Charged particle beam device and overlay misalignment measurement method
US-9224575-B2 · Dec 29, 2015 · US
US10234282B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10234282-B2 |
| Application number | US-201715643344-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 6, 2017 |
| Priority date | Jul 7, 2016 |
| Publication date | Mar 19, 2019 |
| Grant date | Mar 19, 2019 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
The present invention refers to a method for determining a position of a divergent radiation source ( 1 ), comprising Irradiating a pixel detector ( 2 ) with a predetermined intensity distribution of radiation with wavelength λ originated from the radiation source ( 1 ), wherein the pixel detector ( 2 ) comprises a plurality of pixels with pixel coordinates (x i , y i , z i ); Detecting, for each of the plurality of pixels, an intensity of the incident radiation ( 10 ); Determining, for each of the plurality of pixels, an incidence direction of the incident radiation using information on an orientation of an internal periodic structure at the pixel and the predetermined intensity distribution, wavelength λ and the detected intensity; and Determining the position (x p , y p , z p ) of the radiation source ( 1 ) using the pixel coordinates (x i , y i , z i ) and the incidence direction for each of the plurality of pixels. The invention further refers to a system, a computer-related product and a sample ( 8 ) for performing such method and to the use of a pixel detector ( 2 ) for determining a position of a divergent radiation source ( 1 ).
Opening claim text (preview).
The invention claimed is: 1. Method for determining a position of a divergent radiation source, comprising: irradiating a pixel detector with a predetermined intensity distribution of radiation with wavelength λ originated from the radiation source, wherein the pixel detector comprises a plurality of pixels with pixel coordinates (x i , y i , z i ); detecting, for each of the plurality of pixels, an intensity of the incident radiation; determining, for each of the plurality of pixels, an incidence direction of the incident radiation using information on an orientation of an internal periodic structure within the pixel and the predetermined intensity distribution, wavelength λ and the detected intensity; and determining the position (x p , y p , z p ) of the radiation source using the pixel coordinates (x i , y i , z i ) and the incidence direction for each of the plurality of pixels. 2. Method according to claim 1 , further comprising: the detected intensity for each of the plurality of pixels depends on the incident intensity distribution and the orientation of the internal periodic structure within the pixel and wavelength λ. 3. Method according to claim 1 , further comprising: determining, for each of the plurality of pixels, a polar component (φ i and/or an azimuthal component θi of an angle of incidence of the incident radiation using the information on an orientation of an internal periodic structure within the pixel and the predetermined intensity distribution, wavelength λ and the detected intensity. 4. Method according to claim 1 , further comprising: determining, for each of the plurality of pixels, an orientation of an internal periodic structure by: comparing the detected intensity with a simulated intensity, wherein the simulated intensity depends on an assumed orientation of an internal periodic structure and an assumed radiation source position or measuring the orientation of an internal periodic structure in an independent measurement; determining, for each of the plurality of pixels, an incidence direction and the position (x p , y p , z p ) of the radiation source by: comparing the detected intensity with a simulated intensity, wherein the simulated intensity depends on the determined orientation of an internal periodic structure and an assumed radiation source position of the incident radiation. 5. Method according to claim 4 , characterized in that: the assumed orientation of an internal periodic structure within each of the plurality of pixels corresponds to manufacturer specifications on the orientation of an internal periodic structure; and the determined orientation of an internal periodic structure at each of the plurality of pixels considers manufacturing uncertainties. 6. Method according to claim 1 , characterized in that: the radiation source comprises a spatial extension that is small compared to the dimensions of the detector and quasi-isotropically emits radiation in a predetermined solid angle, and the predetermined intensity distribution is isotropic at each of the plurality of pixels. 7. Method according to claim 1 , characterized in that: the pixel detector comprises a detector surface, divided into a plurality of pixels with pixel coordinates (x i , y i , z i ), and a detector volume, divided into a plurality of voxels corresponding to the plurality of pixels, wherein each voxel comprises a material with a fixed orientation of an internal periodic structure. 8. Method according to claim 1 , characterized in that: the pixel detector comprises a detector surface, divided into a plurality of pixels with pixel coordinates (x i , y i , z i ), and a detector volume, divided into a plurality of voxels corresponding to the plurality of pixels and comprising a single crystalline material. 9. Method according to claim 1 , characterized in that: the divergent radiation source is a sample region reflecting or deflecting an incident beam of a primary radiation. 10. Method according to claim 9 , characterized in that: the sample region comprises a polycrystalline or amorphous material that is configured for quasi-isotropically reflecting or deflecting the primary radiation. 11. System for determining the position of a divergent radiation source, comprising: a divergent radiation source emitting radiation with wavelength λ; a pixel detector with a plurality of pixels with pixel coordinates (x i , y i , z i ); and a control unit configured for performing a method according to claim 1 . 12. System according to claim 11 , characterized in that: the pixel detector is hybrid pixel detector, comprising a sensor with a detector surface, divided into a plurality of pixels with pixel coordinates (x i , y i , z i ), and a detector volume, divided into a plurality of voxels corresponding to the plurality of pixels, wherein each voxel comprises a material with fixed orientation of an internal periodic structure, and an electronics chip with a plurality of amplification pixels, each corresponding to one of the plurality of pixels. 13. The system according to claim 11 , further comprising a primary radiation source, wherein the divergent radiation source is a calibration region of a sample; wherein the calibration region comprises a polycrystalline or amorphous material that is configured for quasi-isotropically reflecting or deflecting an incident beam of primary radiation. 14. A computer readable medium comprising program instructions, wherein when executed in a control unit of a system according to claim 11 the program instructions are operable to perform the method for determining a position of a divergent radiation source, comprising: irradiating a pixel detector with a predetermined intensity distribution of radiation with wavelength λ originated from the radiation source, wherein the pixel detector comprises a plurality of pixels with pixel coordinates (x i , y i , z i ); detecting, for each of the plurality of pixels, an intensity of the incident radiation; determining, for each of the plurality of pixels, an incidence direction of the incident radiation using information on an orientation of an internal periodic structure within the pixel and the predetermined intensity distribution, wavelength λ and the detected intensity; and determining the position (x p , y p , z p ) of the radiation source using the pixel coordinates (x i , y i , z i ) and the incidence direction for each of the plurality of pixels. 15. A method of using a pixel detector for determining a position of a divergent radiation source, wherein the pixel detector comprises a detector surface, divided into a plurality of pixels with pixel coordinates (x i , y i , z i ), and a detector volume, divided into a plurality of voxels corresponding to the plurality of pixels, wherein each voxel comprises a material with fixed orientation of an internal periodic structure at each of the plurality of voxels; wherein the using of the pixel detector comprises: irradiating the pixel detector with radiation originated from the radiation source; wherein the radiation has a predetermined intensity distribution and a wavelength λ, detecting an intensity of the incident radiation for each of the plurality of pixels; determining, for each of the plurality of pixels, an incidence direction of the incident radiation using information on the orientation of the internal periodic structure within the voxel corresponding to the respective pixel and the predetermined intensity distribution, wavelength λ and the detected intensity; and determining the position (x p , y p , z p ) of the radiation source using the pix
array · CPC title
Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons (characterised by the use of optical techniques G01B9/00, G01B11/00) · CPC title
Measuring back scattering · CPC title
Angle determination; Directional detectors; Telescopes (prospecting by the use of nuclear radiation, e.g. of natural or induced radioactivity G01V5/00) · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.