Double backplate MEMS microphone with a single-ended amplifier input port
US-9516415-B2 · Dec 6, 2016 · US
US10211792B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10211792-B2 |
| Application number | US-201715689760-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 29, 2017 |
| Priority date | Apr 4, 2012 |
| Publication date | Feb 19, 2019 |
| Grant date | Feb 19, 2019 |
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A sensor amplifier arrangement includes an amplifier having a signal input to receive a sensor signal and a signal output, and a feedback path that couples the signal output to the signal input, wherein the feedback path includes an anti-parallel circuit of diodes, and a voltage divider including a first and a second divider resistor and a voltage divider tap between the first and the second divider resistor, wherein the voltage divider couples the signal output to a reference potential terminal, and the voltage divider tap is coupled to the anti-parallel circuit of diodes and the anti-parallel circuit of diodes is coupled to the signal input.
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What is claimed is: 1. A sensor amplifier arrangement comprising: an amplifier having a signal input to receive a sensor signal and a signal output, and a feedback path that couples the signal output to the signal input, wherein the feedback path comprises an anti-parallel circuit of diodes, and a transconductance amplifier having an input coupled to the signal output and an output coupled to the anti-parallel circuit of diodes, and wherein the anti-parallel circuit of diodes is coupled to the signal input and the sensor amplifier arrangement comprises a sensor that is a capacitive sensor and is coupled to the signal input. 2. The sensor amplifier arrangement according to claim 1 , wherein the sensor amplifier arrangement comprises a biasing voltage source coupled to the signal input via the sensor. 3. The sensor amplifier arrangement according to claim 1 , wherein the transconductance amplifier comprises an input stage connected to the input of the transconductance amplifier, and a current mirror that couples the input stage to the output of the transconductance amplifier. 4. The sensor amplifier arrangement according to claim 3 , wherein the input stage is configured to generate an intermediate current, and the current mirror is configured to reduce the intermediate current by a current reduction factor and to generate an output current. 5. The sensor amplifier arrangement according to claim 1 , wherein the feedback path comprises an integration capacitor having a first terminal coupled to the output of the transconductance amplifier. 6. The sensor amplifier arrangement according to claim 1 , wherein the anti-parallel circuit of diodes comprises a first diode that is a bipolar diode and a second diode that is a further bipolar diode. 7. The sensor amplifier arrangement according to claim 1 , wherein the anti-parallel circuit of diodes comprises a first and a second diode, the first diode is a field-effect transistor having a first terminal connected to a first terminal of the first diode, a second terminal, and a control terminal connected to the second terminal of the field-effect transistor and to a second terminal of the first diode, and wherein the second diode is a further field-effect transistor having a first terminal connected to a first terminal of the second diode, a second terminal, and a control terminal connected to the second terminal of the further field-effect transistor and to a second terminal of the second diode. 8. A sensor amplifier arrangement comprising: an amplifier having a signal input to receive a sensor signal, a further signal input, a signal output and a further output, a regulator having an input connected to the further output of the amplifier and an output coupled to the further signal input of the amplifier, a capacitive sensor coupled to the signal input of the amplifier, and an additional capacitor that couples the further signal input of the amplifier to the capacitive sensor. 9. The sensor amplifier arrangement according to claim 8 , wherein the sensor amplifier arrangement comprises a biasing voltage source coupled to a node between the capacitive sensor and the additional capacitor. 10. The sensor amplifier arrangement according to claim 8 , wherein the sensor amplifier arrangement comprises a regulator reference source coupled to a further input of the regulator. 11. The sensor amplifier arrangement according to claim 8 , wherein the amplifier is configured to generate a common mode signal at the further output. 12. A sensor amplifier arrangement comprising: an amplifier having a signal input to receive a sensor signal and a signal output, a regulator having an input coupled to an output side of the amplifier, a capacitive sensor having a first electrode coupled to the signal input of the amplifier, and an additional capacitor coupled to an output of the regulator and a second electrode of the capacitive sensor. 13. The sensor amplifier arrangement according to claim 12 , wherein the amplifier comprises a further input coupled to the second electrode of the capacitive sensor. 14. The sensor amplifier arrangement according to claim 12 , wherein the sensor amplifier arrangement comprises a biasing voltage source coupled to the second electrode of the capacitive sensor. 15. The sensor amplifier arrangement according to claim 12 , wherein the sensor amplifier arrangement comprises a regulator reference source coupled to a further input of the regulator. 16. The sensor amplifier arrangement according to claim 12 , wherein the amplifier is configured to generate a common mode signal applied to the input of the regulator. 17. A sensor amplifier arrangement comprising: an amplifier having a signal input to receive a sensor signal and a signal output, and a feedback path that couples the signal output to the signal input, wherein the feedback path comprises an anti-parallel circuit of diodes, and a transconductance amplifier having an input coupled to the signal output and an output coupled to the anti-parallel circuit of diodes, and wherein the anti-parallel circuit of diodes is coupled to the signal input and the sensor amplifier arrangement comprises a biasing voltage source coupled to the signal input via the sensor.
with semiconductor devices only · CPC title
in integrated circuits · CPC title
there being a feedback over the complete amplifier · CPC title
A variable capacitor being added in the input circuit, e.g. base, gate, of an amplifier stage · CPC title
A diode being coupled in a feedback path of an amplifier stage, e.g. active or passive diode · CPC title
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