Semiconductor device comprising an oxide layer and an oxide semiconductor layer

Patent metadata

Field	Value
Publication number	US-10217796-B2
Application number	US-201715594813-A
Country	US
Kind code	B2
Filing date	May 15, 2017
Priority date	Oct 17, 2012
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

Stable electrical characteristics of a transistor including an oxide semiconductor layer are achieved. A highly reliable semiconductor device including the transistor is provided. The semiconductor device includes a multilayer film formed of an oxide layer and an oxide semiconductor layer, a gate insulating film in contact with the oxide layer, and a gate electrode overlapping with the multilayer film with the gate insulating film interposed therebetween. The oxide layer contains a common element to the oxide semiconductor layer and has a large energy gap than the oxide semiconductor layer. The composition between the oxide layer and the oxide semiconductor layer gradually changes.

First claim

The invention claimed is:

1. A semiconductor device comprising:
a gate electrode;
a gate insulating film over the gate electrode;
a multilayer film over the gate insulating film, the multilayer film comprising an oxide layer and an oxide semiconductor layer;
a source electrode in contact with a top surface of the oxide layer; and
a drain electrode in contact with the top surface of the oxide layer,
wherein the oxide layer comprises indium and a metal element,
wherein the oxide semiconductor layer comprises indium and the metal element,
wherein an absorption coefficient of the multilayer film measured from a constant photocurrent method is lower than 1×10 −3 cm −1 , and
wherein the oxide layer has a larger energy gap than the oxide semiconductor layer.

2. The semiconductor device according to claim 1 , wherein an atomic ratio of the metal element to indium of the oxide layer is 1.5 times or more as large as an atomic ratio of the metal element to indium of the oxide semiconductor layer.

3. The semiconductor device according to claim 1 , wherein the energy of the bottom of the conduction band of the oxide layer is closer to the vacuum level than the energy of the bottom of the conduction band of the oxide semiconductor layer by greater than or equal to 0.05 eV and less than or equal to 2 eV.

4. The semiconductor device according to claim 1 , wherein the oxide semiconductor layer and the oxide layer further comprise zinc.

5. The semiconductor device according to claim 1 , wherein the metal element is one selected from the group consisting of aluminum, silicon, gallium, germanium, yttrium, zirconium, lanthanum, cerium, neodymium, and hafnium.

6. The semiconductor device according to claim 1 ,
wherein thickness of the oxide semiconductor layer is greater than or equal to 3 nm and less than or equal to 200 nm, and
wherein thickness of the oxide layer is greater than or equal to 3 nm and less than or equal to 50 nm.

7. The semiconductor device according to claim 1 , wherein the source electrode and the drain electrode comprise copper.

8. The semiconductor device according to claim 1 , wherein concentration of copper in the oxide semiconductor layer is lower than 1×10 19 atoms/cm 3 .

9. The semiconductor device according to claim 1 , wherein the gate insulating film comprises any one of aluminum oxide, magnesium oxide, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, and tantalum oxide.

10. The semiconductor device according to claim 1 , wherein an average film density of the oxide layer is 5.75 g/cm 3 to 5.95 g/cm 3 .

11. A semiconductor device comprising:
a gate electrode;
a gate insulating film over the gate electrode;
a multilayer film over the gate insulating film, the multilayer film comprising an oxide layer and an oxide semiconductor layer;
a source electrode in contact with a top surface of the oxide layer; and
a drain electrode in contact with the top surface of the oxide layer,
wherein the oxide layer comprises indium and a metal element,
wherein the oxide semiconductor layer comprises indium and the metal element,
wherein a mixed layer is formed in the multilayer film by moving oxygen between the oxide layer and the oxide semiconductor layer,
wherein an atomic ratio of the metal element to indium of the oxide layer is 1.5 times or more as large as an atomic ratio of the metal element to indium of the oxide semiconductor layer,
wherein an atomic ratio of the metal element to indium of the mixed layer is larger than the atomic ratio of the metal element to indium of the oxide semiconductor layer,
wherein the atomic ratio of the metal element to indium of the mixed layer is smaller than the atomic ratio of the metal element to indium of the oxide layer, and
wherein an absorption coefficient of the multilayer film measured from a constant photocurrent method is lower than 1×10 −3 cm −1 .

12. The semiconductor device according to claim 11 , wherein the energy of the bottom of the conduction band of the oxide layer is closer to the vacuum level than the energy of the bottom of the conduction band of the oxide semiconductor layer by greater than or equal to 0.05 eV and less than or equal to 2 eV.

13. The semiconductor device according to claim 11 , wherein the oxide semiconductor layer and the oxide layer further comprise indium and zinc.

14. The semiconductor device according to claim 11 , wherein the metal element is one selected from the group consisting of aluminum, silicon, gallium, germanium, yttrium, zirconium, lanthanum, cerium, neodymium, and hafnium.

15. The semiconductor device according to claim 11 ,
wherein thickness of the oxide semiconductor layer is greater than or equal to 3 nm and less than or equal to 200 nm, and
wherein thickness of the oxide layer is greater than or equal to 3 nm and less than or equal to 50 nm.

16. The semiconductor device according to claim 11 , wherein the source electrode and the drain electrode comprise copper.

17. The semiconductor device according to claim 11 , wherein the oxide layer has a larger energy gap than the oxide semiconductor layer.

18. The semiconductor device according to claim 11 , wherein concentration of copper in the oxide semiconductor layer is lower than 1×10 19 atoms/cm 3 .

19. The semiconductor device according to claim 11 , wherein the gate insulating film comprises any one of aluminum oxide, magnesium oxide, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, and tantalum oxide.

20. The semiconductor device according to claim 11 , wherein the atomic ratio of the metal element to indium of the mixed layer gradually changes in the mixed layer.

21. The semiconductor device according to claim 11 , wherein an average film density of the oxide layer is 5.75 g/cm 3 to 5.95 g/cm 3 .

Assignees

• Semiconductor Energy Lab

Inventors

• Yamazaki Shunpei
• Okazaki Kenichi
• Mashiyama Mitsuo
• Handa Takuya
• Watanabe Masahiro
• Tokunaga Hajime

Classifications

• H10D84/01

  Manufacture or treatment · CPC title

• H01L27/1225

  Electricity · mapped topic

• H01L51/50

  Electricity · mapped topic

• G02F1/1368

  in which the switching element is a three-electrode device {(G02F1/136277 takes precedence)} · CPC title

• H01L27/2418 Primary

  Electricity · mapped topic