Positioning measurement device and the method thereof

Patent metadata

Field	Value
Publication number	US-10243668-B2
Application number	US-201615395344-A
Country	US
Kind code	B2
Filing date	Dec 30, 2016
Priority date	Apr 27, 2016
Publication date	Mar 26, 2019
Grant date	Mar 26, 2019

Abstract

A positioning measurement device is provided. The device includes a light source, a grating, and plural light sensors. A periodic light field is generated by light emitted by the light source and passes through the grating to. The plural light sensors are periodically spaced. The light sensors are used to sense the periodic light field for generating a plurality of positioning measurement signals.

First claim

What is claimed is:

1. A positioning measurement device, comprising:
a light source;
a grating, wherein a periodic optical field is generated by light emitted by the light source and passing through the grating; and
a plurality of optical sensors, wherein the optical sensors are periodically spaced for sensing the periodic optical field to generate a plurality of positioning measurement signals,
wherein the plurality of optical sensors are periodically spaced by a sensing period P s , a relation between the sensing period P s and a period P g of the grating is expressed as: P s =P g ×(1+1/n A ), where n A is a positive integer.

2. The positioning measurement device according to claim 1 , wherein the grating is a transparent type grating while the light source and the optical sensors are disposed on two sides of the grating.

3. The positioning measurement device according to claim 1 , wherein the grating is a reflective type grating, and the light emitted by the light source is reflected by the grating to form the periodic optical field.

4. The positioning measurement device according to claim 1 , wherein there is a distance between the grating and the plurality of optical sensors, wherein the light emitted by the light source passes through the grating to form the periodic optical field at a plurality of locations of the plurality of optical sensors, and wherein the distance is related to a period of the grating and a light wavelength of the light source.

5. The positioning measurement device according to claim 1 , further comprising an image forming device disposed between the grating and the plurality of optical sensors, wherein the imaging forming device comprises a convex lens, wherein the light emitted by the light source passes through the grating and the imaging forming device to form the periodic optical field at a plurality of locations of the plurality of optical sensors.

6. The positioning measurement device according to claim 1 , wherein the plurality of optical sensors are aslant disposed relative to straight fringes of the periodic optical field.

7. The positioning measurement device according to claim 1 , wherein optical sensing sensitivities of the plurality of optical sensors are presented as a non-uniform distribution.

8. The positioning measurement device according to claim 1 , wherein each of the plurality of optical sensors comprises a first light sampling sensor and a second light sampling sensor, wherein the first light sampling sensor is used to generate one of the plural positioning measurement signals while the second light sampling sensor is used to generate another one of the plural positioning measurement signals.

9. The positioning measurement device according to claim 1 , wherein the plurality of optical sensors comprise a first optical sensor, a second optical sensor and a third optical sensor, which are arranged successively, wherein the first optical sensor comprises a first light sampling sensor and a second light sampling sensor while the third optical sensor comprises a third light sampling sensor and a fourth light sampling sensor, wherein the first light sampling sensor and the fourth light sampling sensor are used to generate one of the plural positioning measurement signals while the second light sampling sensor and the third light sampling sensor are used to generate another one of the plural positioning measurement signals.

10. The positioning measurement device according to claim 9 , a first distance between the first light sampling sensor and the fourth light sampling sensor is different from a second distance between the second light sampling sensor and the third light sampling sensor.

11. The positioning measurement device according to claim 9 , wherein the second optical sensor comprises a fourth light sampling sensor and a fifth light sampling sensor, and the first light sampling sensor, the second light sampling sensor, the fourth light sampling sensor, and the fifth light sampling sensor are arranged successively, wherein a first distance between the first light sampling sensor and the second light sampling sensor is different from a second distance between the second light sampling sensor and the fourth light sampling sensor.

12. A positioning measurement method, comprising:
generating a periodic optical field by light emitted by a light source and passing through a grating; and
sensing, by plural light sensors, the periodic light field for generating a plurality of positioning measurement signals, wherein the plural light sensors are periodically spaced,
wherein the plurality of optical sensors are periodically spaced by a sensing period P s , a relation between the sensing period P s and a period P g of the grating is expressed as: P s =P g ×(1+1/n A ), where n A is a positive integer.

13. The positioning measurement method according to claim 12 , wherein the grating is a transparent type grating while the light source and the optical sensors are disposed on two sides of the grating.

14. The positioning measurement method according to claim 12 , wherein the grating is a reflective type grating, and the light emitted by the light source is reflected by the grating to form the periodic optical field.

15. The positioning measurement method according to claim 12 , wherein there is a distance between the grating and the plurality of optical sensors, wherein the light emitted by the light source passes through the grating to form the periodic optical field at a plurality of locations of the plurality of optical sensors, and wherein the distance is related to a period of the grating and a light wavelength of the light source.

16. The positioning measurement method according to claim 12 , wherein the step of generating the periodic optical field further comprises:
providing an image forming device disposed between the grating and the plurality of optical sensors, wherein the imaging forming device comprises a convex lens, wherein the light emitted by the light source passes through the grating and the imaging forming device to form the periodic optical field at a plurality of locations of the plurality of optical sensors.

17. The positioning measurement method according to claim 12 , wherein the plurality of optical sensors are aslant disposed relative to straight fringes of the periodic optical field.

18. The positioning measurement method according to claim 12 , wherein optical sensing sensitivities of the plurality of optical sensors are presented as a non-uniform distribution.

19. The positioning measurement method according to claim 12 , wherein each of the plurality of optical sensors comprises a first light sampling sensor and a second light sampling sensor, wherein the first light sampling sensor is used to generate one of the plural positioning measurement signals while the second light sampling sensor is used to generate another one of the plural positioning measurement signals.

20. The positioning measurement method according to claim 12 , wherein the plurality of optical sensors comprise a first optical sensor, a second optical sensor and a third optical sensor, which are arranged successively, wherein the first optical sensor comprises a first light sampling sensor and a second light sampling sensor while the third optical sensor comprises a third light sampling sensor and a fourth light sampling sensor, wherein the first light sampling sensor and the fourth light sampling sensor are used to generate one of the plural positioning measurement signals while the se

Assignees

• Ind Tech Res Inst

Inventors

• Chen Chien-Wen
• Yang Fu-Cheng
• Yen Pei-Wen
• Dong Shu-Ping

Classifications

• G01D5/30

  the beams of light being detected by photocells · CPC title

• G01D5/347 Primary

  using displacement encoding scales · CPC title

• G01B11/02 Primary

  for measuring length, width or thickness (G01B11/08 takes precedence) · CPC title

• G01D5/285

  using a movable mirror · CPC title

• H04L7/0075

  with photonic or optical means · CPC title