Nanowire device having graphene top and bottom electrodes and method of making such a device

Patent metadata

Field	Value
Publication number	US-10243104-B2
Application number	US-201314371621-A
Country	US
Kind code	B2
Filing date	Jan 10, 2013
Priority date	Jan 10, 2012
Publication date	Mar 26, 2019
Grant date	Mar 26, 2019

Abstract

A composition of matter comprising a plurality of nanowires on a substrate, said nanowires having been grown epitaxially on said substrate in the presence of a metal catalyst such that a catalyst deposit is located at the top of at least some of said nanowires, wherein said nanowires comprise at least one group III-V compound or at least one group II-VI compound or comprises at least one non carbon group IV element; and wherein a graphitic layer is in contact with at least some of the catalyst deposits on top of said nanowires.

First claim

The invention claimed is:

1. A device, comprising:
a plurality of epitaxial nanowires on a substrate, the plurality of epitaxial nanowires having been grown epitaxially on the substrate in the presence of a metal catalyst such that a catalyst deposit is located at the top of at least some of the plurality of epitaxial nanowires,
wherein the plurality of epitaxial nanowires comprise at least one Group III-V compound;
wherein the substrate comprises graphene, graphane, or graphene oxide;
wherein the substrate has a thickness of 20 nm or less;
wherein the plurality of epitaxial nanowires have been grown in the [111] or [0001] direction; and
wherein a graphitic layer is in contact with at least some of the catalyst deposits on top of at least some of the plurality of epitaxial nanowires.

2. The device of claim 1 , wherein the plurality of epitaxial nanowires comprise AlAs, AlN, GaSb, GaP, GaN, GaAs, InP, InN, InGaAs, InGaN, InAs, AlGaAs, AlGaN, or AlInGaN.

3. The device of claim 1 , wherein the graphene, graphane, or graphene oxide comprises 10 or fewer atomic layers.

4. The device of claim 1 , wherein the substrate and/or the graphitic layer is a laminated substrate exfoliated from a Kish graphite, a highly ordered pyrolytic graphite, or CVD-grown graphene layers on metallic films or foils.

5. The device of claim 1 , wherein the substrate and/or the graphitic layer is a CVD-grown graphene layer on a Cu or Pt film.

6. The device of claim 1 , wherein the substrate and/or the graphitic layer is flexible and transparent.

7. The device of claim 1 , wherein the substrate's surface and/or the graphitic layer is modified with a plasma treatment with a gas of oxygen, hydrogen, NO, or their combinations.

8. The device of claim 1 , wherein the substrate's surface and/or the graphitic layer is modified by doping using a solution of FeCl 3 , AuCl 3 , or GaCl 3 .

9. The device of claim 1 , wherein the substrate's surface and/or the graphitic layer is doped by adsorption of organic or inorganic molecules.

10. The device of claim 9 , wherein the substrate's surface and/or the graphitic layer is doped by adsorption of metal-chlorides, NO 2 , HNO 3 , aromatic molecules, or ammonia.

11. The device of claim 9 , wherein the substrate's surface and/or the graphitic layer is doped by a substitutional doping method during its growth with incorporation of a dopant, wherein the dopant is B, N, S, or Si.

12. The device of claim 1 , wherein the plurality of epitaxial nanowires are no more than 500 nm in diameter and have a length of up to 5 μm.

13. The device of claim 1 , wherein the plurality of epitaxial nanowires are substantially parallel to each other.

14. The device of claim 1 , wherein the catalyst is Au or Ag.

15. The device of claim 1 , wherein the graphitic layer is graphene.

16. The device of claim 1 , wherein the graphitic layer is doped with doping ions and the plurality of epitaxial nanowires are doped with the same doping ions.

17. A process for the preparation of the device of claim 1 , comprising:
(I) providing Group III-V elements to a surface of the substrate using a molecular beam;
(II) epitaxially growing the plurality of epitaxial nanowires from the surface of the substrate in the presence of the metal catalyst such that the catalyst deposit remains on top of at least some of the plurality of epitaxial nanowires; and
(III) contacting the metal catalyst deposits with the graphitic layer such that the graphitic layer is in contact with at least some of the catalyst deposits on top of at least some of the plurality of epitaxial nanowires.

18. The process of claim 17 , wherein the substrate is coated with a hole-patterned mask.

19. The process of claim 18 , wherein the catalyst is introduced on to the substrate surface exposed via the hole pattern.

20. The process of claim 18 , wherein the hole-patterned mask comprises at least one insulating material chosen from SiO 2 , Si 3 N 4 , HfO 2 , or ANO deposited by e-beam evaporation, CVD, PE-CVD, sputtering, or ALD.

21. The process of claim 18 , wherein the surface of the substrate exposed through the hole pattern is modified with a plasma treatment with a gas of oxygen, hydrogen, NO 2 , or their combinations.

22. The process of claim 17 , wherein the graphitic layer is subjected to a post-annealing process.

Assignees

• Norwegian Univ Sci & Tech Ntnu
• Norwegian Univeresity Of Science And Tech Ntnu

Inventors

• Weman Helge
• Fimland Bjørn-Ove
• Kim Dong Chul

Classifications

• H10P14/3402

  characterised by the chemical composition · CPC title

• H10P14/3466

  Crystal orientation · CPC title

• H10P14/3462 Primary

  Nanowires · CPC title

• H10P14/3421

  Arsenides · CPC title

• H10P14/3206

  Carbon, e.g. diamond-like carbon · CPC title