Photonic crystal sensor structure and a method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-10247671-B2
Application number	US-201815904463-A
Country	US
Kind code	B2
Filing date	Feb 26, 2018
Priority date	Dec 2, 2014
Publication date	Apr 2, 2019
Grant date	Apr 2, 2019

Abstract

A sensor and methods of making a sensor are disclosed. The sensor may include a substrate including an opening, an optical source disposed in the substrate and configured to generate an optical source signal, an optical detector disposed in the substrate so that the opening is disposed between the optical source and the optical detector, a plurality of optical cavity structures disposed in the opening wherein each of the plurality of optical cavity structures contains an enclosed cavity so that the respective enclosed cavities are not in gas communication with each other, wherein the plurality of optical cavity structures are arranged in an optical path between the optical source and the optical detector, and a processing circuit coupled to the optical detector and configured to process an optical signal received by the optical detector.

First claim

What is claimed is:

1. A sensor, comprising:
a substrate comprising an opening;
an optical source disposed in the substrate and configured to generate an optical source signal;
an optical detector disposed in the substrate so that the opening is disposed between the optical source and the optical detector;
a plurality of discrete optical cavity structures disposed in the opening wherein the plurality of discrete optical cavity structures are arranged spaced apart from each other as a series of discrete partitioning members in an optical path between the optical source and the optical detector so as to partition the opening into a plurality of discrete sub-openings, wherein each of the discrete optical cavity structures comprises a first surface and a second surface opposite the first surface, the first surface facing towards the optical source and the second surface facing towards the optical detector; and
a processing circuit coupled to the optical detector and configured to process an optical signal received by the optical detector.

2. The sensor of claim 1 ,
wherein the substrate comprises one or more layers and the opening is disposed in the one or more layers of the substrate.

3. The sensor of claim 1 ,
wherein the optical source comprises a first semiconductor diode; and

wherein the optical detector comprises a second semiconductor diode.

4. The sensor of claim 1 ,
wherein each discrete optical cavity structure comprises a separate photonic crystalline structure.

5. The sensor of claim 4 ,
wherein each discrete optical cavity structure comprises a separate slab of photonic crystals, wherein the first and second surfaces extend substantially a height and width of the opening.

6. The sensor of claim 4 ,
wherein the plurality of discrete optical cavity structures comprise substantially a range from 400 to 1200 separate blocks comprised of photonic crystals.

7. The sensor of claim 4 ,
wherein each of the discrete sub-openings is filled with a gaseous substance.

8. The sensor of claim 7 ,
wherein the processing circuit is further configured to determine a temperature based on the received optical signal.

9. The sensor of claim 8 ,
wherein the processing circuit is configured to detect a change in the temperature based on a change in the refractive index of the gaseous substance in one or more of the discrete sub-openings.

10. The sensor of claim 7 ,
wherein the processing circuit is further configured to determine a pressure based on the received optical signal.

11. The sensor of claim 10 ,
wherein each of the plurality of discrete optical cavity structures comprise a surface that is configured to deflect due to a change in pressure in one or more of the discrete sub-openings relative to an ambient pressure.

12. The sensor of claim 11 ,
wherein the pressure in one or more of the discrete sub-openings is greater than the ambient pressure.

13. The sensor of claim 7 ,
wherein the processing circuit is further configured to determine if one or more predefined gases are present in one or more of the discrete sub-openings.

14. The sensor of claim 7 ,
wherein each of the plurality of discrete optical cavity structures comprises an enclosed hollow space.

15. The sensor of claim 14 ,
wherein the enclosed hollow space within each discrete optical cavity structure is gas tight.

16. The sensor of claim 14 ,
wherein the respective enclosed hollow spaces of the plurality of discrete optical cavity structures are not in gas communication with each other.

17. The sensor of claim 4 ,
wherein each of the discrete sub-openings is filled with a fluid.

18. A method of forming a sensor, the method comprising:
forming a substrate comprising an opening;
providing an optical source disposed in the substrate;
providing an optical detector disposed in the substrate so that the opening is disposed between the optical source and the optical detector;
forming a plurality of discrete optical cavity structures in the opening;
arranging the plurality of discrete optical cavity structures as a series of discrete partitioning members to be spaced apart from each other in an optical path between the optical source and the optical detector so as to partition the opening into a plurality of discrete sub-openings, wherein each of the discrete optical cavity structures comprises a first surface and a second surface opposite the first surface, the first surface facing towards the optical source and the second surface facing towards the optical detector; and
coupling a processing device to the optical detector and configuring the processing device to process an optical signal received by the optical detector.

19. The method of claim 18 ,
wherein the plurality of discrete optical cavity structures comprise substantially a range from 400 to 1200 separate blocks comprised of photonic crystals and wherein the first and second surfaces extend substantially a height and width of the opening.

20. The method of claim 19 , further comprising:
filling each discrete sub-opening with a gaseous substance,
wherein each discrete sub-opening is gas tight.

Assignees

• Infineon Technologies Ag

Inventors

• Silvano De Sousa Jonathan
• Grille Thomas
• Hedenig Ursula
• Neidhart Thomas
• Irsigler Peter
• Rajaraman Vijaye Kumar

Classifications

• G01N21/3504

  for analysing gases, e.g. multi-gas analysis · CPC title

• G02B6/12004

  Combinations of two or more optical elements · CPC title

• G01K11/00

  Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 · CPC title

• G02B6/125

  Bends, branchings or intersections · CPC title

• G01N2201/062

  LED's · CPC title