Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member

Patent metadata

Field	Value
Publication number	US-10241062-B2
Application number	US-201414774367-A
Country	US
Kind code	B2
Filing date	Jan 22, 2014
Priority date	Mar 13, 2013
Publication date	Mar 26, 2019
Grant date	Mar 26, 2019

Abstract

The purpose of the present invention is to eliminate the effort in placement and extraction of samples in observations using transmitted charged particles. A charged particle beam device ( 601 ) is characterized by having: a charged particle optical lens tube that irradiates a sample ( 6 ) with a primary charged particle beam; a sample stage on which a light emitting member ( 500 ) that emits light because of charged particles that have come by transmission internally in the sample ( 6 ) or scattering therefrom or a sample platform ( 600 ) having the light emitting member ( 500 ) is attachably and detachably disposed; and a detector ( 503 ) that detects the light emitted by the light emitting member.

First claim

The invention claimed is:

1. A charged particle beam apparatus comprising:
a charged particle optical column that irradiates a sample with a primary charged particle beam;
a light-emitting member that is outside of the sample and disposed on a side of the sample opposite from the charged particle optical column and that transforms the primary charged particle beam transmitted through the sample or scattered in the sample into light and emits the light;
a sample stage on which a sample support that includes the light-emitting member is detachably arranged, wherein the light-emitting member is disposed between, and in contact with, the sample and the sample support, and the light-emitting member is disposed in a recess in an upper portion of the sample support such that an upper surface of the light-emitting member is coplanar with an upper surface of the sample support; and
a detector that detects the light emitted by the light-emitting member.

2. The charged particle beam apparatus according to claim 1 , further comprising:
a control unit that generates a transmission charged particle image of the sample in response to a signal from the detector.

3. The charged particle beam apparatus according to claim 1 , further comprising:
a case body that accommodates the sample,
wherein the detector is provided in at least one of the charged particle optical column and the case body.

4. The charged particle beam apparatus according to claim 1 ,
wherein the detector is a photomultiplier.

5. The charged particle beam apparatus according to claim 4 ,
wherein a light transmission path that delivers the light emitted by the light-emitting member is provided between the light-emitting member and the detector.

6. The charged particle beam apparatus according to claim 4 ,
wherein a light transmission path that delivers the light emitted by the light-emitting member is provided between the charged particle optical column and the sample, and
wherein the light transmission path includes a hole that is capable of allowing the primary charged particle beam to pass therethrough.

7. The charged particle beam apparatus according to claim 1 ,
wherein the detector is a semiconductor detector that is provided between the charged particle optical column and the sample.

8. A sample observation method for observing a sample by irradiation with a primary charged particle beam of a charged particle beam apparatus that includes a charged particle optical column that irradiates the sample with the primary charged particle beam; a light-emitting member that is outside of the sample and disposed on a side of the sample opposite from the charged particle optical column and that transforms the primary charged particle beam transmitted through the sample or scattered in the sample into light and emits the light; a sample stage on which a sample support that includes the light-emitting member is detachably arranged, wherein the light-emitting member is disposed between, and in contact with, the sample and the sample support, and the light-emitting member is disposed in a recess in an upper portion of the sample support such that an upper surface of the light-emitting member is coplanar with an upper surface of the sample support; and a detector that detects the light emitted by the light-emitting member, the method comprising:
a step of irradiating, with the charged particle beam, the sample that is arranged on the light-emitting member, which forms at least a part of the sample support and emits light by charged particles that have been transmitted through or scattered in the sample, directly or via a predetermined member; and
a step of obtaining a charged particle beam microscope image by detecting the light that is emitted by the light-emitting member and is directed to an outside of the sample support.

9. The sample observation method according to claim 8 ,
wherein the sample is a biological sample, and
the method further comprises:
a step of arranging the sample on the light-emitting member directly or via a predetermined member by at least
a step of arranging a culture medium that includes a nutritional material in a form of solid, liquid, or gas on the light-emitting member along with the sample, and
a step of culturing or cultivating the sample on the light-emitting member.

10. The sample observation method according to claim 8 , further comprising:
a step of arranging the sample on the light-emitting member directly or via a predetermined member by at least
a step of arranging the sample in a liquid, and
a step of causing the liquid to adhere to the light-emitting member.

11. The sample observation method according to claim 8 , further comprising:
a step of arranging the sample on the light-emitting member directly or via a predetermined member by at least
a step of splitting the sample into pieces, and
a step of mounting a split piece of the sample to the light-emitting member.

12. A sample support to which a sample to be observed by irradiation with a charged particle beam is mounted, comprising:
a light-emitting member that forms at least a part of the sample support, is outside of the sample and disposed on a side of the sample opposite from a charged particle optical column that irradiates the sample with a primary charged particle beam, and transforms the primary charged particle beam transmitted through or scattered in the sample into light and emits the light,
wherein the sample support is detachably arranged on a sample stage,
wherein the light-emitting member is disposed between, and in contact with, the sample and the sample support, and the light-emitting member is disposed in a recess in an upper portion of the sample support such that an upper surface of the light-emitting member is coplanar with an upper surface of the sample support, and
wherein the light emitted by the light-emitting member is directed to the outside of the sample support.

13. The sample support according to claim 12 ,
wherein the sample is arranged on the light-emitting member directly or via a predetermined member.

14. The sample support according to claim 12 ,
wherein the light emitted by the light-emitting member is in a specific or arbitrary wavelength region among those of visible light, ultraviolet light, and infrared light.

15. The sample support according to claim 12 , further comprising:
a reflective material that reflects the light generated by the light-emitting member.

16. The sample support according to claim 12 ,
wherein the sample support includes at least a portion with a concave shape, and the sample is arranged in a concavity of the concave shape.

17. The sample support according to claim 12 , further comprising:
an electrification prevention member that is provided on a surface on which the sample is placed in order to prevent electrification of the sample.

18. The sample support according to claim 12 ,
wherein the surface on which the sample is placed is coated with a material for enhancing adhesiveness between the sample support and the sample.

19. The sample support according to claim 18 ,
wherein the material for enhancing the adhesiveness between the sample support and the sample is a molecule in a positively charged state.

20. An observation system comprising:
a charged particle optical column that irradiates a sample with a primary charged particle beam;
a light-emitting member that is disposed on a side of the sample opposite from the charged particle optical column and tha

Assignees

• Hitachi High Tech Corp

Inventors

• Ominami Yusuke
• Sato Mitsugu
• Uchida Kenko
• Aso Sadamitsu
• Sakazume Taku
• Morishita Hideo
• Ito Sukehiro
• Ohshima Takashi

Classifications

• G01N23/2204

  Specimen supports therefor; Sample conveying means therefore · CPC title

• G01N23/2251 Primary

  using incident electron beams, e.g. scanning electron microscopy [SEM] · CPC title

• H01J2237/2443

  Scintillation detectors · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2445

  Photon detectors for X-rays, light, e.g. photomultipliers · CPC title