Method of producing an electronic device with a graphene device and semiconductor device formed on a common semiconductor substrate

Patent metadata

Field	Value
Publication number	US-10236347-B2
Application number	US-201715664578-A
Country	US
Kind code	B2
Filing date	Jul 31, 2017
Priority date	Aug 8, 2016
Publication date	Mar 19, 2019
Grant date	Mar 19, 2019

Abstract

A method for producing an electronic device involves forming a graphene precursor on a first portion of a common semiconductor substrate, forming a graphene layer on the graphene precursor, and forming a semiconductor device on a second portion of the common semiconductor substrate.

First claim

What is claimed is:

1. A method for producing an electronic device, the method comprising:
forming a graphene precursor on a first portion of a common semiconductor substrate;
forming a graphene layer on the graphene precursor;
forming a semiconductor device on a second portion of the common semiconductor substrate;
forming the graphene precursor on a third portion of the common semiconductor substrate;
forming an additional graphene layer on the graphene precursor on the third portion of the common semiconductor substrate;
forming source and drain contacts on the additional graphene layer; and
electrically coupling one of the source and drain contacts to the graphene layer on the first portion of the common semiconductor substrate,
wherein the graphene layer is an antenna and the forming of the graphene layer comprises forming the graphene layer into an antenna pattern, and
wherein prior to forming the graphene precursor on the first portion of the common semiconductor substrate, the method further comprises:
forming a masking layer on the common semiconductor substrate;
patterning the masking layer to form an opening in the first portion of the common semiconductor substrate.

2. The method of claim 1 , wherein the forming of the masking layer comprises:
growing a silicon dioxide mask on the common semiconductor substrate using thermal oxidation.

3. The method of claim 1 , wherein the forming of the graphene layer from the graphene precursor comprises growing graphene on the graphene precursor by annealing the graphene precursor.

4. The method of claim 1 , wherein the forming of the semiconductor device comprises:
doping the common semiconductor substrate to form a source and drain; and
forming a gate on the common semiconductor substrate.

5. The method of claim 1 , further comprising:
forming antenna contacts on the graphene layer.

6. The method of claim 1 , wherein the graphene precursor is silicon carbide (SiC).

7. The method of claim 6 , wherein forming the silicon carbide (SiC) comprises:
exposing the first portion of the common semiconductor substrate to a flux of an acetylene or carbon beam.

8. The method of claim 6 , wherein the silicon carbide (SiC) is formed in an epitaxial process involving one of methane and propane, and silane in a hydrogen atmosphere.

9. A method for producing an electronic device, the method comprising:
selectively forming a graphene precursor on a first portion of a common semiconductor substrate;
forming a graphene layer on the graphene precursor;
forming a semiconductor device on a second portion of the common semiconductor substrate;
forming the graphene precursor on a third portion of the common semiconductor substrate;
forming an additional graphene layer on the graphene precursor on the third portion of the common semiconductor substrate;
forming source and drain contacts on the additional graphene layer; and
electrically coupling one of the source and drain contacts to the graphene layer on the first portion of the common semiconductor substrate,
wherein the graphene layer forms an antenna and the graphene precursor is selectively formed into a pattern of the antenna.

10. A method for producing an electronic device, the method comprising:
forming a masking layer on the common semiconductor substrate;
patterning the masking layer to form an opening in the first portion of the common semiconductor substrate;
forming a graphene precursor on a first portion of a common semiconductor substrate;
forming a graphene layer on the graphene precursor;
forming a semiconductor device on a second portion of the common semiconductor substrate;
forming the graphene precursor on a third portion of the common semiconductor substrate;
forming an additional graphene layer on the graphene precursor on the third portion of the common semiconductor substrate;
forming source and drain contacts on the additional graphene layer; and
electrically coupling one of the source and drain contacts to the graphene layer on the first portion of the common semiconductor substrate.

Assignees

• Univ King Abdullah Sci & Tech

Inventors

• Hussain Aftab Mustansir

Classifications

• H10P14/3406

  Carbon, e.g. diamond-like carbon · CPC title

• H10P14/3208

  Silicon carbide · CPC title

• H10P14/2905

  Silicon, silicon germanium or germanium · CPC title

• H10P14/271

  characterised by the preparation of substrate for selective deposition · CPC title

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title