Quantum dot film based demodulation structures

Patent metadata

Field	Value
Publication number	US-10236400-B2
Application number	US-201715419273-A
Country	US
Kind code	B2
Filing date	Jan 30, 2017
Priority date	Feb 1, 2016
Publication date	Mar 19, 2019
Grant date	Mar 19, 2019

Abstract

The present disclosure describes quantum dot film based demodulation structures and optical ranging systems including an array of QDF demodulation structures.

First claim

What is claimed is:

1. A device comprising:
a demodulation pixel including:
a quantum dot film (QDF) photo detection element on a semiconductor substrate, wherein the QDF is embedded between first and second electrically conductive contacts and is operable to convert photons to photo-generated charge; and
a charge collection node to store the photo-generated charge.

2. The device of claim 1 including a readout circuit operable to read out the stored photo-generated charge from the charge collection node.

3. The device of claim 2 including a reset switch operable to couple and decouple the read out circuit from the charge collection node.

4. The device of claim 1 wherein a particular one of the contacts is coupled to a capacitor.

5. The device of claim 1 wherein a particular one of the contacts is coupled to a pinned photodiode.

6. The device of claim 5 including a plurality of switches operable, respectively, to couple the particular one of the contacts to a particular one of a plurality of charge collection nodes.

7. The device of claim 5 wherein the pinned photodiode comprises:
a semiconductor substrate;
a first region in the semiconductor substrate having a first-type dopant over a second region having a second-type dopant opposite that of the first-type dopant;
a node in the semiconductor substrate having the second-type dopant and providing direct electrical connection to the particular one of the contacts of the QDF.

8. The device of claim 7 wherein the second region of the pinned photodiode extends laterally, along a first axis, beyond a boundary of the first region and also extends laterally, along a second axis perpendicular to the first axis, beyond the boundary of the first region.

9. The device of claim 8 wherein the node of the pinned photodiode extends laterally, along the second axis, beyond the boundary of the second region.

10. The device of claim 7 wherein the first-type dopant is P type, and the second-type dopant is N type.

11. The device of claim 1 operable to receive a modulated signal at a particular one of the contacts.

12. The device of claim 1 further including a charge amplifier having first and second input terminals, wherein a particular one of the contacts is selectively operable to be coupled to the first or second input terminal, the charge amplifier having first and second output terminals, wherein a first capacitive element for charge storage is coupled between a first one of the input terminals and a first one of the output terminals, and wherein a second capacitive element for charge storage is coupled between a second one of the input terminals and a second one of the output terminals.

13. The device of claim 12 including a first switch and a second switch each of which is operable to receive a respective modulation signal so as to electrically couple the particular one of the contacts to only one of the first or second input terminals at a time.

14. The device of claim 12 further including a second charge amplifier having third and fourth input terminals, wherein the particular one of the contacts is selectively operable to be coupled to the third or fourth input terminal, the charge amplifier having third and fourth output terminals, wherein a third capacitive element for charge storage is coupled between a first one of the input terminals and a first one of the output terminals of the second charge amplifier, and wherein a fourth capacitive element for charge storage is coupled between a second one of the input terminals and a second one of the output terminals of the second charge amplifier.

15. The device of claim 1 wherein the QDF photo detection element comprises a plurality of QDFs.

16. The device of claim 15 wherein the plurality of QDFs include a first group of QDFs and a second group of QDFs, wherein the first and second groups of QDFS are operable to be activated at different times from one another.

17. The device of claim 16 wherein the first group of QDFs is coupled to a first charge storage element and the second group of QDFs is coupled to a second charge storage element.

18. The device of claim 16 wherein the first group of QDFs is coupled to a first pinned photodiode and the second group of QDFs is coupled to a second pinned photodiode.

19. The device of claim 15 wherein a first one of the QDFs is coupled to a first transistor and a second one of the QDFs is coupled to a second transistor, wherein the first and second transistors have their respective gates at a same bias potential as one another.

20. The device of claim 1 wherein the demodulation pixel includes a top electrode and two bottom electrodes, and is selectively operable as a two-tap demodulation pixel or as a four-tap demodulation pixel.

21. The device of claim 1 wherein the QDF includes a multi-modal distribution of quantum dot diameters.

22. The device of claim 21 wherein quantum dots having a first size are optimized for collection of light having a first wavelength, and quantum dots having a second size are optimized for collection of light having a second wavelength.

Assignees

• Heptagon Micro Optics Pte Ltd

Inventors

• Furrer Daniel
• Beer Stephan
• Buettgen Bernhard

Classifications

• G01S7/4816

  of receivers alone · CPC title

• G01S7/4914

  of detector arrays, e.g. charge-transfer gates · CPC title

• G01S7/4915

  Time delay measurement, e.g. operational details for pixel components (signal extraction and conditioning G01S7/493); Phase measurement · CPC title

• G01S17/36

  with phase comparison between the received signal and the contemporaneously transmitted signal · CPC title

• G01S17/894

  Three-dimensional [3D] imaging with simultaneous measurement of time-of-flight at a two-dimensional [2D] array of receiver pixels, e.g. time-of-flight cameras or flash lidar · CPC title