Vapor cell structure having cavities connected by channels for micro-fabricated atomic clocks, magnetometers, and other devices

Patent metadata

Field	Value
Publication number	US-9568565-B2
Application number	US-201313948888-A
Country	US
Kind code	B2
Filing date	Jul 23, 2013
Priority date	Jul 23, 2013
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

A first apparatus includes a vapor cell having first and second cavities fluidly connected by multiple channels. The first cavity is configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell. The second cavity is configured to receive the one or more gases. The vapor cell is configured to allow radiation to pass through the second cavity. A second apparatus includes a vapor cell having a first wafer with first and second cavities and a second wafer with one or more channels fluidly connecting the cavities. The first cavity is configured to receive a material able to dissociate into one or more gases that are contained within the vapor cell. The second cavity is configured to receive the one or more gases. The vapor cell is configured to allow radiation to pass through the second cavity.

First claim

What is claimed is:

1. An apparatus comprising: a vapor cell having first and second cavities fluidly connected by multiple channels; the first cavity configured to receive a material to dissociate into one or more gases that are contained within the vapor cell; the second cavity configured to receive the one or more gases; wherein the vapor cell is configured to allow radiation to pass through the second cavity; a silicon wafer comprising the cavities and the channels; and an optically transparent wafer secured to the silicon wafer, wherein the optically transparent wafer is thinner vertically between the silicon wafer and the optically transparent wafer in a location proximate to the first cavity than at a location proximate the second cavity and wherein the first and second cavities do not extend into the optically transparent wafer.

2. The apparatus of claim 1 , wherein the material comprises an alkali-based material to dissociate into a metal vapor and a buffer gas.

3. The apparatus of claim 2 , wherein the material comprises cesium azide (CsN3) and dissociates into cesium vapor and nitrogen gas (N2).

4. A system comprising: a vapor cell comprising first and second cavities fluidly connected by multiple channels; the first cavity configured to receive a material to dissociate into one or more gases that are contained within the vapor cell; and the second cavity configured to receive the one or more gases; an illumination source configured to direct radiation through the second cavity; a first wafer comprising the cavities and the channels; and a second wafer having a top surface and a bottom surface where the bottom surface is secured to the first wafer, the second wafer sealing ends of the cavities and the channels wherein the first and second cavities do not extend into the second wafer, wherein the second wafer has a recess in the top surface is in a location proximate to the first cavity and no recess in the top surface in a location proximate the second cavity, wherein the recess extends only partially through the second wafer.

5. The system of claim 4 , further comprising:
clock generation circuitry configured to generate a clock signal based on the radiation directed through the second cavity.

6. The system of claim 4 , wherein the material comprises an alkali-based material able to dissociate into a metal vapor and a buffer gas.

7. The system of claim 6 , wherein the material comprises cesium azide (CsN 3 ) and is able to dissociate into cesium vapor and nitrogen gas (N 2 ).

8. An apparatus, comprising: a first and a second optically transparent wafer; and a silicon wafer between the first and second optically transparent wafers, wherein the silicon wafer includes a first cavity and a second cavity fluidly connected to each other via multiple channels to form a vapor cell; the first cavity and the second cavity extend from the first optically transparent wafer to the second optically transparent wafer; the multiple channels extend laterally from the first cavity to the second cavity and vertically between the silicon wafer and the first optically transparent wafer; the first optically transparent wafer is thinner in a location over the first cavity than at any location over the second cavity; and the first cavity is smaller than the second cavity.

9. The system of claim 8 , wherein the material comprises cesium azide (CsN 3 ).

10. The system of claim 8 , further comprising clock generation circuitry.

11. The system of claim 8 , further comprising a magnetic field calculator.

Assignees

• Texas Instruments Inc

Inventors

• Parsa Roozbeh
• Hopper Peter J

Classifications

• G04F5/14

  using atomic clocks · CPC title

• H01S1/06

  Gaseous {, i.e. beam masers} · CPC title

• G01R33/032 Primary

  using magneto-optic devices, e.g. Faraday {or Cotton-Mouton effect} · CPC title

• Y10T137/8593

  Systems · CPC title