Apparatus for depositing a thin film

Patent metadata

Field	Value
Publication number	US-10208397-B2
Application number	US-201615204994-A
Country	US
Kind code	B2
Filing date	Jul 7, 2016
Priority date	Aug 3, 2015
Publication date	Feb 19, 2019
Grant date	Feb 19, 2019

Abstract

An apparatus is provided for depositing a thin film. The apparatus includes a chamber, a susceptor disposed in the chamber and supporting a substrate, a reflection housing disposed outside the chamber, a light source unit disposed in the reflection housing and irradiating light to the susceptor, and a light controlling unit blocking at least a portion of an irradiation path of the light to control an irradiation area of the light on the susceptor. At least a portion of the light controlling unit is disposed in the reflection housing.

First claim

What is claimed is:

1. An apparatus for depositing a thin film, the apparatus comprising:
a chamber;
a susceptor disposed in the chamber, the susceptor is configured to support a substrate;
a reflection housing disposed outside the chamber;
a light source unit disposed in the reflection housing, the light source unit irradiating light to the susceptor; and
a light controlling unit blocking at least a portion of an irradiation path of the light to control an irradiation area of the light on the susceptor,
wherein at least a portion of the light controlling unit is disposed between the light source, unit and the susceptor, and
wherein the light controlling unit comprises:
a blocking part blocking the at least a portion of the irradiation path of the light so that a portion of the light is prevented from arriving at the susceptor;
a base part attached fixedly to the chamber;
a supporting part connecting the blocking part to the base part; and wherein the light controlling unit is disposed in the reflection housing.

2. The apparatus of claim 1 ,
wherein the blocking part comprises:
a core portion; and
a coating layer surrounding the core portion.

3. The apparatus of claim 2 ,
wherein the core portion includes a metal material, and
wherein the coating layer is a reflection layer.

4. The apparatus of claim 1 ,
wherein the blocking part has a ring shape when viewed from a plan view, and
wherein the blocking part is coaxially aligned with respect to a central axis of the susceptor.

5. The apparatus of claim 4 ,
wherein the blocking part comprises:
a first body and a second body coupled to each other to constitute the ring shape,
wherein each of the first and second bodies has an arc shape, and
wherein at least one of a radius of curvature, a central angle, a shape of a cross section, a width of the cross section, a height of the cross section or a tilt angle of the cross section of the first body is different from that or those of the second body.

6. The apparatus of claim 1 ,
wherein the blocking part has a cross-sectional shape that corresponds with a parallelogram.

7. The apparatus of claim 1 ,
wherein the blocking part is tilted with respect to a plane perpendicular to a central axis of the susceptor.

8. The apparatus of claim 1 , wherein the blocking part has an arc shape.

9. The apparatus of claim 1 ,
wherein the light controlling unit further comprises:
a clamp part fixing the supporting part to the base part,
wherein a buffer space is provided between the clamp part and the supporting part.

10. An apparatus for depositing a thin film, the apparatus comprising:
a chamber;
a susceptor disposed in the chamber, the susceptor is configured to support a substrate; a reflection housing disposed outside the chamber;
a light source unit disposed above the susceptor, the light source unit irradiating light toward the susceptor; and
a light controlling unit disposed between the light source unit and the susceptor to control an irradiation area of the light directed to the susceptor,
a preheating ring configured to preheat the process gas to a predetermined temperature so as to pyrolyze the process gas;
a gas injection part injecting a process gas for depositing a thin film on the substrate into the chamber;
a gas exhaust part disposed to the opposite to the gas injection part respective to the susceptor, the gas exhaust part exhausting the process gas, and wherein the light controlling unit is disposed in the reflection housing.

11. The apparatus of claim 10 ,
wherein the light controlling unit comprises:
a core portion blocking the light; and
a coating layer surrounding the core portion,

wherein the core portion includes a ceramic material, and
wherein a coating layer includes a material having a higher etch resistance than that of the core portion.

12. The apparatus of claim 11 , wherein the core portion has an arc shape.

13. The apparatus of claim 11 , wherein the core portion includes a metal material, and
wherein the coating layer includes at least one of gold or silver.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Ryu Seung-Min
• Lee Sang Min
• Jeong Hee Jong
• Kim Chaeho
• Son Ji Su
• Lee Jaebong
• Lim Juwan
• Choi Jungwoo

Classifications

• C23C16/4584 Primary

  the substrate being rotated · CPC title

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• C30B25/16 Primary

  Controlling or regulating (controlling or regulating in general G05) · CPC title

• C30B25/105

  by irradiation or electric discharge · CPC title

• C23C16/4585

  Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds · CPC title