Mask blank, method of manufacturing the same, and transfer mask
US-9104112-B2 · Aug 11, 2015 · US
Method and device for modifying resin
US10253148B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10253148-B2 |
| Application number | US-201615555644-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 11, 2016 |
| Priority date | Mar 12, 2015 |
| Publication date | Apr 9, 2019 |
| Grant date | Apr 9, 2019 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
It is a method for modifying a resin ( 6 ), the method for hydrophilizing the surface of the resin ( 6 ). High-concentration ozone gas and an unsaturated hydrocarbon gas are supplied to the surface of the resin ( 6 ), and the surface of the resin ( 6 ) is hydrophilized. The high-concentration ozone gas is generated by re-vaporizing liquid ozone obtained by liquefaction and fractional distillation of an ozone-containing gas. Ozone gas having an ozone concentration of 50 vol % or greater is used as the high-concentration ozone gas. A gas containing an unsaturated hydrocarbon with a carbon number of 10 or lower which has a double bond or a triple bond is used as the unsaturated hydrocarbon gas.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method for modifying a resin, comprising: supplying ozone gas and an unsaturated hydrocarbon gas to the resin for hydrophilizing a surface of the resin, wherein the surface of the resin is hydrophilized with a reaction gas of the ozone gas and the unsaturated hydrocarbon gas, wherein an ozone concentration of the ozone gas is 50 vol % or greater, and wherein a modification time by the ozone gas and the unsaturated hydrocarbon gas is one minute or less. 2. The method for modifying the resin according to claim 1 , wherein the unsaturated hydrocarbon gas comprises ethylene. 3. The method for modifying the resin according to claim 1 , wherein one gas of the ozone gas and the unsaturated hydrocarbon gas is supplied to flow parallel to a treatment surface of the resin, and wherein another gas of the ozone gas and the unsaturated hydrocarbon gas is supplied to flow in a direction toward the surface of the resin. 4. The method for modifying the resin according to claim 1 , wherein the resin is moved such that the surface of the resin is uniformly hydrophilized, and the ozone gas and the unsaturated hydrocarbon gas are supplied to the resin. 5. The method for modifying the resin according to claim 1 , further comprising providing a shower head facing the surface of the resin, and wherein the ozone gas and the unsaturated hydrocarbon gas are supplied from the shower head. 6. The method for modifying the resin according to claim 1 , wherein the resin is heated, and the ozone gas and the unsaturated hydrocarbon gas are supplied to the resin. 7. The method for modifying the resin according to claim 6 , wherein a temperature to which the resin is heated is less than or equal to a glass transition temperature of the resin.
Assignees
Inventors
Classifications
- C08J7/12Primary
Chemical modification · CPC title
Preparation of ozone · CPC title
Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors · CPC title
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US10253148B2 cover?
- It is a method for modifying a resin ( 6 ), the method for hydrophilizing the surface of the resin ( 6 ). High-concentration ozone gas and an unsaturated hydrocarbon gas are supplied to the surface of the resin ( 6 ), and the surface of the resin ( 6 ) is hydrophilized. The high-concentration ozone gas is generated by re-vaporizing liquid ozone obtained by liquefaction and fractional distillati…
- Who is the assignee on this patent?
- Meidensha Electric Mfg Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification C08J7/12. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Apr 09 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).