Electron gun, control method and control program thereof, and three-dimensional shaping apparatus

Patent metadata

Field	Value
Publication number	US-10217599-B2
Application number	US-201514785730-A
Country	US
Kind code	B2
Filing date	Jan 9, 2015
Priority date	Jan 9, 2015
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

When an emission current is changed, a decrease in brightness of an electron beam is prevented. An electron gun includes a cathode that emits thermoelectrons, a Wehnelt electrode that focuses the thermoelectrons, a control electrode that extracts the thermoelectrons from a distal end of said cathode, an anode that accelerates the thermoelectrons and irradiates a powder with the thermoelectrons as an electron beam, and an optimum condition collection controller that changes at least one of a bias voltage to be applied to the Wehnelt electrode and a control electrode voltage to be applied to the control electrode, and decides a combination of the bias voltage and the control electrode voltage at which the brightness of the electron beam reaches a peak.

First claim

The invention claimed is:

1. An electron gun comprising:
a cathode that emits thermoelectrons;
a Wehnelt electrode that focuses the thermoelectrons;
a control electrode that extracts the thermoelectrons from a distal end of said cathode;
an anode that accelerates the thermoelectrons, and irradiates a powder with the thermoelectrons as an electron beam; and
an optimum condition collection controller that determines a degree of wear of said cathode based on an emission current of said electron gun, and executes a fine adjustment for decreasing a bias voltage of the Wehnelt electrode with maintaining a voltage of the control electrode or executes a readjustment comprising automatically setting a combination of the bias voltage and the control electrode voltage so that a brightness of the electron beam reaches a predetermined brightness, by readjustment of the bias voltage and the voltage of the control electrode, based on the determined degree of wear of said cathode.

2. The electron gun according to claim 1 , wherein when said electron gun is in an idling state, said optimum condition collection controller determines a degree of wear of said cathode.

3. The electron gun according to claim 1 , wherein when a decrease in the emission current is not smaller than a predetermined threshold, said optimum condition collection controller executes the readjustment, and when the decrease in the emission current is smaller than the predetermined threshold, said optimum condition collection controller executes the fine adjustment.

4. The electron gun according to claim 1 , wherein said optimum condition collection controller changes the bias voltage to execute the fine adjustment in order to obtain a desired emission current.

5. The electron gun according to claim 1 , wherein said optimum condition collection controller changes the bias voltage and the control electrode voltage to execute the readjustment in order to obtain a desired emission current.

6. A control method of an electron gun, comprising:
determining a degree of wear of a cathode based on a decrease in an emission current and beam diameter of the electron gun;
executing, when the decrease in the emission current is not smaller than a predetermined threshold, a readjustment comprising automatically setting a combination of a bias voltage of a Wehnelt electrode and a voltage of a control electrode such that, at the combination, a brightness of the electron beam reaches a predetermined brightness, by readjustment of the bias voltage and the voltage of the control electrode voltage, wherein the Wenhelt electrode focuses thermoelectrons emitted by a cathode and the control electrode extracts the thermoelectrons from a distal end of the cathode; and
executing, when the decrease in the emission current is smaller than the predetermined threshold, a fine adjustment for changing the bias voltage with maintaining a voltage of the control electrode.

7. A non-transitory computer readable medium storing a control program of an electron gun for causing a computer to execute a method, comprising:
determining a degree of wear of a cathode based on a decrease in an emission current of the electron gun;
executing, when the decrease in the emission current is not smaller than a predetermined threshold, a readjustment comprising automatically setting a combination of a bias voltage of a Wehnelt electrode and a voltage of a control electrode such that, at the combination, a brightness of the electron beam reaches a predetermined brightness, by readjustment of the bias voltage and the voltage of the a control electrode, wherein the Wenhelt electrode focuses thermoelectrons emitted by a cathode and the control electrode extracts the thermoelectrons from a distal end of the cathode; and
executing, when the decrease in the emission current is smaller than the predetermined threshold, the fine adjustment for changing the bias voltage with maintaining a voltage of the control electrode.

8. A three-dimensional shaping apparatus comprising the electron gun according to claim 1 .

9. The electron gun according to claim 1 , wherein said optimum condition collection controller executes the fine adjustment for decreasing a bias voltage of the Wehnelt electrode based on the decrease in the emission current or automatically sets the combination of the bias voltage and the control electrode voltage, by readjustment of the bias voltage and the voltage of the control electrode based on the decrease in the emission current and a beam diameter of an electron beam.

10. The electron gun according to claim 1 , wherein said optimum condition controller automatically sets a combination of the bias voltage and the control electrode voltage at which a brightness of the electron beam reaches a peak, by readjustment of the bias voltage and the voltage of the control electrode, based on the determined degree of wear of said cathode.

Assignees

• Tech Res Association Future Additive Manufacturing

Inventors

• Sato Takashi

Classifications

• H01J37/065 Primary

  Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title

• H01J37/06 Primary

  Electron sources; Electron guns · CPC title

• B22F12/49

  Scanners · CPC title

• B22F12/41

  characterised by the type, e.g. laser or electron beam · CPC title

• B22F10/36

  of energy beam parameters · CPC title