Method for producing optoelectronic semiconductor devices and optoelectronic semiconductor device

Patent metadata

Field	Value
Publication number	US-10242974-B2
Application number	US-201515113749-A
Country	US
Kind code	B2
Filing date	Jan 21, 2015
Priority date	Jan 23, 2014
Publication date	Mar 26, 2019
Grant date	Mar 26, 2019

Abstract

A method for producing a plurality of optoelectronic semiconductor components ( 100 ) is provided, comprising the following steps: a) providing an auxiliary carrier ( 2 ); b) providing a plurality of semiconductor chips ( 10 ), wherein each of the semiconductor chips has a carrier body ( 12 ) and a semiconductor body ( 4 ) arranged on an upper side ( 22 ) of the carrier body; c) attaching the plurality of semiconductor chips on the auxiliary carrier, wherein the semiconductor chips are spaced apart from one another in a lateral direction (L) and wherein the semiconductor bodies are facing the auxiliary carrier, as seen from the carrier body; d) forming a scattering layer ( 18 ), at least in regions between the semiconductor bodies of adjacent semiconductor chips; e) forming a composite package ( 20 ); f) removing the auxiliary carrier ( 2 ); and g) individually separating the composite package into a plurality of optoelectronic semiconductor components ( 100 ).

First claim

The invention claimed is:

1. A method for producing a plurality of optoelectronic semiconductor devices, comprising the steps of:
a) providing an auxiliary carrier;
b) providing a plurality of semiconductor chips, wherein each of the semiconductor chips comprises a carrier body and a semiconductor body arranged on a top of the carrier body;
c) mounting the plurality of semiconductor chips on the auxiliary carrier, wherein the semiconductor chips are spaced from one another in a lateral direction, and wherein the semiconductor bodies face the auxiliary carrier when viewed from the carrier body;
d) forming a scattering layer at least in regions between the semiconductor bodies of adjacent semiconductor chips;
e) forming a package body composite, which is arranged at least in places between the carrier bodies of adjacent semiconductor chips, wherein the tops of the carrier bodies are at a smaller distance from the auxiliary carrier than is the package body composite;
f) removing the auxiliary carrier; and
g) singulating the package body composite into a plurality of optoelectronic semiconductor devices, wherein each semiconductor device comprises at least one semiconductor chip, a part of the scattering layer and a part of the package body composite as package body, wherein each of the semiconductor chips provided in step b) comprises a sacrificial layer, which is arranged on the top of the carrier body and covers a side of the semiconductor body remote from the carrier body, and wherein each of the sacrificial layers is removed prior to step g).

2. The method according to claim 1 , wherein a vertical distance between the tops of the carrier bodies and the package body composite is greater than 5 μm.

3. The method according to claim 1 , wherein the sacrificial layers each have a thickness of at least 20 μm.

4. The method according to claim 1 , wherein a conversion layer is formed after step f) and each of the semiconductor devices singulated in step g) comprises a part of the conversion layer.

5. The method according to claim 4 , wherein the conversion layer is formed by spray coating.

6. The method according to claim 1 , wherein after step f) a plurality of contacting elements is formed, which are each connected electrically conductively with at least one part of the semiconductor bodies and which project beyond the scattering layer in a vertical direction away from the carrier bodies.

7. The method according to claim 1 , wherein the semiconductor chips are covered over in step e) and the package body composite is subsequently thinned, such that the carrier bodies are exposed in places.

8. An optoelectronic semiconductor device comprising:
a semiconductor chip provided for generating and/or receiving radiation with a semiconductor body arranged on a top of a carrier body;
a package body which surrounds the carrier body of the semiconductor chip in places in a lateral direction, wherein the top of the carrier body is arranged in front of the package body when viewed in a vertical direction down towards the semiconductor body; and
a scattering layer which completely surrounds the semiconductor body in a lateral direction is arranged on the package, wherein the semiconductor device is produced according to the method of claim 1 .

9. An optoelectronic semiconductor device comprising:
a semiconductor chip provided for generating and/or receiving radiation with a semiconductor body arranged on a top of a carrier body;
a package body which surrounds the carrier body of the semiconductor chip in places in a lateral direction, wherein the top of the carrier body is arranged in front of the package body and the semiconductor body is arranged in front of the carrier body, when viewed in a vertical direction down towards the semiconductor body; and
a scattering layer which completely surrounds the semiconductor body in a lateral direction is arranged on the package body, wherein the semiconductor chip is configured to generate radiation by recombination of charge carriers in an active region of the semiconductor body when the semiconductor device is in operation, and wherein the package body is completely absorbent for the radiation generated by the semiconductor chip when the semiconductor device is in operation.

10. The optoelectronic semiconductor device according to claim 9 , wherein a vertical distance between the top of the carrier body and the package body is greater than 5 μm.

11. The optoelectronic semiconductor device according to claim 9 , wherein side faces of the package body are not covered by the scattering layer.

12. The optoelectronic semiconductor device according to claim 9 , wherein the scattering layer projects beyond the semiconductor body by at least 20 μm in a vertical direction away from the package body.

13. The optoelectronic semiconductor device according to claim 9 , which comprises a conversion layer, wherein the scattering layer surrounds the conversion layer in a lateral direction at least in places.

14. A method for producing a plurality of optoelectronic semiconductor devices, comprising the steps of:
a) providing an auxiliary carrier;
b) providing a plurality of semiconductor chips, wherein each of the semiconductor chips comprises a carrier body and a semiconductor body arranged on a top of the carrier body;
c) mounting the plurality of semiconductor chips on the auxiliary carrier, wherein the semiconductor chips are spaced from one another in a lateral direction and wherein the semiconductor bodies face the auxiliary carrier when viewed from the carrier body;
d) forming a scattering layer at least in regions between the semiconductor bodies of adjacent semiconductor chips;
e) forming a package body composite, which is arranged at least in places between the carrier bodies of adjacent semiconductor chips, wherein the tops of the carrier bodies are each located at a distance from the auxiliary carrier that is smaller than a shortest distance between the package body composite and the auxiliary carrier;
f) removing the auxiliary carrier; and
g) singulating the package body composite into a plurality of optoelectronic semiconductor devices, wherein each semiconductor device comprises at least one semiconductor chip, a part of the scattering layer and a part of the package body composite as package body, wherein each semiconductor chip is configured to generate radiation by recombination of charge carriers in an active region of the semiconductor body when the semiconductor device is in operation, and wherein the package body is completely absorbent for the radiation generated by the semiconductor chip when the semiconductor device is in operation.

Assignees

• Osram Opto Semiconductors Gmbh

Inventors

• Hoeppel Lutz
• Moosburger Juergen
• Ploessl Andreas
• Rode Patrick
• Nagel Peter
• Scholz Dominik

Classifications

• H10W72/0198

  batch processes · CPC title

• H10W90/00 Primary

  Package configurations · CPC title

• H01L2224/96

  Electricity · mapped topic

• H01L25/50

  Electricity · mapped topic

• H01L31/02327

  Electricity · mapped topic