Component having a multiple quantum well structure

Patent metadata

Field	Value
Publication number	US-10249787-B2
Application number	US-201615559409-A
Country	US
Kind code	B2
Filing date	Mar 1, 2016
Priority date	Mar 19, 2015
Publication date	Apr 2, 2019
Grant date	Apr 2, 2019

Abstract

The invention relates to a component ( 10 ) having a semiconductor layer sequence, which has a p-conducting semiconductor layer ( 1 ), an n-conducting semiconductor layer ( 2 ), and an active zone ( 3 ) arranged between the p-conducting semiconductor layer and the n-conducting semiconductor layer, wherein the active zone has a multiple quantum well structure, which, from the p-conducting semiconductor layer to the n-conducting semiconductor layer, has a plurality of p-side barrier layers ( 32 p ) having intermediate quantum well layers ( 31 ) and a plurality of n-side barrier layers ( 32 n ) having intermediate quantum layers ( 31 ). Recesses ( 4 ) having flanks are formed in the semiconductor layer sequence on the part of the p-conducting semiconductor layer, wherein the quantum well layers and/or the n- and p-side barrier layers extend in a manner conforming to the flanks of the recesses at least in regions. The interior barrier layers have a larger average layer thickness than the p-side barrier layers.

First claim

The invention claimed is:

1. A component having a semiconductor layer sequence comprising a p-conductive semiconductor layer, an n-conductive semiconductor layer and an active zone arranged between the p-conductive semiconductor layer and the n-conductive semiconductor layer, wherein
the active zone comprises a multiple quantum well structure, which, from the p-conductive semiconductor layer towards the n-conductive semiconductor layer, comprises a plurality of p-side barrier layers with intermediate quantum well layers and a plurality of n-side barrier layers with intermediate quantum layers,
in the semiconductor layer sequence on the side of the p-conductive semiconductor layer, recesses are formed which have sidewalls, wherein the quantum well layers and/or the plurality of n- and p-side barrier layers extend at least in places conformally with the sidewalls of the recesses,
the plurality of the n- and p-side barrier layers have layer thicknesses that increase monotonically from the p-conductive semiconductor layer towards the n-conductive semiconductor layer, such that the active zone has a gradient with increasing layer thickness of the barrier layers towards the n-conductive semiconductor layer, and
the n-side barrier layers have a greater average layer thickness than the p-side barrier layers.

2. The component according to claim 1 , wherein the semiconductor layer sequence is configured in such a way that the sidewalls of the recesses are oblique and the p-side barrier layers have smaller layer thicknesses than the n-side barrier layers, whereby, when the component is in operation, charge carriers are injected from the p-conductive semiconductor layer both throughout the barrier layers extending along the sidewalls and throughout the barrier layers located outside the recesses into different quantum well layers.

3. The component according to claim 2 , wherein the recesses extend at least up to a vertical height of the n-side barrier layers, such that the charge carriers from the p-conductive semiconductor layer are injected via the obliquely configured sidewalls of the recesses predominantly into the quantum well layers arranged between the n-side barrier layers.

4. The component according to claim 1 , wherein the recesses are of V-shaped configuration in sectional view.

5. The component according to claim 1 , wherein the average layer thickness of the n-side barrier layers is at least 1.2 times and at most 10 times the average layer thickness of the p-side barrier layers.

6. The component according to claim 1 , wherein the p-side barrier layers each have a layer thickness of between 3 nm and 7 nm inclusive and the n-side barrier layers each have a layer thickness of between 5 nm and 30 nm inclusive.

7. The component according to claim 1 , wherein all the n-side barrier layers each have a layer thickness which is greater than a layer thickness of the respective p-side barrier layers.

8. The component according to claim 1 , wherein the barrier layers have layer thicknesses that increase monotonically at least in places from the p-conductive semiconductor layer towards the n-conductive semiconductor layer.

9. The component according to claim 1 , wherein the quantum well layers and/or at least the p-side barrier layers have smaller layer thicknesses in regions inside the recesses compared to regions outside the recesses.

10. The component according to claim 1 , wherein the n-side barrier layers and/or the p-side barrier layers are differently configured with regard to their material composition, layer thicknesses or doping profiles.

11. The component according to claim 1 , wherein the quantum well layers which adjoin the barrier layers with different layer thicknesses are differently configured with regard to their material composition, layer thicknesses or doping profile.

12. The component according to claim 1 , wherein the semiconductor layer sequence comprises at least one superlattice structure made of a plurality of semiconductor thin film layers, wherein the superlattice structure adjoins the active zone.

13. The component according to claim 1 , wherein the active zone is based on a III-V compound semiconductor material.

14. The component according to claim 13 , wherein the quantum well layers have a lower indium content in regions inside the recesses compared to regions outside the recesses.

15. The component according to claim 1 , wherein the active zone is configured to generate electromagnetic radiation when the component is in operation.

16. The component according to claim 1 , wherein
the barrier layers are those layers of the multiple quantum well structure which are each arranged between two quantum well layers of the multiple quantum well structure and adjoin these quantum well layers associated therewith,
the multiple quantum well structure comprises a p-side terminating barrier, said p-side terminating barrier having a greater layer thickness than the p-side barrier layers, and
a peripheral quantum well layer is arranged between one of barrier layers and the p-side terminating barrier.

17. The component according to claim 1 , wherein the active zone has the gradient with regard to the layer thickness of the barrier layers over the entire multiple quantum well structure.

18. A component having a semiconductor layer sequence comprising a p-conductive semiconductor layer, an n-conductive semiconductor layer and an active zone arranged between the p-conductive semiconductor layer and the n-conductive semiconductor layer, wherein
the active zone comprises a multiple quantum well structure, which, from the p-conductive semiconductor layer towards the n-conductive semiconductor layer, comprises a plurality of p-side barrier layers with intermediate quantum well layers and a plurality of n-side barrier layers with intermediate quantum layers,
in the semiconductor layer sequence on the side of the p-conductive semiconductor layer, recesses are formed which have sidewalls, wherein the quantum well layers and/or the n- and p-side barrier layers extend at least in places conformally with the sidewalls of the recesses,
the n-side barrier layers have a greater average layer thickness than the p-side barrier layers,
the barrier layers are those layers of the multiple quantum well structure which are each arranged between two quantum well layers of the multiple quantum well structure and adjoin these quantum well layers associated therewith,
the multiple quantum well structure comprises a p-side terminating barrier, said p-side terminating barrier having a greater layer thickness than the p-side barrier layers, and
the barrier layers have layer thicknesses that increase monotonically at least in places from the p-conductive semiconductor layer towards the n-conductive semiconductor layer, such that the active zone has a gradient with increasing layer thickness of the barrier layers towards the n-conductive semiconductor layer.

Assignees

• Osram Opto Semiconductors Gmbh

Inventors

• Meyer Tobias
• Lehnhardt Thomas
• Peter Matthias
• Hirai Asako
• Off Juergen
• Drechsel Philipp
• Stauss Peter

Classifications

• H01S5/2228

  quantum wells · CPC title

• H01S5/3216

  quantum well or superlattice cladding layers · CPC title

• H01S5/309

  doping of barrier layers that confine charge carriers in the laser structure, e.g. the barriers in a quantum well structure (barriers in quantum wells per se H01S5/3407) · CPC title

• H01L33/0075

  Electricity · mapped topic

• H01L33/32

  Electricity · mapped topic