295745-B2
Application number	US-201815864651-A
Country	US
Kind code	B2
Filing date	Jan 8, 2018
Priority date	Jan 5, 2015
Publication date	May 21, 2019
Grant date	May 21, 2019

Abstract

A photonic structure can include in one aspect one or more waveguides formed by patterning of waveguiding material adapted to propagate light energy. Such waveguiding material may include one or more of silicon (single-, poly-, or non-crystalline) and silicon nitride.

First claim

What is claimed is:

1. A photonic structure comprising:
dielectric material formed over silicon;
a trench formed in the dielectric material extending to the silicon;
a germanium formation formed in the trench;
a top doping region formed in an area of the germanium formation so that the top doping region is spaced from the trench by a spacing distance equal to or greater than a threshold distance;
a top contact formed on the top doping region, wherein the top contact is formed of a semiconductor compatible metallization material that is reflective to wavelengths in the range of from about 900 nm to about 1600 nm.

2. The photonic structure of claim 1 , wherein an entire perimeter of the top doping region is spaced from the trench by a spacing distance equal to or greater than a threshold distance.

3. The photonic structure of claim 1 , wherein the threshold distance is in the range of 200 nm to 1000 nm.

4. The photonic structure of claim 1 , wherein the threshold distance is 750 nm.

5. The photonic structure of claim 1 , wherein the top contact formed on the top doping region is formed in an area of the top doping region so that an entire perimeter of the contact is spaced from a perimeter of the top doping region by a spacing distance that is equal to or greater than a threshold distance.

6. The photonic structure of claim 1 , further comprising a top contact formed on the top doping region, a bottom doping region formed in an area of the silicon; and a bottom contact formed on the bottom doping region.

7. The photonic structure of claim 1 , wherein the dielectric material is disposed on a horizontally extending surface of the silicon, the horizontally extending surface of the silicon being at a first elevation, and wherein the germanium formation has a bottom elevation in common with the first elevation.

8. A photonic structure comprising:
silicon having a doping region;
a germanium formation adapted to receive light transmitted by the silicon;
an oppositely doped doping region formed on the germanium formation;
a silicide formation formed on the doping region of the silicon;
a conductive material formation formed on the silicide formation; and
a conductive material formation formed on the germanium formation.

9. The photonic structure of claim 8 , wherein the conductive material formation formed on the germanium formation is a germanide-free (refractory) conductive material formation.

10. The photonic structure of claim 8 , wherein the conductive material formation formed on the germanium formation is a semiconductor compatible metallization material that is reflective to wavelengths in the range of from about 900 nm to about 1600 nm.

11. The photonic structure of claim 8 , wherein the silicide formation formed on the doping region of the silicon is formed of material selected from the group consisting of nickel silicide and nickel platinum silicide.

12. The photonic structure of claim 8 , wherein the doping region is disposed below a bottom elevation of the germanium formation and wherein the oppositely doped doping region is formed at a top elevation of the germanium.

13. The photonic structure of claim 8 , wherein the oppositely doped doping region is spaced from the silicon.

14. The photonic structure of claim 8 , wherein the oppositely doped doping region is spaced from the silicon and spaced from a trench in which the germanium formation is disposed.

15. A photonic structure comprising:
dielectric material formed on silicon;
a trench defined in the dielectric material;
a germanium formation disposed within the trench and formed on the silicon;
a top doping region and a top contact; and
a bottom doping region; and a bottom contact, wherein the dielectric material is disposed on a horizontally extending surface of the silicon, the horizontally extending surface of the silicon being at a first elevation, and wherein the germanium formation has a bottom elevation in common with the first elevation.

16. The photonic structure of claim 15 , wherein the photonic structure includes a silicide interface formed between the bottom doping region and the bottom contact.

17. The photonic structure of claim 15 , wherein the bottom doping region is formed on the silicon.

18. The photonic structure of claim 15 , wherein the bottom doping region is formed at a bottom of the germanium formation.

19. The photonic structure of claim 15 , wherein the top doping region is formed at the top of the germanium formation, wherein the bottom doping region is formed on the silicon, wherein the top contact is in contact with the top doping region, and wherein the photonic structure includes a silicide interface between the bottom doping region and the bottom contact.

20. The photonic structure of claim 15 , wherein the top doping region is formed at a top of the germanium formation, wherein the bottom doping region is formed at a bottom of the germanium formation, wherein the top contact is in contact with the top doping region, and wherein the photonic structure includes a silicide interface between the bottom doping region and the bottom contact.

Assignees

• Univ New York State Res Found

Inventors

• Coolbaugh Douglas
• Adam Thomas
• Leake Gerald L

Classifications

• H10P14/3441

  Conductivity type · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title

• H10P14/3251

  consisting of three or more layers · CPC title

• H10P14/3211

  Silicon, silicon germanium or germanium · CPC title

• H10P14/2905

  Silicon, silicon germanium or germanium · CPC title