Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US10254025B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10254025-B2 |
| Application number | US-68244010-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 10, 2007 |
| Priority date | Oct 10, 2007 |
| Publication date | Apr 9, 2019 |
| Grant date | Apr 9, 2019 |
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A refrigerating system according to the invention includes a refrigerant circuit having at least one compressor, a condenser/gascooler, an intermediate pressure container, at least one evaporator and a respective expansion device before said at least one evaporator, and refrigerant pipes connecting said elements and circulating a refrigerant therethrough; a high pressure regulating device between the condenser/gascooler and the intermediate pressure container, expanding the refrigerant from a high pressure level to an intermediate pressure level; an intermediate pressure sensor sensing the intermediate pressure level; and a control unit controlling the high pressure regulating device. The control unit in operation limits the maximum refrigerant flow through the high pressure regulating device to a maximum flow value FMax, if the sensed intermediate pressure level exceeds a predetermined threshold value PIntTh.
Opening claim text (preview).
What is claimed is: 1. Refrigerating system having a refrigerant circuit comprising: at least one compressor, a condenser/gascooler, an intermediate pressure container, at least one evaporator and a respective expansion device before said at least one evaporator, and refrigerant pipes connecting said elements and circulating a refrigerant therethrough; a high pressure regulating device between the condenser/gascooler and the intermediate pressure container, expanding the refrigerant from a high pressure level to an intermediate pressure level; an intermediate pressure sensor sensing the intermediate pressure level; and a control unit controlling the high pressure regulating device; wherein the control unit is configured to set a maximum flow value F Max as a limit for a refrigerant flow through the high pressure regulating device, wherein the control unit is configured to compare the sensed intermediate pressure level to a fixed predetermined threshold value P IntTh , wherein the predetermined threshold value P IntTh is between a fixed reference intermediate pressure value P IntRef , being the desired operating point of the intermediate pressure level, and a maximum allowable intermediate pressure value P IntMax , wherein the control unit is configured, as a function of said comparison of the sensed intermediate pressure level to the predetermined threshold value P IntTh , to set the maximum flow value F Max to less than a maximum flow value F TecMax that the high pressure regulating device technically supports, wherein the refrigerant circuit additionally comprises a high pressure sensor sensing the high pressure level, wherein the control unit is configured to set a desired actual flow value for the refrigerant flow through the high pressure regulating device based on the sensed high pressure level, wherein the desired actual flow value does not exceed the maximum flow value F Max . 2. Refrigerating system according to claim 1 , wherein the predetermined threshold value P IntTh is set according to the formula: P IntTh =P IntRef +C Th ( P IntMax −P IntRef ), wherein C Th is a constant lying between 0.25 and 0.5. 3. Refrigerating system according to claim 1 , wherein the control unit in operation sets the maximum flow value F Max using a monotonically decreasing function of the intermediate pressure level P Int . 4. Refrigerating system according to claim 3 , wherein the maximum flow value F Max is set according to the formula: F Max =F TecMax (1− C P ( P Int −P IntTh )), wherein C P is a proportionality constant. 5. Refrigerating system according to claim 4 , wherein the proportionality constant C P is adaptable to adjust the refrigerating system to various operating conditions. 6. Refrigerating system according to claim 1 , wherein the refrigerant flow through the high pressure regulating device is adjusted by changing a degree of aperture thereof. 7. Refrigerating system according to claim 1 , wherein the intermediate pressure container in operation separates liquid refrigerant from gaseous refrigerant. 8. Refrigerating system according to claim 7 , wherein the refrigerant circuit also comprises a gaseous refrigerant refeed pipe connecting a gas space of the intermediate pressure container with the at least one compressor and an intermediate pressure regulating device arranged within the gaseous refrigerant refeed pipe. 9. Refrigerating system according to claim 1 , wherein the condenser/gascooler and the intermediate pressure container each have at least one safety valve associated therewith, the safety valves being adapted to release refrigerant when a pressure reaches a critical level in the respective elements of the refrigerating system. 10. Refrigerating system according to claim 1 , wherein, in case of the high pressure level approaching a critical value, the control unit stops limiting the refrigerant flow to the maximum refrigerant flow F Max . 11. Refrigerating system according to claim 1 , wherein, in case of the high pressure level approaching a critical value, the control unit subsequently switches off compressor stages of the at least one compressor. 12. Refrigerating system according to claim 1 , wherein the refrigerant is CO 2 . 13. Method for controlling a refrigerating system comprising a refrigerant circuit having at least one compressor, a condenser/gascooler, an intermediate pressure container, at least one evaporator and a respective expansion device before said at least one evaporator, and refrigerant pipes connecting said elements and circulating a refrigerant therethrough; a high pressure regulating device between the condenser/gascooler and the intermediate pressure container, expanding the refrigerant from a high pressure level to an intermediate pressure level; an intermediate pressure sensor sensing the intermediate pressure level; and a high pressure sensor sensing the high pressure level; the method comprising the steps of: comparing the sensed intermediate pressure level to a fixed predetermined threshold value P IntTh , wherein the predetermined threshold value P IntTh is between a fixed reference intermediate pressure value P IntRef , being the desired operating point of the intermediate pressure level and a maximum allowable intermediate pressure value P IntMax , on the basis of said step of comparing the sensed intermediate pressure level to the predetermined threshold value P IntTh , setting a maximum flow value F Max , which maximum flow value is set to less than a maximum flow value F TecMax that the high pressure regulating device technically supports, limiting a refrigerant flow through the high pressure regulating device to the maximum flow value F Max , and setting a desired actual flow value for the refrigerant flow through the high pressure regulating device based on the sensed high pressure level, wherein the desired actual flow value does not exceed the maximum flow value F Max .
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