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Purge device and load port apparatus including the same
US8978718B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8978718-B2 |
| Application number | US-201213585357-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 14, 2012 |
| Priority date | Aug 15, 2011 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to the purge nozzle and the curtain nozzle, the gas being supplied from the gas supply pipe to the purge nozzle in a direction orthogonal to an extending direction of the gas supply pipe; and a conductance adjusting unit arranged at an end portion of the gas supply pipe, for generating a pressure loss in a gas flow in a configuration in which the gas is supplied to the curtain nozzle at the end portion of the gas supply pipe.
First claim
Opening claim text (preview).
What is claimed is: 1. A gas purge device to be used for a load port apparatus, the load port apparatus comprising: a side base that defines a first mini-environment; and a door capable of closing an opening portion of the side base, the door being configured to hold a lid of a sealed container for containing an object to be contained, and to open and close the lid of the sealed container so that the object to be contained is insertable and removable into/from the sealed conta…
Assignees
Inventors
Classifications
Electricity · mapped topic
- H10P72/0402Primary
Electricity · mapped topic
Cross-Sectional Technologies · mapped topic
- H01L21/67017Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8978718B2 cover?
- To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to…
- Who is the assignee on this patent?
- Emoto Jun, Iwamoto Tadamasa, Miyajima Toshihiko, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0402. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).