Method for manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-10236408-B2
Application number	US-201715687855-A
Country	US
Kind code	B2
Filing date	Aug 28, 2017
Priority date	Aug 31, 2016
Publication date	Mar 19, 2019
Grant date	Mar 19, 2019

Abstract

The yield of a manufacturing process of a semiconductor device is increased. The productivity of a semiconductor device is increased. A first material layer is formed over a substrate, a second material layer is formed over the first material layer, and the first material layer and the second material layer are separated from each other, so that a semiconductor device is manufactured. In addition, a stack including the first material layer and the second material layer is preferably heated before the separation. The first material layer includes one or more of hydrogen, oxygen, and water. The first material layer includes a metal oxide, for example. The second material layer includes a resin (e.g., polyimide or acrylic). The first material layer and the second material layer are separated from each other by cutting a hydrogen bond. The first material layer and the second material layer are separated from each other in such a manner that water separated out by heat treatment at an interface between the first material layer and the second material layer or in the vicinity of the interface is irradiated with light.

First claim

The invention claimed is:

1. A method for manufacturing a semiconductor device comprising the steps of:
forming a first material layer over a substrate;
forming a second material layer over the first material layer; and
separating the first material layer and the second material layer from each other,
wherein the first material layer comprises one or more of hydrogen, oxygen, and water,
wherein the second material layer comprises a resin,
wherein the first material layer and the second material layer are separated by cutting a hydrogen bond,
wherein the hydrogen bond is cut by irradiation with the light, and
wherein liquid is fed to a separation interface in the step of separating the first material layer and the second material layer.

2. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the first material layer and the second material layer are separated from each other at an interface between the first material layer and the second material layer or in a vicinity of the interface by cutting the hydrogen bond.

3. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the first material layer and the second material layer are separated from each other with laser light.

4. The method for manufacturing a semiconductor device, according to claim 3 ,
wherein the hydrogen bond is cut by irradiating an interface between the first material layer and the second material layer or a vicinity of the interface with the laser light.

5. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the irradiation with the light is performed so that the light is in a wavelength range of greater than or equal to 180 nm to less than or equal to 450 nm.

6. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the irradiation with the light is performed at an energy density of greater than or equal to 300 mJ/cm 2 and less than or equal to 360 mJ/cm 2 .

7. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the first material layer is formed so that adhesion between the first material layer and the second material layer is lower than adhesion between the first material layer and the substrate.

8. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the first material layer is formed to comprise one or more of titanium, molybdenum, aluminum, tungsten, silicon, indium, zinc, gallium, tantalum, and tin.

9. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the second material layer is formed to comprise a region with a thickness of greater than or equal to 0.1 μm and less than or equal to 5 μm.

10. The method for manufacturing a semiconductor device, according to claim 1 ,
wherein the second material layer is formed to comprise a residue of a compound represented by Structural formula (100):

11. A method for manufacturing a semiconductor device comprising the steps of:
forming a first material layer over a substrate;
forming a second material layer over the first material layer;
heating a stack comprising the first material layer and the second material layer; and
separating the first material layer and the second material layer from each other,
wherein the first material layer comprises one or more of hydrogen, oxygen, and water,
wherein the second material layer comprises a resin,
wherein water is separated out at an interface between the first material layer and the second material layer or in a vicinity of the interface in the step of heating the stack, and
wherein the first material layer and the second material layer are separated by irradiating the water at the interface or in the vicinity of the interface with light in the step of separating.

12. The method for manufacturing a semiconductor device, according to claim 11 ,
wherein the irradiation is performed so that the light is in a wavelength range of greater than or equal to 180 nm to less than or equal to 450 nm.

13. The method for manufacturing a semiconductor device, according to claim 11 ,
wherein the irradiation with the light is performed at an energy density of greater than or equal to 300 mJ/cm 2 and less than or equal to 360 mJ/cm 2 .

14. The method for manufacturing a semiconductor device, according to claim 11 ,
wherein the first material layer is formed so that adhesion between the first material layer and the second material layer is lower than adhesion between the first material layer and the substrate.

15. The method for manufacturing a semiconductor device, according to claim 11 ,
wherein the first material layer is formed to comprise one or more of titanium, molybdenum, aluminum, tungsten, silicon, indium, zinc, gallium, tantalum, and tin.

16. The method for manufacturing a semiconductor device, according to claim 11 ,
wherein the second material layer is formed to comprise a region with a thickness of greater than or equal to 0.1 μm and less than or equal to 5 μm.

17. The method for manufacturing a semiconductor device, according to claim 11 ,
wherein the second material layer is formed to comprise a residue of a compound represented by Structural formula (100):

18. The method for manufacturing a semiconductor device, according to claim 11 ,
wherein liquid is fed to a separation interface in the step of separating the first material layer and the second material layer.

19. A method for manufacturing a semiconductor device comprising the steps of:
forming a metal oxide layer over a substrate;
forming a resin layer over the metal oxide layer to comprise a region with a thickness of greater than or equal to 0.1 μm and less than or equal to 5 μm;
forming a transistor comprising a metal oxide in a channel formation region over the resin layer; and
separating the metal oxide layer and the resin layer by irradiation with light,
wherein liquid is fed to a separation interface in the step of separating the metal oxide layer and the resin layer.

20. The method for manufacturing a semiconductor device, according to claim 19 , wherein the metal oxide layer is formed by forming a metal layer over the substrate and performing plasma treatment on a surface of the metal layer.

21. The method for manufacturing a semiconductor device, according to claim 20 , wherein the surface of the metal layer is exposed to an atmosphere comprising one or both of oxygen and water vapor in the plasma treatment.

22. The method for manufacturing a semiconductor device, according to claim 19 ,
wherein the resin layer is formed to have an average transmittance of light in a wavelength range of greater than or equal to 450 nm to less than or equal to 700 nm of 70% or higher.

23. The method for manufacturing a semiconductor device, according to claim 20 ,
wherein an interface between the metal oxide layer and the resin layer or a vicinity of the interface is irradiated with linear laser light from a substrate side.

Assignees

• Semiconductor Energy Lab

Inventors

• Yamazaki Shunpei
• Sato Masataka
• Ikezawa Naoki
• Yanaka Junpei
• Idojiri Satoru

Classifications

• H10P72/7442

  Separation by peeling · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10P14/6536 Primary

  by exposure to radiation, e.g. visible light · CPC title

• H10P14/3822

  Controlling the interface between substrate and epitaxial layer, e.g. by ion implantation followed by annealing · CPC title

• H10P14/3238

  being insulating materials · CPC title