Residual gas analyser, and EUV lithography system having a residual gas analyser
US-12573604-B2 · Mar 10, 2026 · US
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Benter Thorsten patents
Benter Thorsten is listed as an inventor on 14 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Benter Thorsten |
| Total patents | 14 |
| First publication | Jan 5, 2016 |
| Latest publication | Mar 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Residual gas analyser, projection exposure apparatus comprising a residual gas analyser and method of residual gas analysis
US-2025174452-A1 · May 29, 2025 · US
Residual gas analyser, projection exposure apparatus comprising a residual gas analyser and method of residual gas analysis
US-2025166983-A1 · May 22, 2025 · US
Holding device for at least one filament and mass spectrometer
US-12278100-B2 · Apr 15, 2025 · US
Ionization device and mass spectrometer
US-12176199-B2 · Dec 24, 2024 · US
Mass spectrometer and method for analysing a gas by mass spectrometry
US-11791147-B2 · Oct 17, 2023 · US
Residual gas analyser, and euv lithography system having a residual gas analyser
US-2023162967-A1 · May 25, 2023 · US
Holding device for at least one filament and mass spectrometer
US-2023084351-A1 · Mar 16, 2023 · US
Ionization device and mass spectrometer
US-2022230865-A1 · Jul 21, 2022 · US
Mass spectrometer and method for analysing a gas by mass spectrometry
US-2022005682-A1 · Jan 6, 2022 · US
Recent patents
Latest publications not already listed above.
Ionization device with mass spectrometer therewith
US-10236169-B2 · Mar 19, 2019 · US
Ionization device with mass spectrometer therewith
US-2017278690-A1 · Sep 28, 2017 · US
Method and device to increase the internal energy of ions in mass spectrometers
US-9324548-B1 · Apr 26, 2016 · US
Chemical ionization with reactant ion formation at atmospheric pressure in a mass spectrometer
US-9228926-B2 · Jan 5, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Leybold Gmbh | 6 |
| Zeiss Carl Smt Gmbh | 6 |
| Bruker Daltonik Gmbh | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J49/24 | 5 |
| H01J49/147 | 4 |
| G03F7/7085 | 4 |
| H01J49/0422 | 4 |
| H01J49/401 | 3 |