Stable electroless copper plating compositions and methods for electroless plating copper on substrates

Patent metadata

Field	Value
Publication number	US-10294569-B2
Application number	US-201816034700-A
Country	US
Kind code	B2
Filing date	Jul 13, 2018
Priority date	Oct 6, 2017
Publication date	May 21, 2019
Grant date	May 21, 2019

Abstract

A specific cysteine derivative is added to electroless copper plating compositions to improve the stability of the electroless copper plating compositions such that the plating activity of the electroless plating copper compositions is not compromised even when electroless plating at low plating temperatures and high stabilizer and high leached catalyst concentrations.

First claim

What is claimed is:

1. An electroless copper plating composition comprising one or more sources of copper ions, S-carboxymethyl-L-cysteine, one or more complexing agents, one or more reducing agents, and, optionally, one or more pH adjusting agents, wherein a pH of the electroless copper plating composition is greater than 7.

2. The electroless copper plating composition of claim 1 , wherein the S-carboxymethyl-L-cysteine is in amounts of at least 0.5 ppm.

3. The electroless copper plating composition of claim 2 , wherein the S-carboxymethyl-L-cysteine is in amounts of 0.5 ppm to 200 ppm.

4. The electroless copper plating composition of claim 1 , wherein the one or more complexing agents are chosen from sodium potassium tartrate, sodium tartrate, sodium salicylate, sodium salts of ethylenediamine tetraacetic acid, nitriloacetic acid and its alkali metal salts, gluconic acid, gluconates, triethanolamine, modified ethylene diamine tetraacetic acids, s,s-ethylene diamine disuccinic acid and hydantoin and hydantoin derivatives.

5. The electroless copper plating composition of claim 1 , wherein the one or more reducing agents are chosen from formaldehyde, formaldehyde precursors, formaldehyde derivatives, borohydrides, substituted borohydrides, boranes, saccharides, and hypophosphite.

6. A method of electroless copper plating comprising:
e) providing a substrate comprising a dielectric;
f) applying a catalyst to the substrate comprising the dielectric;
g) applying an electroless copper plating composition to the substrate comprising the dielectric, wherein the electroless copper plating composition comprises one or more sources of copper ions, S-carboxymethyl-L-cysteine, one or more complexing agents, one or more reducing agents, and, optionally, one or more pH adjusting agents, wherein a pH of the electroless copper plating composition is greater than 7; and
h) electroless plating copper on the substrate comprising the dielectric with the electroless copper plating composition.

7. The method of claim 6 , wherein the S-carboxymethyl-L-cysteine is in amounts of at least 0.5 ppm.

8. The method of claim 6 , wherein the electroless copper plating composition is at 40° C. or less.

9. The method of claim 6 , wherein the catalyst is a palladium catalyst.

Assignees

• Rohm & Haas Elect Mat

Inventors

• Lifschitz Arribio Alejo M
• Cleary Donald E

Classifications

• C23C18/2086

  with use of organic or inorganic compounds other than metals, first · CPC title

• C23C18/30

  Activating {or accelerating or sensitising with palladium or other noble metal} · CPC title

• C25D7/00

  Electroplating characterised by the article coated · CPC title

• C23C18/18

  Pretreatment of the material to be coated · CPC title

• C25D3/38 Primary

  of copper · CPC title