Purge apparatus and purge method

Patent metadata

Field	Value
Publication number	US-10217656-B2
Application number	US-201515120776-A
Country	US
Kind code	B2
Filing date	Jan 9, 2015
Priority date	Mar 17, 2014
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

A nozzle prevents obstruction of alignment of a container without using an actuator. When the nozzle contacts the container before an alignment member does, the container is guided by a guide surface of the nozzle, the nozzle is lowered by a load applied from the container so that the alignment member contacts the container to align the container, and purge gas is injected from the nozzle into the container.

First claim

What is claimed is:

1. A purge apparatus for purging by purge gas a container that houses an article and includes a gas introduction hole in a bottom portion thereof, the purge apparatus comprising:
a platform on which the container is placed;
a nozzle that protrudes upward from the platform and contacts the gas introduction hole of the container to inject purge gas; and
an alignment member that aligns the container; wherein
a side surface of a tip portion of the nozzle includes a guide surface that guides the container; and
an upper surface of the nozzle is supported by an elastic member such that the upper surface of the nozzle is lowered in response to a load applied from the container.

2. The purge apparatus according to claim 1 , wherein the alignment member includes alignment pins fixed to the platform, protruding upward from the platform, and structured to fit into recesses provided in the bottom portion of the container, and the nozzle is higher than the alignment pins.

3. The purge apparatus according to claim 1 , wherein the nozzle is provided with a flat surface on an upper end thereof and causes the flat surface to be inclined by an offset load applied from the gas introduction hole to the nozzle.

4. The purge apparatus according to claim 3 , wherein
the nozzle is further provided at a lower portion thereof with a pedestal and the elastic member that biases the pedestal upward; and
the nozzle is lowered by deformation of the elastic member with application of the load and causes the flat surface of the upper end of the nozzle to be inclined by deformation of the elastic member when the load applies an offset load to the elastic member.

5. The purge apparatus according to claim 4 , wherein
the nozzle is further provided with a hollow shaft connecting the tip portion including the guide surface and the pedestal, and a ring-shaped elastic spacer including an L-shaped structure in cross section along a radial direction thereof;
the platform is provided with a through hole through which the hollow shaft passes and the through hole has a larger diameter than the hollow shaft;
the hollow shaft has a smaller diameter than the tip portion, and a bottom surface of the tip portion is exposed in a flange shape and surrounds the hollow shaft;
the elastic member is positioned between the bottom surface of the tip portion and the platform and biases the tip portion upward; and
one side of the L-shaped structure of the elastic spacer is located in the through hole, and another side of the L-shaped structure is located between the pedestal and a bottom surface of the platform.

6. The purge apparatus according to claim 2 , wherein the elastic member includes a ring-shaped elastic gasket on an upper end of the nozzle.

7. A purge method purging by purge gas a container that houses an article and includes a gas introduction hole in a bottom portion thereof with a purge apparatus including a platform on which the container is placed, a nozzle that protrudes upward from the platform and contacts the gas introduction hole of the container to inject purge gas, and an alignment member that aligns the container, wherein a side surface of a tip portion of the nozzle includes a guide surface that guides the container, and an upper surface of the nozzle is supported by an elastic member such that the upper surface of the nozzle is lowered in response to a load applied from the container, the purge method comprising:
guiding the container by the guide surface of the nozzle;
bringing the nozzle and the container into contact before bringing the alignment member and the container into contact;
lowering the upper surface of the nozzle in response to the load applied from the container;
bringing the alignment member and the container into contact;
aligning the container by the alignment member; and
injecting purge gas from the nozzle into the container.

8. The purge apparatus according to claim 1 , wherein the guide surface is tapered.

Assignees

• Murata Machinery Ltd

Inventors

• Murata Masanao
• Yamaji Takashi

Classifications

• H10P72/3408

  Docking arrangements · CPC title

• H10P72/1918

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H01L21/67379

  Electricity · mapped topic

• H01L21/67393 Primary

  Electricity · mapped topic