Method, apparatus and system for a high density middle of line flow

Patent metadata

Field	Value
Publication number	US-10236350-B2
Application number	US-201615067540-A
Country	US
Kind code	B2
Filing date	Mar 11, 2016
Priority date	Mar 11, 2016
Publication date	Mar 19, 2019
Grant date	Mar 19, 2019

Abstract

At least one method, apparatus and system disclosed herein for forming a finFET device. A gate structure comprising a gate spacer on a semiconductor wafer is formed. A self-aligned contact (SAC) cap is formed over the gate structure. A TS structure is formed. At least one M0 metal structure void is formed. At least one CB structure void adjacent the M0 metal structure void is formed. An etch process is performed the M0 and CB structures voids to the gate structure. At least one CA structure void adjacent the CB structure void is formed. The M0, CB, and CA structure voids are metallized.

First claim

What is claimed is:

1. A method for forming a finFET device, comprising:
forming a gate structure comprising a gate spacer on a semiconductor wafer;
forming a self-aligned contact (SAC) cap over said gate structure;
forming a trench silicide (TS) structure;
forming at least one first (M 0 ) metal structure void;
forming at least one first contact (CB) structure void adjacent said M 0 metal structure void;
etching below said M 0 and CB structures voids to the gate structure;
forming at least one second contact (CA) structure void adjacent said CB structure void;
and

metallizing said M 0 , CB, and CA structure voids;
wherein forming said TS structure comprises:
depositing a lithography stack in the location for said TS structure;
performing an etch process for removing an SiO2 oxide portion and exposing a sidewall of said gate structure;
removing said lithography stack;
depositing an SiOC material on said location for said TS structure;
performing a CMP process over said SiOC material;
performing an etch process for removing SiO 2 material selective to said SiOC material;
performing an etch process on said location for said TS structure for forming a TS structure void;
removing sidewall and bottom material from said TS structure void; and
performing a metallization process to form said TS structure.

2. The method of claim 1 , wherein forming said SAC cap over said gate structure comprises forming a T-shaped SAC cap over said gate structure, comprising: removing a top portion of the gate spacer; and replacing the top portion by deposing a nitride material.

3. The method of claim 1 , wherein removing said top portion of the gate spacer comprises performing an SiOC isotropic etch process.

4. The method of claim 1 , wherein performing said metallization process to form said TS structure comprises: depositing a first metal liner in said TS structure void; depositing a Ti-nitride material in said TS structure void; and depositing a tungsten material in said structure void.

5. The method of claim 1 , wherein forming said at least one M 0 metal structure void comprises:
depositing a dielectric layer;
depositing a titanium-nitride (TiN) layer over said dielectric layer
depositing a memorization layer over said TiN layer;
depositing a first lithography stack above said memorization layer;
patterning a first M 0 metal structure;
performing an etch process to transfer said first M 0 structure into said memorization layer;
removing said first lithography stack
depositing a second lithography stack above said memorization layer;
patterning a second M 0 structure;
performing an etch process to transfer said second M 0 metal structure into said memorization layer; and
removing said second lithography stack;
performing at least one of an etch or punch process on said first and second M 0 metal structures through the TiN layer to form a first M 0 metal structure void and a second M 0 metal structure void.

6. The method of claim 5 , wherein performing said punch process comprises removing all materials within the patterned areas of said first and second M 0 metal structures down to the dielectric layer.

7. The method of claim 1 , wherein forming said at least one CB structure void comprises:
depositing a dielectric layer;
depositing an etch-stop layer over said dielectric layer;
depositing a memorization layer over said etch-stop layer;
depositing a first lithography stack above said memorization layer;
patterning a first CB structure;
performing a memorization process for said first CB structure into said memorization layer;
removing said first lithography stack;
depositing a second lithography stack above said memorization layer;
patterning a second CB structure;
performing a memorization process for said second CB structure into said memorization layer;
removing said second lithography stack; and
performing at least one of an etch or punch process on said first and second CB structures
through the etch stop layer to form a first CB structure void and a second CB structure void.

8. The method of claim 7 , wherein depositing said first and second lithography stacks each comprise depositing an organic planarization layer and depositing a photoresist layer above said organic planarization layer.

9. The method of claim 7 , further comprising etching said CB and M 0 structure voids down to said gate structure such that said CB and M 0 structure voids are merged.

10. The method of claim 1 , wherein forming said at least one CB structure comprises forming said at least one CB structure to self-align into said at least one M 0 metal structure.

11. The method of claim 1 , wherein forming at least one CA structure void comprises:
depositing a light-absorbing organic mix layer;
depositing a first lithography stack above said organic mix layer;
patterning a first CA structure;
removing said first lithography stack;
depositing a second lithography stack above said organic mix layer;
patterning a second CA structure;
removing said second lithography stack; and
performing a punch process on said first and second CA structures to form a first CA structure
void and a second CA structure void.

12. The method of claim 11 , further comprising:
depositing a memorization layer over said organic mix layer;
performing a memorization process for said first CA structure on said memorization layer; and
performing a memorization process for said second CA structure on said memorization layer.

13. The method of claim 1 , further comprising providing a functional cell having cross coupled devices.

14. A method for forming a finFET device, comprising:
forming a gate structure comprising a gate spacer on a semiconductor wafer;
removing a top portion of the gate spacer;
replacing the top portion by deposing a nitride material;
forming a borderless trench silicide (TS) structure;
forming at least one first (M 0 ) metal structure void;
forming at least one first contact (CB) structure void adjacent said M 0 metal structure void;
etching below said M 0 and CB structures voids to the gate structure such that said CB and M 0 structure voids are merged;
forming at least one second contact (CA) structure void adjacent said CB structure void; and
performing metal filling in said M 0 , CB, and CA structure voids for forming a functional cell having cross couple.

15. The method of claim 14 , further comprising performing a chemical mechanical polishing (CMP) process upon said nitride material to form a T-shaped self-aligned contact (SAC) cap over said gate structure.

16. The method of claim 14 , wherein:
forming at least one CB structure void comprises performing CB double patterning process;
forming at least one M 0 structure void comprises performing M 0 double patterning process;
and
forming at least one CA structure void comprises performing CA double patterning process.

17. A system, comprising:
a semiconductor device processing system to manufacture a semiconductor device comprising at least one fin field effect transistor (finFET); and
a processing controller operatively coupled to said semiconductor device processing system, said processing controller configured to control an operation of said semiconductor device processing system;
wherein said semiconductor device processing system is adapted to:
form a gate structure comprising a gate spacer on a semiconductor wafer;
form a self-aligned contact (SAC) cap over said gate structure;
form a TS structure;
form at least one M 0 metal str

Assignees

• Globalfoundries Inc

Inventors

• Bouche Guillaume
• Neogi Tuhin Guha
• Raghunathan Sudharshanan
• Wei Andy Chi-Hung
• Stephens Jason Eugene
• Chauhan Vikrant Kumar
• Permana David Michael

Classifications

• H10P95/064

  the removal being chemical etching · CPC title

• H10P76/204

  of organic photoresist masks · CPC title

• H10P50/283

  by chemical means · CPC title

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6922

  the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC · CPC title