Electrostatic chuck heater

Patent metadata

Field	Value
Publication number	US-10292209-B2
Application number	US-201715618328-A
Country	US
Kind code	B2
Filing date	Jun 9, 2017
Priority date	Aug 20, 2015
Publication date	May 14, 2019
Grant date	May 14, 2019

Abstract

An electrostatic chuck heater 20 includes an electrostatic chuck 22, a sheet heater 30, and a support pedestal 60. The electrostatic chuck 22 is obtained by embedding an electrostatic electrode 24 in a ceramic sintered body 26. The sheet heater 30 is a resin sheet 32 having a plurality of correction heater electrodes 34 and a plurality of base heater electrodes 44. A first surface of the sheet heater 30 is resin-bonded to the electrostatic chuck 22, and a second surface of the sheet heater 30 is resin-bonded to the support pedestal 60 made of metal.

First claim

What is claimed is:

1. An electrostatic chuck heater comprising:
an electrostatic chuck being a ceramic sintered body in which an electrostatic electrode is embedded;
a sheet heater being a resin sheet having one or a plurality of heater electrodes, the sheet heater having one surface resin-bonded to the electrostatic chuck; and
a metal support pedestal resin-bonded to the other surface of the sheet heater.

2. The electrostatic chuck heater according to claim 1 , wherein the sheet heater has a first electrode area and a second electrode area at different heights, the first and second electrode areas being parallel to the surfaces of the sheet heater; the first electrode area is an area where the plurality of heater electrodes are arranged; the second electrode area is an area where a plurality of jumper wires configured to feed power to the plurality of respective heater electrodes are arranged; one end of jumper wire is connected to a corresponding one of the heater electrodes; and the other end of the jumper wire is located at a predetermined position on an outer periphery side of the sheet heater.

3. The electrostatic chuck heater according to claim 2 , wherein the plurality of jumper wires are electrically connected to a plurality of respective jumper lands arranged on the other surface of the sheet heater; and
the plurality jumper lands face through holes arranged in the support pedestal.

4. The electrostatic chuck heater according to claim 3 , wherein the plurality of jumper lands are divided into a plurality of groups of two or more jumper lands; and
the jumper lands belonging to each of the groups face a common one of the through holes, and are electrically connected to an external power supply through a flexible metal conductor assembly inserted in the through hole.

5. The electrostatic chuck heater according to claim 2 , wherein the sheet heater has a third electrode area at a height different from the heights of the first and second electrode areas, the third electrode area being parallel to the first and second electrode areas, and the third electrode area is an area where a common ground electrode electrically connected to the plurality of heater electrodes is arranged.

6. The electrostatic chuck heater according to claim 2 , wherein the sheet heater has a fourth electrode area at a height different from the heights of the first and second electrode areas, the fourth electrode area being parallel to the first and second electrode areas, and the fourth electrode area is an area where one or more base heater electrodes higher in output than the heater electrodes are arranged.

7. The electrostatic chuck heater according to claim 5 , wherein the sheet heater has a fourth electrode area at a height different from the heights of the first and second electrode areas, the fourth electrode area being parallel to the first and second electrode areas, and the fourth electrode area is an area where one or more base heater electrodes higher in output than the heater electrodes are arranged.

8. The electrostatic chuck heater according to claim 7 , wherein the first electrode area, the second electrode area, the third electrode area, and the fourth electrode area are arranged in this order from the one surface toward the other surface of the sheet heater.

9. The electrostatic chuck heater according to claim 1 , wherein a bonding sheet is used for the resin bonding of the electrostatic chuck to the sheet heater and for the resin bonding of the sheet heater to the support pedestal.

Assignees

• Ngk Insulators Ltd

Inventors

• Takebayashi Hiroshi

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H05B2203/017

  Manufacturing methods or apparatus for heaters · CPC title

• H05B2203/016

  Heaters using particular connecting means · CPC title