Ionization device with mass spectrometer therewith

Patent metadata

Field	Value
Publication number	US-10236169-B2
Application number	US-201715617819-A
Country	US
Kind code	B2
Filing date	Jun 8, 2017
Priority date	Dec 16, 2014
Publication date	Mar 19, 2019
Grant date	Mar 19, 2019

Abstract

An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.

First claim

What is claimed is:

1. An ionization device, comprising:
a plasma generating device configured to generate a species in a primary plasma region;
a field generating device configured to generate a glow discharge in a secondary plasma region;
a first inlet configured to supply a gas to be ionized into the secondary plasma region;
a second inlet configured to supply the species into the secondary plasma region; and
a first outlet configured to discharge the ionized gas from the ionization device,
wherein:
the species comprises at least one member selected from the group consisting of metastable particles of an ionization gas and ions of the ionization gas; and
the first inlet, the secondary plasma region and the first outlet are arranged along a line of sight.

2. The ionization device of claim 1 , wherein the field generating device is configured to generate an electric field between the first and second inlets to generate the glow discharge in the secondary plasma region.

3. The ionization device of claim 2 , wherein, to generate the electric field, the field generating device comprises a voltage source, a first electrode and a second electrode.

4. The ionization device of claim 3 , wherein the first inlet defines the first electrode, and the second inlet defines the second electrode.

5. The ionization device of claim 3 , wherein the voltage source is configured to generate a voltage of between 50 V and 5000 V between the first and second electrodes.

6. The ionization device of claim 1 , wherein the field generating device is configured to generate a further electric field between the second inlet and the first outlet.

7. The ionization device of claim 6 , wherein the first outlet defines an electrode configured to generate the further electric field.

8. The ionization device of claim 1 , further comprising a pump comprising a second outlet configured to pump at least one member out of the secondary plasma region, wherein the at least one member is selected from the group consisting of the gas to be ionized and the species.

9. The ionization device of claim 8 , wherein the second inlet and the second outlet are arranged along a line of sight.

10. The ionization device of claim 1 , wherein the field generating device is configured to generate a magnetic field in the secondary plasma region.

11. The ionization device of claim 1 , wherein the field generating device is configured to generate a time dependent magnetic field in the secondary plasma region.

12. The ionization device of claim 1 , wherein:
the field generating device is configured to generate a magnetic field aligned along a line; and
one of the following holds:
the ionization device further comprises an outlet configured to discharge the ionized gas from the ionization device, and the inlet, the secondary plasma region and the outlet are also arranged along the line of sight; and
the ionization device further comprises a pump comprising an outlet configured to pump at least one member out of the secondary plasma region, the at least one member is selected from the group consisting of the gas to be ionized and the species, and the second inlet and the outlet are also arranged along the line of sight.

13. The ionization device of claim 1 , further comprising a chamber between a primary inlet of the ionization device and the first inlet to treat the gas to be ionized prior to supplying the gas to be ionized into the secondary plasma region.

14. The ionization device of claim 1 , wherein the ionization device is configured so that, during use of the ionization device, a pressure in the primary plasma region is greater than a pressure in the secondary plasma region.

15. The ionization device of claim 14 , wherein at least one of the following holds:
the pressure in the primary plasma region is between 100 mbar and 1000 mbar; and
the pressure in the secondary plasma region is between 0.5 mbar and 10 mbar.

16. The ionization device of claim 1 , wherein the ionization gas comprises a noble gas.

17. The ionization device of claim 1 , wherein the plasma generating device is selected from the group consisting of a corona discharge plasma generating device and dielectric barrier discharge plasma generating device.

18. A mass spectrometer, comprising:
an ionization device according to claim 1 ; and
a detector downstream of the first outlet,
wherein the mass spectrometer is configured to mass-spectrometrically analyze the ionized gas.

19. An ionization device, comprising:
a plasma generating device configured to generate a species in a primary plasma region;
a field generating device configured to generate a glow discharge in a secondary plasma region;
a first inlet configured to supply a gas to be ionized into the secondary plasma region;
a second inlet configured to supply the species into the secondary plasma region; and
a pump comprising a second outlet configured to pump at least one member out of the secondary plasma region,
wherein:
the species comprises at least one member selected from the group consisting of metastable particles of an ionization gas and ions of the ionization gas;
the at least one member is selected from the group consisting of the gas to be ionized and the species; and
the second inlet and the second outlet are arranged along a line of sight.

20. A mass spectrometer, comprising:
an ionization device according to claim 19 ; and
a detector downstream of the first outlet,
wherein the mass spectrometer is configured to mass-spectrometrically analyze the ionized gas.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Aliman Michel
• Chung Hin Yiu Anthony
• Fedosenko Gennady
• Reuter Ruediger
• Laue Alexander
• Von Keudell Achim
• Boeke Marc
• Benter Thorsten
• Winter Joerg
• Awakowicz Peter
• Gorkhover Leonid

Classifications

• H01J27/08 Primary

  using arc discharge · CPC title

• H01J49/12 Primary

  using an arc discharge, e.g. of the duoplasmatron type · CPC title

• H01J37/08

  Ion sources; Ion guns · CPC title

• H01J49/145 Primary

  using chemical ionisation · CPC title