Force detector, robot, electronic component carrying apparatus, electronic component testing apparatus, part processing apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-10215649-B2
Application number	US-201715461961-A
Country	US
Kind code	B2
Filing date	Mar 17, 2017
Priority date	Jun 13, 2013
Publication date	Feb 26, 2019
Grant date	Feb 26, 2019

Abstract

A force detector includes a first substrate, a second substrate, a circuit board provided between the first substrate and the second substrate, and an element mounted on the circuit board and outputting a signal in response to an external force, wherein a hole is formed in the circuit board at a location where the element is placed, and a first convex part inserted into the hole and protruding toward the element is provided on the first substrate. Further, the element is placed within a periphery of the first convex part as seen from a direction perpendicular to the first substrate.

First claim

What is claimed is:

1. A force detector comprising:
a first substrate;
a second substrate;
a circuit board between the first substrate and the second substrate; and
a sensor device having a first member, a second member and an element outputting a signal in response to an external pressure change,
wherein the element is located between the first member and the second member, and
the first member is in direct contact with each of the first substrate and the circuit board.

2. The force detector according to claim 1 , wherein the first substrate is provided with a convex part protruding toward the sensor device, and
a contact point between the first member and the first substrate is on the convex part.

3. The force detector according to claim 1 , wherein the second member is in contact with the second substrate.

4. The force detector according to claim 1 , wherein a terminal electrically connected to the element and the circuit board is provided on a surface of the first member, and
the surface of the first member on which the terminal is provided is in contact with the first substrate.

5. The force detector according to claim 1 , wherein the sensor device is sandwiched by the first substrate and the second substrate.

6. The force detector according to claim 5 , wherein a part of the first substrate overlaps with the circuit board as viewed in a direction perpendicular to a direction in which the sensor device is sandwiched by the first substrate and the second substrate.

7. The force detector according to claim 1 , wherein the element is pressurized by the first substrate and the second substrate.

8. The force detector according to claim 1 , comprising a plurality of the sensor devices, wherein the sensor devices are located at equal angular intervals along a periphery of the first or second member.

9. The force detector according to claim 1 , wherein the element includes crystal.

10. The force detector according to claim 1 , wherein the first member is provided with a concave part.

11. The force detector according to claim 10 , wherein the concave part is provided with the element and sealed by the second member.

12. The force detector according to claim 1 , wherein a hole through which a pressurization bolt is inserted is formed in the circuit board.

13. A robot comprising:
a base; and
a movable member connected to the base and the force detector according to claim 1 is connected to the movable member.

14. The robot according to claim 13 , wherein the first substrate is provided with a convex part protruding toward the sensor device, and
a contact point between the first member and the first substrate is on the convex part.

15. The robot according to claim 13 , wherein the second member is in contact with the second substrate.

16. The robot to claim 13 , wherein a terminal electrically connected to the element and the circuit board is provided on a surface of the first member, and
the surface of the first member on which the terminal is provided is in contact with the first substrate.

17. The robot according to claim 13 , wherein the sensor device is sandwiched by the first substrate and the second substrate.

18. The robot according to claim 17 , wherein a part of the first substrate overlaps with the circuit board as viewed in a direction perpendicular to a direction in which the sensor device is sandwiched.

19. The robot according to claim 13 , wherein the element is pressurized by the first substrate and the second substrate.

20. The robot according to claim 13 , wherein the force detector includes a plurality of the sensor devices, and
the sensor devices are located at equal angular intervals along a periphery of the first or second member.

Assignees

• Seiko Epson Corp

Inventors

• Matsuzawa Akira
• Kawai Hiroki
• Kamiya Toshiyuki

Classifications

• Y10S901/46

  Sensing device · CPC title

• Y10T74/20335

  Wrist · CPC title

• G01L5/009

  Force sensors associated with material gripping devices · CPC title

• B25J13/085

  Force or torque sensors (B25J13/082, B25J13/084 take precedence) · CPC title

• G01L1/16 Primary

  using properties of piezoelectric devices · CPC title