Substrate processing apparatus, editing apparatus and method and non-transitory storage medium

Patent metadata

Field	Value
Publication number	US-10254816-B2
Application number	US-201514609901-A
Country	US
Kind code	B2
Filing date	Jan 30, 2015
Priority date	Jan 31, 2014
Publication date	Apr 9, 2019
Grant date	Apr 9, 2019

Abstract

A control unit of a substrate processing apparatus has a storage medium that stores operation commands as a single macro. The operation commands include an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance. The control unit makes a display unit display both the operation commands for shutdown and startup together on a single ejection screen of the display unit, and allows editing of the macro on the single edit screen by using the input unit.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a substrate processing unit processing a substrate, the substrate processing unit being configured to process the substrate while at least one of heating the substrate or supplying a processing liquid with the substrate,
a control unit having a non-transitory storage medium that stores operation commands as a single macro, the commands including an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance, wherein the control unit controls the substrate processing apparatus according to the macro;
an input unit that allows inputting of the operation commands into the control unit; and
a display unit that displays information related to the operation commands inputted into the control unit;
wherein the control unit makes the display unit display both the operation command for shutdown and the operation command for startup together on a single edit screen of the display unit and allows editing of the macro on the single edit screen by using the input unit,
wherein on an edit screen, execution of a group of the operation commands for shutdown and an order of execution of a group of the operation commands for startup can be set in the respective display areas of the single edit screen, and
wherein a single execution screen is displayed on the display unit to execute the macro, and the group of the operation commands for shutdown and the group of the operation commands for startup are both respectively displayed in different display areas on the single execution screen.

2. The substrate processing apparatus according to claim 1 , wherein at least one of the operation commands for shutdown and the operation command for startup that are included in the macro is selected from operation commands corresponding to a recipe step included in the transport recipe that is used in the normally-operating condition and operation commands included in a recipe dependent on the transport recipe.

3. The substrate processing apparatus according to claim 1 , wherein an area in the single execution screen corresponding to the operation command that is being executed at present is highlighted.

4. The substrate processing apparatus according to claim 1 , further comprising a baking module controlled by the control unit to heat the substrate to be processed in the substrate processing apparatus, wherein the operation command for shutdown of the substrate processing apparatus comprises an operation command for cooling of the baking module.

5. The substrate processing apparatus according to claim 1 , further comprising a liquid supply cabinet controlled by the control unit to supply the processing liquid for processing a substrate, wherein the operation command for shutdown of the substrate processing apparatus comprises an operation command for draining the processing liquid from the liquid supply cabinet.

6. The substrate processing apparatus according to claim 1 , wherein the control unit makes the edit screen display separately an imaginary button for displaying a list of commands selectable as the operation command for shutdown, and an imaginary button for displaying a list of commands selectable as the operation command for startup.

7. The substrate processing apparatus according to claim 1 , wherein on the edit screen, a display area is located between the area displaying the operation command for shutdown and the area displaying the operation command for startup, the display area showing that there is manpower maintenance which is previously set such that start and finish commands are input by an operator or a worker.

8. A non-transitory storage medium storing a program executable by a computer serving as a control unit of a substrate processing apparatus,
wherein the substrate processing apparatus includes:
a substrate processing unit processing a substrate, the process processing unit being configured to process the substrate while at least one of heating the substrate or supplying a processing liquid with the substrate;
the control unit having a non-transitory storage medium that stores operation commands as a single macro, the operation commands including an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance, wherein the control unit controls the substrate processing apparatus according to the macro;
an input unit that allows inputting of the operation commands into the control unit; and
a display unit that displays information related to the operation commands inputted into the control unit,
wherein the storage medium stores a program, upon execution of which a function of editing and displaying a maintenance recipe is realized via the computer,
wherein the function includes a function to make the display unit display respectively the operation command for shutdown and the operation command for startup in different display areas on a single edit screen of the display unit, and to allow editing of the macro in the respective display areas on the single edit screen by using the input unit,
wherein a control unit allows editing of the macro related to an order of execution of a group of the operation commands for shutdown and an order of execution of a group of the operation commands for startup by using the input unit on the single edit screen, and
wherein the control unit makes the display unit display a single execution screen in order to execute the macro, and the group of the operation commands for shutdown and the group of the operation commands for startup are both displayed in the respective display areas on the single execution screen.

9. The non-transitory storage medium according to claim 8 , wherein the substrate processing apparatus further includes a baking module controlled by the control unit to heat the substrate to be processed in the substrate processing apparatus, and wherein the operation command for shutdown of the substrate processing apparatus comprises an operation command for cooling of the baking module.

10. The non-transitory storage medium according to claim 8 , wherein the substrate processing apparatus further includes a liquid supply cabinet controlled by the control unit to supply the processing liquid for processing the substrate, wherein the operation command for shutdown of the substrate processing apparatus comprises an operation command for draining the processing liquid from the liquid supply cabinet.

11. An editing apparatus for editing operation commands for use in a substrate processing apparatus having a non-transitory storage medium that stores operation commands as a single macro, the operation commands including an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate p

Assignees

• Tokyo Electron Ltd

Inventors

• Yuasa Seiichiro
• Fujimoto Kunihiko

Classifications

• H10P72/0612

  Production flow monitoring, e.g. for increasing throughput · CPC title

• H10P72/04 Primary

  Apparatus for manufacture or treatment · CPC title

• G05B2219/25389

  Macro's, subroutines · CPC title

• H01L21/67276

  Electricity · mapped topic

• G06F1/3265 Primary

  Power saving in display device · CPC title