Correlated electron device formed via conversion of conductive substrate to a correlated electron region

Patent metadata

Field	Value
Publication number	US-10217935-B2
Application number	US-201615371457-A
Country	US
Kind code	B2
Filing date	Dec 7, 2016
Priority date	Dec 7, 2016
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

Subject matter disclosed herein may relate to fabrication of correlated electron materials used, for example, to perform a switching function. In embodiments, processes are described in which a correlated electron material film may be formed over a conductive substrate by converting at least a portion of the conductive substrate to CEM.

First claim

What is claimed is:

1. A method of constructing a device, comprising:
forming a plurality of layers of a conductive substrate; and
forming a correlated electron material (CEM) film over the plurality of layers of the conductive substrate, wherein
the CEM film is formed by converting at least a portion of at least one layer of the conductive substrate of the plurality of layers of the conductive substrate to a material comprising an atomic concentration of at least 90.0% of a CEM.

2. The method of claim 1 , wherein converting the at least the portion of the at least one layer of the conductive substrate to the CEM comprises diffusing nitrogen into the at least one layer of the conductive substrate, wherein the CEM comprises an atomic concentration of nitrogen in the range of about 0.1% to about 10.0%.

3. The method of claim 2 , wherein the diffusing the nitrogen into the at least the portion of the at least one layer of the conductive substrate comprises exposing the conductive substrate to gaseous nitrogen.

4. The method of claim 2 , wherein the diffusing the nitrogen into the at least the portion of the at least one layer of the conductive substrate comprises annealing the conductive substrate to bring about diffusing of nitrogen from the conductive substrate into the CEM.

5. The method of claim 1 , wherein the forming the CEM film comprises oxidizing the at least the portion of the at least one layer of the conductive substrate.

6. The method of claim 5 , wherein the forming the CEM film additionally comprises doping the at least the portion of the at least one layer of the conductive substrate wherein,
responsive to oxidizing and doping, the CEM film comprises an atomic concentration of a combination of oxygen and a dopant of less than about 50.0% of an atomic concentration of a combination of oxygen, the dopant, and an element selected from the d-block or the f-block of the periodic table of the elements, or a combination thereof.

7. The method of claim 1 , wherein the converting the at least the portion of the at least one layer of the conductive substrate to the CEM comprises utilizing plasma activation, hot wire, ultraviolet-assisted deposition or laser-assisted deposition, or any combination thereof.

8. The method of claim 1 , wherein the converting the at least the portion of the at least one layer of the conductive substrate to the CEM comprises maintaining a substrate temperature of less than about 80.0° C.

9. The method of claim 1 , wherein one or more layers of the plurality of layers of the conductive substrate comprise a first metal, and wherein one or more layers of the plurality of layers of the conductive substrate comprise a second metal, and wherein the converting the at least the portion of the at least one layer of the conductive substrate to the CEM comprises:
oxidizing one or more layers of the plurality of layers of the conductive substrate, the oxidizing of the one or more layers occurring at a boundary between the first metal and the second metal, wherein the oxidizing gives rise to an atomic concentration of oxygen at the boundary of between about 0.1% and about 10.0%.

10. The method of claim 9 , wherein the oxidizing the one or more layers of the plurality of layers of the conductive substrate comprises diffusing oxygen through the first metal or through the second metal, or through a combination thereof, wherein
responsive to the diffusing, the CEM film comprises an atomic concentration of a combination of oxygen and a dopant of less than about 50.0% of an atomic concentration of a combination of oxygen, the dopant, and an element selected from the d-block or the f-block of the periodic table of the elements, or a combination thereof.

11. The method of claim 9 , further comprising doping the CEM utilizing a molecular component from the first metal or from the second metal, or from a combination thereof.

12. The method of claim 1 , wherein one or more layers of the plurality of layers of the conductive substrate comprise a first metal, and wherein one or more layers of the plurality of layers of the conductive substrate comprise a second metal, and wherein the converting the at least the portion of the at least one layer of the conductive substrate to CEM comprises:
oxynitridizing the one or more layers of the plurality of layers of the conductive substrate, the oxynitridizing of the one or more layers occurring at a boundary between the first metal and the second metal, wherein oxynitridizing gives rise to an atomic concentration of nitrogen at the boundary of between about 0.1% and about 10.0%.

13. The method of claim 12 , wherein the oxynitridizing the one or more layers of the plurality of layers of the conductive substrate comprises diffusing nitrogen through the first metal or through the second metal, or through a combination thereof.

14. The method of claim 12 , further comprising doping the CEM utilizing a molecular component from the first metal or from the second metal, or from a combination thereof.

15. The method of claim 1 , wherein the forming the conductive substrate comprises using an atomic layer deposition process, chemical vapor deposition, plasma chemical vapor deposition, sputter deposition, physical vapor deposition, hot wire chemical vapor deposition, laser enhanced chemical vapor deposition, laser enhanced atomic layer deposition, rapid thermal chemical vapor deposition or gas cluster ion beam deposition, or any combination thereof.

Assignees

• Advanced Risc Mach Ltd

Inventors

• Paz De Araujo Carlos Alberto
• Celinska Jolanta Bozena
• Mcwilliams Christopher Randolph
• Shifren Lucian
• Reid Kimberly Gay

Classifications

• H01L45/16

  Electricity · mapped topic

• H01L45/1233

  Electricity · mapped topic

• H01L45/146

  Electricity · mapped topic

• H01L45/12 Primary

  Electricity · mapped topic

• H01L45/1641

  Electricity · mapped topic