Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US10260781B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10260781-B2 |
| Application number | US-201414474260-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 1, 2014 |
| Priority date | Sep 4, 2013 |
| Publication date | Apr 16, 2019 |
| Grant date | Apr 16, 2019 |
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A liquid cooling device having a diversion mechanism, connected with a heat source, includes a thermoelectric cooler, a first water block, a second water block and a pump. The thermoelectric cooler has a cold end and a hot end. The first water block is disposed between the heat source and the cold end of the thermoelectric cooler. The second water block is disposed on one side of the hot end of the thermoelectric cooler. The pump connects the first water block and the second water block via a water pipe. Thereby, the temperature of an inner fluid is reduced and the overall heat dissipation effect of the device is improved.
Opening claim text (preview).
What is claimed is: 1. A liquid cooling device having a diversion mechanism, connected with a heat source, comprising: a thermoelectric cooler having a cold end and a hot end; a first water block disposed between the heat source and the cold end of the thermoelectric cooler, wherein the first water block has a first surface and a second surface opposite to each other, the first water block is disposed on the cold end of the thermoelectric cooler via the first surface, and the second surface is directly in thermal contact with the heat source; and a second water block disposed on the hot end of the thermoelectric cooler, such that the first water block, the thermoelectric cooler and the second water block are stacked directly on each other in a direction perpendicular to the heat source; and a pump connecting the first water block and the second water block via a water pipe, wherein the pump supplies water to the first water block and second water block simultaneously by way of the water pipe, thus forming a circulation of water, and heat generated by the heat source is directly conducted into the circulation of water via the second surface of the first water block. 2. The liquid cooling device according to claim 1 , further comprising a pair of heat transfer members, wherein one of the heat transfer members is disposed between the cold end of the thermoelectric cooler and the first water block while the other heat transfer member is disposed between the hot end of the thermoelectric cooler and the second water block. 3. The liquid cooling device according to claim 2 , wherein the heat transfer member comprises a plurality of cooling fins. 4. The liquid cooling device according to claim 1 , wherein the first water block comprises a main body, a water inlet joint and a water outlet joint, the main body is attached to the cold end of the thermoelectric cooler, and the water inlet joint and the water outlet joint are respectively plugged in and connected with the inside of the main body. 5. The liquid cooling device according to claim 4 , wherein the second water block comprises a main body, a water inlet joint and a water outlet joint, the main body of the second water block is attached to the hot end of the thermoelectric cooler, and the water inlet joint of the second water block and the water outlet joint of the second water block are respectively plugged in and connected with the inside of the main body of the second water block. 6. The liquid cooling device according to claim 5 , wherein the water pipe comprises a main pipe, two secondary manifolds and a tee joint, two ends of the main pipe are connected to the pump and the tee joint respectively, two ends of one of the secondary manifolds are connected to the tee joint and the water inlet joint of the first water block, respectively, while two ends of the other secondary manifold are connected to the tee joint and the water inlet joint of the second water block, respectively. 7. A liquid cooling device adapted to remove heat from a heat source, the liquid cooling device comprising: a thermoelectric cooler having a cold end and a hot end; a first water block disposed between the heat source and the cold end of the thermoelectric cooler, wherein the first water block has a first surface and a second surface opposite to each other, the first water block is disposed on the cold end of the thermoelectric cooler via the first surface, and the second surface is configured to directly thermally contact the heat source; a second water block disposed on the hot end of the thermoelectric cooler, such that the first water block, the thermoelectric cooler and the second water block are stacked directly on each other in a direction perpendicular to the heat source; and a pump connecting the first water block and the second water block via a water pipe, wherein the pump supplies water to the first water block and second water block simultaneously by way of the water pipe, thus forming a circulation of water, and heat generated by the heat source is directly conducted into the circulation of water via the second surface of the first water block, wherein a separating plate is disposed in the inside of the main body, and an upper channel and a lower channel are connected to each other and respectively formed on two sides of the separating plate, the upper channel is located between the thermoelectric cooler and the lower channel, and the upper channel is connected with a water inlet joint of the first water block while the lower channel is connected with a water outlet joint of the first water block. 8. The liquid cooling device according to claim 1 , further comprising an air-cooled radiator connecting the first water block, the second water block and the pump via a liquid tube. 9. The liquid cooling device according to claim 8 , wherein the liquid tube comprises a main pipe, two secondary manifolds and a tee joint, the first water block comprises a water outlet joint, the second water block also comprises a water outlet joint, two ends of the main pipe are connected to the pump and the tee joint respectively, two ends of one of the secondary manifolds are connected to the tee joint and the water outlet joint of the first water block, respectively, while two ends of the other secondary manifold are connected to the tee joint and the water outlet joint of the second water block, respectively. 10. The liquid cooling device according to claim 8 , further comprising a fan arranged on the air-cooled radiator. 11. The liquid cooling device according to claim 8 , further comprising a liquid storage container connected with the liquid tube.
using Peltier effect; using Nernst-Ettinghausen effect · CPC title
Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls {; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies (F28D17/00, F28D19/00, F28D20/00 take precedence)} · CPC title
Elements constructed in the shape of a hollow panel, e.g. with channels {(F28D1/02, F28D1/03 take precedence)} · CPC title
by liquids or two-phase fluids · CPC title
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