Sensor fluid reservoirs for microfabricated sensor cells

Patent metadata

Field	Value
Publication number	US-10295488-B2
Application number	US-201614993073-A
Country	US
Kind code	B2
Filing date	Jan 11, 2016
Priority date	Jan 11, 2016
Publication date	May 21, 2019
Grant date	May 21, 2019

Abstract

A sensor cell has a chamber that defines an internal sensor volume for a sensor fluid in a vapor phase. A signal path extends into the internal sensor volume. The sensor cell includes a condensation reservoir for a condensed phase of the sensor fluid, in fluid communication with the internal sensor volume. The signal path is spatially separate from the condensation reservoir. During operation of the sensor cell, some of the sensor fluid may be converted to a vapor phase in the internal sensor volume. During such operation, sensor fluid in the condensed phase is disposed in the condensation reservoir, advantageously out of the signal path, leaving the signal path desirably free of the condensed phase sensor fluid. During periods of non-operation, a significant portion of the sensor fluid may condense from the vapor phase to the condensed phase in the condensation reservoir, advantageously out of the signal path.

First claim

What is claimed is:

1. A sensor cell, comprising:
a chamber defining an internal sensor volume for storing a vapor phase sensor fluid, the internal sensor volume allowing a signal path to extend therethrough with a direction; and
a condensation reservoir in fluid communication with the internal sensor volume, and the condensation reservoir spatially separated from the signal path and including a plurality of grooves arranged along a perimeter of the chamber, the grooves beginning at a first side of the chamber and ending at an opposite second side of the chamber in the direction of the signal path.

2. The sensor cell of claim 1 , wherein the grooves have a width less than 1 millimeter and a depth less than 5 millimeters.

3. The sensor cell of claim 1 , further comprising:
an interposer of the chamber, the interposer laterally surrounding the internal sensor volume;
a first plate of the chamber, the first plate attached to the interposer; and
a second plate of the chamber, the second plate attached to the interposer,
wherein the plurality of grooves includes grooves in the interposer that intersect with grooves in the first plate.

4. The sensor cell of claim 3 , wherein the condensation reservoir comprises a first plate groove in the first plate open to the internal sensor volume, the first plate groove having a width less than 1 millimeter and a depth less than 5 millimeters.

5. The sensor cell of claim 4 , wherein the first plate groove comprises multiple segments, each segment having a width less than 1 millimeter and a depth less than 5 millimeters.

6. The sensor cell of claim 4 , wherein the first plate groove has a continuous crenelated configuration.

7. The sensor cell of claim 4 , wherein the condensation reservoir comprises a second plate groove in the second plate open to the internal sensor volume, the second plate groove having a width less than 1 millimeter and a depth less than 5 millimeters.

8. The sensor cell of claim 3 , wherein the condensation reservoir comprises a plurality of interposer grooves formed in a surface of the interposer open to the internal sensor volume, the interposer grooves each having a width less than 1 millimeter and a depth less than 5 millimeters.

9. The sensor cell of claim 3 , wherein the plurality of grooves includes a plate groove located between the interposer and the first plate, the plate groove being open to the internal sensor volume, the plate groove having a width less than 1 millimeter and a depth less than 5 millimeters.

10. The sensor cell of claim 3 , wherein the signal path extends through the first plate and through the second plate.

11. The sensor cell of claim 1 , comprising cesium in at least one of the internal sensor volume and the condensation reservoir.

12. A method of forming a sensor cell, comprising:
forming a condensation reservoir including a plurality of grooves arranged along a perimeter of a chamber and located in one or more of a first plate of the sensor cell, a second plate of the sensor cell, and an interposer of the sensor cell in which the grooves begin at a first side of the chamber and end at an opposite second side of the chamber in a direction from the first plate to the second plate, the interposer laterally surrounding an internal sensor volume;
attaching the first plate to the interposer, so that at least a portion of the first plate is exposed to the internal sensor volume; and
attaching the second plate to the interposer, so that at least a portion of the second plate is exposed to the internal sensor volume;
wherein the first and second plates provide an optical signal path through internal sensor volume, the plurality of grooves being outside the signal path.

13. The method of claim 12 , wherein the grooves have a width less than 1 millimeter and a depth less than 5 millimeters.

14. The method of claim 12 , further comprising forming a perimeter groove in the first plate.

15. The method of claim 14 , further comprising forming sidewall grooves in the interposer by a process that includes a plasma etch process removing a portion of the interposer in a direction normal to the first plate.

16. The method of claim 12 , wherein the first plate is contained in a workpiece, the workpiece containing a plurality of first plates, separated by singulation lanes.

17. The method of claim 16 , comprising forming singulation assist grooves in the singulation lanes of the workpiece.

18. The method of claim 12 , wherein the plurality of grooves includes a sidewall groove formed in the interposer.

19. The method of claim 18 , wherein the grooves are formed concurrently with forming the internal sensor volume in the interposer.

20. The method of claim 18 , wherein the interposer is contained in a workpiece, the workpiece containing a plurality of interposers, separated by singulation lanes.

21. The method of claim 12 , wherein forming the condensation reservoir comprises forming a recess in the first plate where the first plate is attached to the interposer, so that the recess provides a perimeter groove open to the internal sensor volume, the perimeter groove being located between the first plate and the interposer.

22. The method of claim 12 , wherein forming the condensation reservoir comprises forming a recess in the interposer where the first plate is attached to the interposer, so that the recess provides a groove open to the internal sensor volume, the groove being located between the first plate and the interposer.

23. The method of claim 12 , further comprising placing alkali metal in the internal sensor volume before attaching the second plate to the interposer.

24. A sensor system, comprising:
a signal detector; and
a sensor cell, comprising:
a chamber defining an internal sensor volume for storing a vapor phase sensor fluid, the internal sensor volume allowing a signal path to extend through; and
a condensation reservoir in fluid communication with the internal sensor volume, the condensation reservoir spatially separated from the signal path and including a plurality of grooves arranged along a perimeter of the chamber, the grooves beginning at a first side of the chamber and ending at an opposite second side of the chamber in the direction of the signal path.

25. The sensor system of claim 24 , comprising a signal source, the signal path extending to the signal source.

26. The sensor system of claim 25 , wherein the sensor cell comprises:
an interposer of the chamber, the interposer laterally surrounding the internal sensor volume;
a first plate attached to the interposer, wherein at least a portion of the first plate is exposed to the internal sensor volume; and
a second plate attached to the interposer, wherein at least a portion of the second plate is exposed to the internal sensor volume, the plurality of grooves being located in one or more of the interposer, the first plate, and the second plate.

27. The sensor system of claim 25 , wherein the sensor cell comprises an alkali metal in at least one of the internal sensor volume or the condensation reservoir.

28. The sensor system of claim 25 , wherein the condensation reservoir is disposed in a path of a portion of signal emissions from the signal source.

29. A method of forming a sensor cell, comprising:
forming a first plate and a second plate, the first and second plates each bein

Assignees

• Texas Instruments Inc

Inventors

• Parsa Roozbeh
• Brockie Nathan
• Dyer Terry
• French William
• Mirgorodski Iouri N

Classifications

• G04F5/14

  using atomic clocks · CPC title

• G01N25/02 Primary

  by investigating changes of state or changes of phase; by investigating sintering {(investigating or analysing oils or hydrocarbon fluids by measuring cloud point or pour point G01N33/2811)} · CPC title

• H03L7/26

  using energy levels of molecules, atoms, or subatomic particles as a frequency reference · CPC title