Arrangement and method to sense flow using mechanical stress microsensors

Patent metadata

Field	Value
Publication number	US-10281302-B2
Application number	US-201414299098-A
Country	US
Kind code	B2
Filing date	Jun 9, 2014
Priority date	Sep 13, 2005
Publication date	May 7, 2019
Grant date	May 7, 2019

Abstract

An arrangement for controlling flow includes a flow control element, an actuator, a linkage assembly, and a sensor module. The linkage assembly is coupled between the flow control element and the actuator, and includes a rotatable linkage element coupled to impart force to the flow control element. The sensor module is affixed to the rotatable linkage element. The sensor module includes a MEMs-based strain gauge affixed to a substrate and operably coupled to measure torque on the linkage element, and a processing circuit disposed on the substrate. The processing circuit is operably coupled to receive torque measurement information representative of the measured torque. The processing circuit generates a fluid flow measurement value based on the torque measurement information and position information representative of a position of a flow control device of the flow control element. The flow control device is mechanically coupled to the rotatable linkage element.

First claim

We claim:

1. A damper assembly comprising: a damper frame; a plurality of damper blades, each having a rotary shaft, disposed on the damper frame, each of the damper blades rotatable through a plurality of damper positions; an actuator module; and a linkage assembly operably coupled between the actuator module and the plurality of damper blades, the linkage assembly including a linkage element coupled to impart rotational force to each of the plurality of damper blades; and a sensor module affixed to the linkage element, the sensor module including a MEMs-based strain gauge affixed to a substrate and operably coupled to measure torque on the linkage element, and a processing circuit disposed on the substrate, the processing circuit operably coupled to receive torque measurement information representative of the measured torque, the processing circuit operable to generate a fluid flow measurement value based on the torque measurement information and on position information representative of a current damper position.

2. The damper assembly of claim 1 , wherein the actuator module is affixed to the damper frame.

3. The damper assembly of claim 2 , wherein the sensor module is configured to communicate information representative of the fluid flow measurement value to the actuator module, and wherein the actuator module is further configured to produce an output force based at least in part on the communicated information.

4. The damper assembly of claim 3 , wherein the sensor module includes a wireless communication circuit, and wherein the wireless communication circuit is configured to communicate the information representative of the fluid flow measurement value to the actuator module.

5. The damper assembly of claim 1 , wherein the processing circuit is further configured to generate the fluid flow measurement value by selecting one of a plurality of relationships between the torque measurement information and fluid flow, the selection of one of the plurality of relationships based on the position information.

6. The damper assembly of claim 5 , wherein the processing circuit further includes a low pass filter configured to provide low pass filtering to the torque measurement information.

7. A damper assembly comprising: a damper frame; a plurality of damper blades, each having a rotary shaft, disposed on the damper frame, each of the damper blades rotatable through a plurality of damper positions; an actuator module; and a linkage assembly operably coupled between the actuator module and the plurality of damper blades, the linkage assembly including a linkage element coupled to impart rotational force to each of the plurality of damper blades; and a sensor module affixed to the linkage element, the sensor module including a MEMs-based strain gauge affixed to a substrate and operably coupled to measure torque on the linkage element, and a processing circuit disposed on the substrate, the processing circuit operably coupled to receive torque measurement information representative of the measured torque, the processing circuit operable to generate a fluid flow measurement value based on the torque measurement information and on position information representative of a current damper position, wherein the linkage assembly further includes a drive rod, a plurality of linking members, and a rotatable output shaft, the rotatable output shaft operably coupled between the actuator module and the drive rod, the drive rod coupled to and extending between each of the plurality of linking members and the rotatable output shaft, each of the plurality of linking members operably coupled to translate movement force from the drive rod to a corresponding one of the plurality of damper blades, and wherein the sensor module is affixed to the rotatable output shaft.

8. The damper assembly of claim 7 , wherein the processing circuit is further configured to generate the fluid flow measurement value by selecting one of a plurality of relationships between the torque measurement information and fluid flow, the selection of one of the plurality of relationships based on the position information.

9. The damper assembly of claim 8 , wherein the processing circuit further includes a low pass filter configured to provide low pass filtering to the torque measurement information.

10. An arrangement for controlling flow, comprising: a flow control element a damper frame; a plurality of flow control elements, each flow control element including a damper blade having a rotable shaft disposed on the damper frame rotatable through a plurality of damper positions; an actuator; a linkage assembly coupled between the each of the plurality of flow control elements and the actuator, the linkage assembly including a rotatable linkage element coupled to impart force to the each of the plurality of flow control elements; and a sensor module affixed to the rotatable linkage element, the sensor module including a MEMs-based strain gauge affixed to a substrate and operably coupled to measure torque on the linkage element, and a processing circuit disposed on the substrate, the processing circuit operably coupled to receive torque measurement information representative of the measured torque, the processing circuit operable to generate a fluid flow measurement value based on the torque measurement information and position information representative of a position of the each of the plurality of flow control elements.

11. The arrangement of claim 10 , wherein the processing circuit is further configured to generate the fluid flow measurement value by selecting one of a plurality of relationships between the torque measurement information and fluid flow, the selection of one of the plurality of relationships based on the position information.

12. The arrangement of claim 11 , wherein the processing circuit further includes a low pass filter configured to provide low pass filtering to the torque measurement information.

13. The arrangement of claim 12 , wherein the sensor module further comprises a memory storing the plurality of relationships.

14. The arrangement of claim 13 , wherein the sensor module further comprises a first wireless communication circuit operable to communicate information including the fluid flow measurement value to a second wireless communication circuit.

15. The arrangement of claim 14 , wherein the first wireless communication circuit includes an RF communication device.

16. The arrangement of claim 10 , wherein the processing circuit is further configured to generate the fluid flow measurement value by selecting one of a plurality of piecewise linear functions.

17. The arrangement of claim 16 , wherein the sensor module further comprises a memory storing the plurality of piecewise linear functions.

18. The arrangement of claim 17 , wherein each of the plurality of piecewise linear functions provides a fluid flow value as a function of fluid flow induced force information.

19. The arrangement of claim 16 , wherein each of the plurality of piecewise linear functions provides a fluid flow value as a function of fluid flow induced force information.

Assignees

• Siemens Industry Inc

Inventors

• Anderson Dean B
• Cook Matthew D

Classifications

• F24F11/30

  for purposes related to the operation of the system, e.g. for safety or monitoring · CPC title

• F16K1/165 Primary

  with a plurality of closure members · CPC title

• G01F1/28 Primary

  by drag-force, e.g. vane type or impact flowmeter · CPC title

• F24F11/70

  Control systems characterised by their outputs; Constructional details thereof · CPC title

• Y10T137/7722

  Line condition change responsive valves · CPC title