Wafer support, chemical vapor phase growth device, epitaxial wafer and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-10208398-B2
Application number	US-201515531593-A
Country	US
Kind code	B2
Filing date	Nov 27, 2015
Priority date	Dec 2, 2014
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

Provided is a manufacturing device capable of effectively and sufficiently reducing an edge crown. The wafer support is used in a chemical vapor phase growth device in which an epitaxial film is grown on a main surface of a wafer using a chemical vapor deposition method, the wafer support including: a wafer mounting surface having an upper surface on which a substrate is mounted; and a wafer support portion that rises to surround a wafer to be mounted, in which a height from an apex of the wafer support portion to a main surface of the wafer mounted on the wafer mounting surface is 1 mm or more.

First claim

The invention claimed is:

1. A chemical vapor phase growth device comprising:
a wafer support,
wherein the wafer support comprising:

a wafer mounting surface having an upper surface on which a wafer is mounted; and
a wafer support portion that rises to surround the wafer to be mounted,
wherein a height from a portion of a reaction space side-upper surface of the wafer support portion, which is most distant from the wafer mounting surface, to a main surface of the wafer mounted on the wafer mounting surface is 1 mm or more.

2. The chemical vapor phase growth device according to claim 1 ,
wherein the wafer support portion comprises the same material as that of the epitaxial film to be formed on the main surface of the wafer.

3. The chemical vapor phase growth device according to claim 1 ,
wherein at least a part of the wafer support portion is formed of a material comprising a constituent element of the epitaxial film.

4. The chemical vapor phase growth device according to claim 3 ,
wherein the wafer is a SiC single-crystal substrate,
the epitaxial film is a SiC epitaxial film, and
the material is graphite.

5. The chemical vapor phase growth device according to claim 4 ,
wherein the wafer support portion is formed of graphite,
a coating layer is formed on at least a part of the wafer support portion, and
graphite on a portion of the wafer support portion which is not covered with the coating layer is exposed.

6. The chemical vapor phase growth device according to claim 1 ,
wherein a flow rate of gas which is supplied to the main surface of the wafer mounted on the wafer support is 0.1 m/s to 10 m/s.

7. The chemical vapor phase growth device according to claim 1 ,
wherein an interval between the wafer support portion and an outer peripheral surface of the wafer mounted on the wafer mounting surface is designed to be 0.1 mm to 0.5 mm.

8. The chemical vapor phase growth device according to claim 1 ,
wherein during growth of the epitaxial film, a growth pressure is 25 kPa or lower and a growth temperature is 1400° C. or higher.

9. The chemical vapor phase growth device according to claim 1 , further comprising:
a mounting plate that comprises a concave holder;
wherein
the device is a device for manufacturing a SiC epitaxial wafer in which a SiC epitaxial film is grown on a main surface of a SiC substrate using a chemical vapor deposition method, and
the wafer support is disposed in the concave holder and has an upper surface on which the SiC substrate is mounted.

10. The chemical vapor phase growth device according to claim 9 ,
wherein a flow rate of gas which is supplied to the main surface of the SiC substrate mounted on the wafer support is 0.1 m/s to 10 m/s.

11. A method of manufacturing a SiC epitaxial wafer in which a SiC epitaxial film is grown on a main surface of a SiC substrate using a chemical vapor deposition method, the method comprising steps of:
using a chemical vapor phase growth device according to claim 1 further comprising a mounting plate that comprises a concave holder, wherein the wafer support is disposed in the concave holder and has an upper surface on which a SiC substrate is mounted, and
forming the SiC epitaxial film on the SiC substrate while forming a flow of a raw material gas, which passes a region above the wafer support portion and reaches the main surface of the SiC substrate.

12. The method of manufacturing a SiC epitaxial wafer according to claim 11 ,
wherein a flow rate of gas which is supplied to the main surface of the SiC substrate mounted on the wafer support is 0.1 m/s to 10 m/s.

13. An epitaxial wafer which is manufactured using the chemical vapor phase growth device according to claim 1 , the epitaxial wafer comprising:
an epitaxial film that is formed on a main surface of the wafer,
wherein a height of an edge crown, which is formed on a wafer peripheral portion of the epitaxial film, from a level surface of the epitaxial film is within 30% with respect to a thickness of the epitaxial film at a wafer center.

14. An epitaxial wafer which is manufactured using the chemical vapor phase growth device according to claim 9 , the epitaxial wafer comprising:
an epitaxial film that is formed on a main surface of the wafer,
wherein a height of an edge crown, which is formed on a wafer peripheral portion of the epitaxial film, from a level surface of the epitaxial film is within 30% with respect to a thickness of the epitaxial film at a wafer center.

15. The epitaxial wafer according to claim 13 ,
wherein the thickness of the epitaxial film at the wafer center is 30 μm or more.

16. The epitaxial wafer according to claim 13 ,
wherein the epitaxial film is formed of silicon carbide.

Assignees

• Showa Denko Kk

Inventors

• Muto Daisuke
• NORIMATSU Jun

Classifications

• H10P14/20

  of semiconductor materials · CPC title

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/7606

  characterised by edge clamping, e.g. clamping ring · CPC title